IP Library Granted Patent US 11,217,288
Granted Patent B2
US 11,217,288 · App. 16/566,472 · Granted Jan 4, 2022

Magnetic device and memory device

Inventors: Kazuya Sawada (Seoul, KR); Young Min Eeh (Seongnam-si, KR); Tadaaki Oikawa (Seoul, KR); Kenichi Yoshino (Seongnam-si, KR); Eiji Kitagawa (Seoul, KR); Taiga Isoda (Seoul, KR)
Assignee: TOSHIBA MEMORY CORPORATION
G11C11/161H01L27/222H01L43/08H01L43/10
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Quick Facts
Patent No.
US 11,217,288
App. No.
16/566,472
Granted
Jan 4, 2022
Kind
B2
Abstract

According to one embodiment, a magnetic device includes: a first magnetic material provided above a substrate; a second magnetic material provided between the substrate and the first magnetic material; a nonmagnetic material provided between the first magnetic material and the second magnetic material; a first layer provided between the substrate and the second magnetic material and including an amorphous layer; and a second layer provided between the amorphous layer and the second magnetic material and including a crystal layer.

Claims (36)

1. A magnetic device comprising:

a first magnetic material provided above a substrate;

a second magnetic material provided between the substrate and the first magnetic material;

a nonmagnetic material provided between the first magnetic material and the second magnetic material;

a first layer provided between the substrate and the second magnetic material and including an amorphous layer;

a second layer provided between the amorphous layer and the second magnetic material and including a first crystal layer; and

a third layer provided between the first layer and the second layer and including a second crystal layer having tantalum.

2. The magnetic device according to claim 1 , wherein the second magnetic material includes a first magnetic layer, a second magnetic layer between the first magnetic layer and the second layer, and a nonmagnetic layer between the first magnetic layer and the second magnetic layer.

3. The magnetic device according to claim 1 , wherein the second magnetic material has an SAF structure.

4. The magnetic device according to claim 1 , wherein the amorphous layer includes a boride layer.

5. The magnetic device according to claim 1 , wherein the first crystal layer includes one of ruthenium, rhodium, palladium, osmium, iridium, and platinum.

6. The magnetic device according to claim 1 , wherein a thickness of the amorphous layer is equal to or thicker than a sum of a thickness of the second layer and a thickness of the crystal third layer.

7. The magnetic device according to claim 1 , wherein a thickness of the second crystal layer is 0.5 nm or more and 2 nm or less.

8. The magnetic device according to claim 1 , wherein a thickness of the first crystal layer is 1 nm or more and 2 nm or less.

9. A memory device comprising:

a memory cell including a magnetic device, the magnetic device including:

a first magnetic material provided above a substrate;

a second magnetic material provided between the substrate and the first magnetic material;

a nonmagnetic material provided between the first magnetic material and the second magnetic material;

a first layer provided between the substrate and the second magnetic material and including an amorphous layer;

a second layer provided between the amorphous layer and the second magnetic material and including a first crystal layer; and

a third layer provided between the first layer and the second layer and including a second crystal layer having tantalum; and

a control circuit configured to control an operation of the memory cell and provided on the substrate.

10. The memory device according to claim 9 , wherein the second magnetic material includes a first magnetic layer, a second magnetic layer between the first magnetic layer and the second layer, and a nonmagnetic layer between the first magnetic layer and the second magnetic layer.

11. The memory device according to claim 9 , wherein the second magnetic material has an SAF structure.

12. The memory device according to claim 9 , wherein the amorphous layer includes a boride layer.

13. The memory device according to claim 9 , wherein the first crystal layer includes one of ruthenium, rhodium, palladium, osmium, iridium, and platinum.

14. The memory device according to claim 9 , wherein a thickness of the amorphous layer is equal to or thicker than a sum of a thickness of the second layer and a thickness of the third layer.

15. The memory device according to claim 9 , wherein a thickness of the second crystal layer is 0.5 nm or more and 2 nm or less.

16. The memory device according to claim 9 , wherein a thickness of the first crystal layer is 1 nm or more and 2 nm or less.

17. The magnetic device according to claim 1 , wherein:

the amorphous layer comprises boride, and

the first crystal layer comprises one of platinum and ruthenium.

18. The memory device according to claim 9 , wherein:

the amorphous layer comprises boride, and

the first crystal layer comprises one of platinum and ruthenium.

Assignments (2)
CHANGE OF NAME Recorded Feb 15, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 059111/0120 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2021
From: SAWADA, KAZUYA; EEH, YOUNG MIN; OIKAWA, TADAAKI; YOSHINO, KENICHI; KITAGAWA, EIJI; ISODA, TAIGA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055354/0950 →
Priority Claims (1)
JP JP2019-049562 · Mar 18, 2019 · national
Continuity (1)
Related Publication 20200302987A1 · Sep 24, 2020
Cited By (2)
US 12,426,273 US 12,501,837