Liquid delivery member, liquid delivery apparatus, and semiconductor device manufacturing method
According to one embodiment, a liquid delivery member is provided which is to be arranged at a predetermined distance from a processing object, and which is configured to deliver a liquid from a slit while the liquid delivery member and the processing object are caused to make relative displacement therebetween in a first direction. The liquid delivery member includes a delivery amount adjustment part provided on a face that forms the slit, extending in a second direction orthogonal to the first direction, and configured to adjust a delivery amount of the liquid.
1. A liquid delivery member delivering a liquid onto a processing object while being caused to make relative displacement between the liquid delivery member and the processing object in a first direction, the liquid delivery member comprising:
a first block and a second block that are disposed to interpose a slit, into which the liquid is supplied, the first and second blocks each having a width extending in a second direction orthogonal to the first direction: and
delivery amount adjustment mechanisms each configured to adjust a delivery amount of the liquid, each of the delivery amount adjustment mechanisms:
including a piezoelectric element that deforms in accordance with an applied voltage and changes a gap of the slit, the piezoelectric element having a width smaller than the width of each of the first and second blocks; and
being provided at a tip of the first block or the second block, from which the liquid is delivered onto the processing object,
wherein the delivery amount adjustment mechanisms are arranged in the second direction on a face of the first block and/or a face of the second block in the slit.
2. The liquid delivery member according to claim 1 , wherein each of the delivery amount adjustment: mechanisms is configured to change a gap of the slit in units of a predetermined length in the second direction.
3. The liquid delivery member according to claim 1 , wherein each of the delivery amount adjustment mechanisms further includes a first electrode and a second electrode that are stacked while interposing the piezoelectric element.
4. The liquid delivery member according to claim 1 , wherein each of the delivery amount adjustment mechanisms is configured to change a gap of the slit in the first direction.
5. The liquid delivery member according to claim 1 , wherein the delivery amount adjustment mechanisms are provided to face each other on the faces of the first block and the second block in the slit.
6. The liquid delivery member according to claim 1 , wherein each of the delivery amount adjustment mechanisms is configured to set a gap of the slit constant among positions in the second direction.
7. A liquid delivery apparatus, comprising:
a stage configured to mount a processing object thereon;
a liquid storing part that stores a liquid;
a liquid delivery member configured to receive the liquid from the liquid storing part through a piping line and to deliver the liquid onto the processing object, the liquid delivery member being caused to make relative displacement between the liquid delivery member and the stage in a first direction; and
a controller configured to control operation of the stage and the liquid delivery member, wherein
the liquid delivery member includes:
a first block and a second block that are disposed to interpose a slit, into which the liquid received through the piping line is supplied, the first and second blocks each having a width extending in a second direction orthogonal to the first direction: and
delivery amount adjustment mechanisms each configured to adjust a delivery amount of the liquid in accordance with an instruction from the controller, each of the delivery amount adjustment mechanisms:
including a piezoelectric element that deforms in accordance with an applied voltage and changes a gap of the slit, the piezoelectric element having a. width smaller than the width of each of the first and second blocks; and
being provided at a tip of the first block or the second block, from which the liquid is delivered onto the processing object, and
the delivery amount adjustment mechanisms are arranged in the second direction on a face of the first block and/or a face of the second block in the slit.
8. The liquid delivery apparatus according to claim 7 , wherein each of the delivery amount adjustment mechanisms is configured to change a gap of the slit in units of a predetermined length in the second direction.
9. The liquid delivery apparatus according to claim 7 , wherein each of the delivery amount adjustment mechanisms further includes a first electrode and a second electrode that are stacked while interposing the piezoelectric element.
10. The liquid delivery apparatus according to claim 7 , wherein each of the delivery amount adjustment mechanisms is configured to change a gap of the slit in the first direction.
11. The liquid delivery apparatus according to claim 7 . wherein the delivery amount adjustment mechanisms adjustment mechanisms are provided to face each other on the faces of the first block and the second block in the slit.
12. The liquid delivery apparatus according to claim 7 , wherein each of the delivery amount adjustment mechanism is configured to set a gap of the slit constant among positions in the second direction.
13. The liquid delivery member according to claim 1 , further comprising elastic films having elasticity, the elastic films being provided to cover the delivery amount adjustment mechanisms.
14. The liquid delivery apparatus according to claim 7 , wherein the liquid delivery member further includes elastic films having elasticity, the elastic films being provided to cover the delivery amount adjustment mechanisms.