Switching device
A switching device may include: a n-type source layer; a p-type body layer in contact with the source layer; a n-type drift layer in contact with the body layer; a gate insulating film covering a range extending across a surface of the source layer, a surface of the body layer, and a surface of the drift layer; and a gate electrode opposed to the source layer, the body layer, and the drift layer via the gate insulating film, wherein the gate electrode includes a first electric conductor and a second electric conductor having a work function smaller than a work function of the first electric conductor, the first electric conductor is in contact with a part of the gate insulating film covering the body layer, and the second electric conductor is in contact with a part of the gate insulating film covering the drift layer.
1. A switching device, comprising:
a source layer of n-type;
a body layer of p-type being in contact with the source layer;
a drift layer of n-type being in contact with the body layer and separated from the source layer by the body layer;
a gate insulating film covering a range extending across a surface of the source layer, a surface of the body layer, and a surface of the drift layer; and
a gate electrode opposed to the source layer, the body layer, and the drift layer via the gate insulating film, wherein
the gate electrode comprises a first electric conductor and a second electric conductor having a work function smaller than a work function of the first electric conductor,
the first electric conductor is in contact with a part of the gate insulating film covering the body layer and the first electric conductor comprises nickel, gold, platinum, palladium, p-type polysilicon, or the like, and
the second electric conductor is in contact with a part of the gate insulating film covering the drift layer and the second electric conductor comprises titanium, aluminum, n-type polysilicon, or the like.
2. The switching device of claim 1 , wherein the second electric conductor is in contact with a part of the gate insulating film covering a border between the body layer and the drift layer.
3. The switching device of claim 1 , further comprising:
a semiconductor substrate, wherein
the body layer includes a plurality of body layers,
the source layer includes a plurality of source layers, the plurality of body layers is located in the semiconductor substrate so as to be disposed at a surface of the semiconductor substrate and be separated from each other,
the plurality of source layers is located in the semiconductor substrate such that each source layer is surrounded by a corresponding one of the body layers and is disposed at the surface of the semiconductor substrate, and
the drift layer is located in the semiconductor substrate so as to be disposed at the surface of the semiconductor substrate in a range interposed between the plurality of body layers.
4. The switching device of claim 3 , wherein the gate insulating film comprises a part covering the surface of the drift layer in the range interposed between the plurality of body layers, and the second electric conductor is in contact with an entirety of the part of the gate insulating film covering the surface of the drift layer in the range interposed between the plurality of body layers.
5. The switching element of claim 3 , further comprising:
first contact electrodes constituted of a material same as a material of the first electric conductor, each first contact electrode being in contact with a corresponding one of the body regions; and
second contact electrodes constituted of a material same as a material of the second electric conductor, each second contact electrode being in contact with a corresponding one of the source regions.
6. The switching device of claim 1 , wherein
the gate insulating film covers a range extending across an upper surface of the source layer, an upper surface of the body layer, and an upper surface of the drift layer,
the gate electrode covers an upper surface of the gate insulating film,
the first electric conductor is in contact with the upper surface of the gate insulating film at a position right above an interface between the gate insulating film and the body layer, and
the second electric conductor is in contact with the upper surface of the gate insulating film at a position right above an interface between the gate insulating film and the drift layer.
7. A switching device, comprising:
a source layer of n-type;
a body layer of p-type being in contact with the source layer;
a drift layer of n-type being in contact with the body layer and separated from the source layer by the body layer;
a gate insulating film covering a range extending across a surface of the source layer, a surface of the body layer, and a surface of the drift layer; and
a gate electrode opposed to the source layer, the body layer, and the drift layer via the gate insulating film, wherein
the gate electrode comprises a first electric conductor and a second electric conductor having a work function smaller than a work function of the first electric conductor,
the first electric conductor is in contact with a part of the gate insulating film covering the body layer,
the second electric conductor is in contact with a part of the gate insulating film covering the drift layer,
the gate insulating film covers a range extending across an upper surface of the source layer, an upper surface of the body layer, and an upper surface of the drift layer,
the gate electrode covers an upper surface of the gate insulating film,
the first electric conductor is in contact with the upper surface of the gate insulating film at a position right above an interface between the gate insulating film and the body layer, and
the second electric conductor is in contact with the upper surface of the gate insulating film at a position right above an interface between the gate insulating film and the drift layer.