Semiconductor device including a passivation film and multiple word lines
View Patent ↗A semiconductor device according to an embodiment includes a semiconductor substrate, a plurality of conductive layers extending in a first direction on the semiconductor substrate, and laminated in a third direction perpendicular to the first direction and a second direction at intervals in the second direction perpendicular to the first direction, and a passivation film which has several layers provided above the plurality of conductive layers. The passivation film has a first nitride film provided above the plurality of conductive layers, and a second nitride film provided on the first nitride film, and the second nitride film has the concave and convex shape which is repeated along the second direction.
1. A semiconductor device comprising:
a semiconductor substrate;
a plurality of conductive layers extending in a first direction on the semiconductor substrate, and laminated in a third direction perpendicular to the first direction and a second direction at intervals in the second direction perpendicular to the first direction; and
a passivation film which has several layers provided above the plurality of conductive layers,
wherein the passivation film has a first nitride film provided above the plurality of conductive layers, and a second nitride film provided on the first nitride film, and the second nitride film has the concave and convex shape which is repeated along the second direction,
wherein the passivation film is provided in a first portion provided in a cell region in which the plurality of conductive layers are provided, and a second portion provided in a peripheral circuit region adjacent to the cell region in the first direction or the second direction, and the first portion has the concave and convex shape, and the second portion is a flat film, and
wherein the semiconductor device further comprises a memory film which penetrates through the plurality of conductive layers in the third direction in the cell region, and the plurality of conductive layers are word lines disposed opposite to the memory film.
2. The semiconductor device according to claim 1 ,
wherein hydrogen content of the first nitride film is different from hydrogen content of the second nitride film.
3. The semiconductor device according to claim 1 ,
wherein a central pitch of the convex portion in the second direction is the same as a pitch of the conductive layers in the second direction.
4. The semiconductor device according to claim 1 ,
wherein one of the convex portion is formed for the plurality of conductive layers.