Substrate processing apparatus and substrate processing method
According to one embodiment, a substrate processing apparatus includes a table configured to place a substrate thereon and to connect the substrate to a positive electrode, an counter electrode located opposite to the table, having a plurality of holes, and connected to a negative electrode, and a holding unit located opposite to the table across the counter electrode and configured to supply a chemical liquid to the counter electrode while holding the counter electrode.
1. A substrate processing apparatus comprising:
a support structure configured to connect a substrate to a positive electrode of a direct-current power source;
a counter electrode, located opposing the support structure, that includes a plurality of holes, and is connected to a negative electrode of the direct-current power source;
a holder having a liquid passage hole, wherein the holder is located opposing the support structure and over the counter electrode and configured to supply a chemical liquid to the counter electrode while holding the counter electrode;
an edge grip provided on and along an outer peripheral of the support structure, the edge grip being in contact with the support structure; and
a guide provided at a lower portion and along an outer circumference of the holder.
2. The substrate processing apparatus according to claim 1 , wherein the support structure and the holder rotate in synchronization with each other.
3. The substrate processing apparatus according to claim 1 , wherein a shape of the counter electrode is a plate or plate-like.
4. The substrate processing apparatus according to claim 1 , wherein the counter electrode is a capillary body with one end connected to the holder or a reticular body having a plurality of pieces formed in a mesh-like shape.
5. The substrate processing apparatus according to claim 1 , wherein the substrate and the counter electrode are not in contact with each other.
6. The substrate processing apparatus according to claim 4 ,
wherein either the capillary body or the reticular body includes a plurality of counter electrodes, and
wherein the plurality of counter electrodes is arranged in a rotational direction on the holder.
7. The substrate processing apparatus according to claim 4 ,
wherein the capillary body, extending from the holder to the substrate, that includes an insulator core covered by a noble metal film.
8. The substrate processing apparatus according to claim 1 , wherein the edge grip and the guide are configured to contact each other.
9. The substrate processing apparatus according to claim 1 , wherein the counter electrode is a plurality of capillary bodies, each of the capillary bodies having one end connected to the holder and extending toward the substrate.
10. The substrate processing apparatus according to claim 9 , wherein each of the capillary bodies includes an insulator core covered by a noble metal film.
11. The substrate processing apparatus according to claim 1 , wherein the counter electrode includes a plurality of reticular bodies, each of the reticular bodies having a plurality of pieces formed in a mesh-like shape.
12. The substrate processing apparatus according to claim 1 , wherein the guide is provided above the edge grip.