Packaged surface acoustic wave devices
Packaged surface acoustic wave devices are provided. The packaged surface acoustic wave devices are relatively thin and can have a height of less than 220 micrometers. The packaged surface acoustic wave device includes a photosensitive resin over a conductive structure which may be formed by a plating process. The conductive structure may overlie a cavity-defining structure encapsulating a surface acoustic wave device, the cavity-defining structure including walls and a roof. The photosensitive resin can include a phenol resin. The photosensitive resin can be relatively thin. Edge portions of a piezoelectric substrate can be free from the photosensitive resin.
1. A packaged surface acoustic wave device comprising:
a cavity roof over an interdigital transducer electrode of a surface acoustic wave device;
a conductive structure over the cavity roof; and
a photosensitive buffer coat layer over the conductive structure, the packaged surface acoustic wave device having a height of 220 micrometers or less.
2. The packaged surface acoustic wave device of claim 1 wherein the packaged surface acoustic wave device has a height of 200 micrometers or less.
3. The packaged surface acoustic wave device of claim 1 wherein the photosensitive buffer coat layer has a height of 15 micrometers or less.
4. The packaged surface acoustic wave device of claim 1 further comprising a piezoelectric substrate having a first side on which the interdigital transducer electrode is disposed, and a cavity wall on the first side of the piezoelectric substrate and supporting the cavity roof.
5. The packaged surface acoustic wave device of claim 4 wherein an edge portion of the first side of the piezoelectric substrate is free from the photosensitive buffer coat layer.
6. The packaged surface acoustic wave device of claim 1 further comprising a piezoelectric substrate having a first side and a second side opposite the first side, the interdigital transducer electrode being on the first side, and a marking extending into the second side, the marking extending 1 micrometer or less into the piezoelectric substrate.
7. The packaged surface acoustic wave device of claim 1 further comprising a terminal in physical contact with the conductive structure though an opening in the photosensitive buffer coat layer.
8. The packaged surface acoustic wave device of claim 1 wherein the photosensitive buffer coat layer includes phenol resin.
9. The packaged surface acoustic wave device of claim 1 wherein the photosensitive buffer coat layer has a negative photosensitivity.
10. The packaged surface acoustic wave device of claim 1 wherein the surface acoustic wave device includes a plurality of surface acoustic wave resonators configured to filter a radio frequency signal.
11. A packaged surface acoustic wave device comprising:
a cavity structure supported by a die and cooperating the die to encapsulate an interdigital transducer electrode of a surface acoustic wave device;
a conductive structure extending over a portion of an outer surface of the cavity structure; and
an insulating layer extending over the conductive structure, a portion of the insulating layer overlying a portion of the conductive structure having a thickness of less than 15 micrometers.
12. The packaged surface acoustic wave device of claim 11 wherein the cavity structure includes a cavity wall supported by a first surface of the die and a cavity roof extending over the interdigital transducer electrode and supported by the cavity wall.
13. The packaged surface acoustic wave device of claim 12 further comprising a plurality of terminals, each of the terminals extending through a portion of the insulating layer and contacting a portion of the conductive structure.
14. The packaged surface acoustic wave device of claim 11 wherein the insulating layer includes a photoresist material.
15. The packaged surface acoustic wave device of claim 14 wherein the insulating layer includes a negative photoresist.
16. The packaged surface acoustic wave device of claim 14 wherein the die comprises a laser-marked piezoelectric substrate having a first side and a second side, the first side supporting the cavity structure, the second side of the laser-marked piezoelectric substrate having a laser-marked section.
17. A packaged surface acoustic wave device comprising:
a piezoelectric substrate;
a packaging structure supported by a first surface of the piezoelectric substrate and defining a cavity, the packaging structure including an outer layer including photosensitive resin and a conductive layer at least partially between the cavity and the photosensitive resin; and
a plurality of interdigital transducer electrodes supported by the piezoelectric substrate and located within the cavity, the plurality of interdigital transducer electrodes including a first interdigital transducer electrode of a first resonator and a second interdigital transducer electrode of a second resonator.
18. The packaged surface acoustic wave device of claim 17 wherein the packaging structure includes a cavity roof and a cavity wall, the cavity roof and the cavity wall both located between a portion of the outer layer and the plurality of interdigital transducer electrodes.
19. The packaged surface acoustic wave device of claim 17 wherein the packaging structure includes a conductive structure having the conductive layer in electrical communication with at least one of the plurality of interdigital transducer electrodes.
20. The packaged surface acoustic wave device of claim 19 wherein the packaging structure includes at least one terminal overlying a portion of the outer layer and extending through a portion of the outer layer to contact the conductive structure.