Measuring apparatus
According to one embodiment, there is provided a measuring apparatus including a measurement section and a control section. The measurement section is configured to acquire a response from a sample. The control section is configured to compare a loading obtained by performing principal component analysis in advance with a first evaluation-use loading obtained by performing principal component analysis onto the response acquired from the sample, and to generate a first reliability index for measurement using principal component analysis, in accordance with a comparison result.
1. A measuring apparatus comprising:
a measurement section configured to acquire a response from a sample; and
a control section configured to compare a loading obtained by performing principal component analysis in advance with a first evaluation-use loading obtained by performing principal component analysis onto the response acquired from the sample, and to generate a first reliability index for measurement using principal component analysis, in accordance with a comparison result.
2. The measuring apparatus according to claim 1 , further comprising a storage section that stores the loading obtained by performing principal component analysis in advance,
wherein the control section is configured to obtain the first evaluation-use loading by performing principal component analysis onto the response acquired from the sample, and to compare the stored loading with the obtained first evaluation-use loading.
3. The measuring apparatus according to claim 2 , wherein
the control section is configured to further compare the first evaluation-use loading with a second evaluation-use loading obtained by performing principal component analysis onto a response previously acquired from another sample, and to generate a second reliability index for measurement using principal component analysis, in accordance with a comparison result.
4. The measuring apparatus according to claim 3 , wherein
the control section is configured to obtain the second evaluation-use loading by performing principal component analysis onto responses previously acquired from a plurality of other samples.
5. The measuring apparatus according to claim 3 , wherein
the storage section stores therein the second evaluation-use loading.
6. The measuring apparatus according to claim 5 , wherein
the storage section stores therein the first evaluation-use loading after the control section compares the first evaluation-use loading with the second evaluation-use loading.
7. The measuring apparatus according to claim 3 , wherein
the first evaluation-use loading includes a second coefficient vector obtained by performing principal component analysis onto a response acquired from the sample,
the second evaluation-use loading includes a third coefficient vector obtained by performing principal component analysis onto the response previously acquired from another sample, and
the control section is configured to obtain a second coincidence degree between the second coefficient vector and the third coefficient vector as the second reliability index.
8. The measuring apparatus according to claim 7 , wherein
the second coincidence degree includes a root mean square error between the second coefficient vector and the third coefficient vector, or a correlation coefficient between the second coefficient vector and the third coefficient vector.
9. The measuring apparatus according to claim 7 , wherein
the control section is configured to give notice of information indicating a sign of an abnormality when the second coincidence degree is lower than a second threshold.
10. The measuring apparatus according to claim 7 , wherein
the control section is configured to obtain a measurement value corresponding to the response acquired from the sample by using a first coefficient vector and a regression coefficient when the second coincidence degree is more than or equal to a second threshold.
11. The measuring apparatus according to claim 1 , wherein
the loading obtained by performing principal component analysis in advance includes a first coefficient vector obtained by performing principal component analysis in advance,
the first evaluation-use loading includes a second coefficient vector obtained by performing principal component analysis onto the response acquired from the sample, and
the control section is configured to obtain a first coincidence degree between the first coefficient vector and the second coefficient vector as the first reliability index.
12. The measuring apparatus according to claim 11 , wherein
the first coincidence degree includes a root mean square error between the first coefficient vector and the second coefficient vector, or a correlation coefficient between the first coefficient vector and the second coefficient vector.
13. The measuring apparatus according to claim 11 , wherein
the control section is configured to give notice of error information when the first coincidence degree is lower than a first threshold.
14. The measuring apparatus according to claim 11 , wherein
the control section is configured to re-obtain the loading obtained by performing principal component analysis in advance when the first coincidence degree is lower than a first threshold.
15. The measuring apparatus according to claim 11 , wherein
the control section is configured to obtain a measurement value corresponding to the response acquired from the sample by using the first coefficient vector and a regression coefficient when the first coincidence degree is more than or equal to a first threshold.
16. The measuring apparatus according to claim 15 , wherein
the control section is configured to obtain the regression coefficient in advance by performing principal component regression using reference data and a principal component value according to the loading obtained by performing principal component analysis in advance.
17. The measuring apparatus according to claim 1 , wherein
the measurement section is configured to perform optical measurement to the sample, and to detect a spectrum from the sample as the response.
18. The measuring apparatus according to claim 17 , wherein
the control section is configured to obtain a dimensional shape of the sample corresponding to the spectrum acquired from the sample.
19. The measuring apparatus according to claim 1 , wherein
the control section is configured to compare a plurality of loadings obtained by performing principal component analysis in advance with a plurality of first evaluation-use loadings individually, and to generate the first reliability index, in accordance with respective comparison results.
20. The measuring apparatus according to claim 19 , wherein
the plurality of loadings obtained by performing principal component analysis in advance include a plurality of first coefficient vectors obtained by individually performing principal component analysis in advance,
the plurality of first evaluation-use loadings include a plurality of second coefficient vectors obtained by individually performing principal component analysis onto the response acquired from the sample, and
the control section is configured to obtain a coincidence degree between the plurality of first coefficient vectors and the plurality of second coefficient vectors as the first reliability index.