IP Library Granted Patent US 11,355,694
Granted Patent B2
US 11,355,694 · App. 16/570,020 · Granted Jun 7, 2022

Magnetic memory device

Inventors: Tadaomi Daibou (Mie, JP); Yasushi Nakasaki (Kanagawa, JP); Tadashi Kai (Kanagawa, JP); Hiroki Kawai (Aichi, JP); Takamitsu Ishihara (Kanagawa, JP); Junichi Ito (Kanagawa, JP)
Assignee: KIOXIA CORPORATION
H01L43/02H01L27/222H01L43/10
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Quick Facts
Patent No.
US 11,355,694
App. No.
16/570,020
Granted
Jun 7, 2022
Kind
B2
Abstract

According to one embodiment, a magnetic memory device includes a stacked structure including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, and containing magnesium (Mg) and oxygen (O). The nonmagnetic layer further contains an additive element selected from fluorine (F), sulfur (S), hydrogen (H) and lithium (Li).

Claims (37)

1. A magnetic memory device comprising a stacked structure, the stacked structure comprising:

a first magnetic layer having a variable magnetization direction;

a second magnetic layer having a fixed magnetization direction; and

a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, and containing magnesium (Mg) and oxygen (O),

wherein:

the nonmagnetic layer further contains an additive element selected from fluorine (F), hydrogen (H), and lithium (Li), and

the additive element is capable of forming a charge compensation pair.

2. The device of claim 1 , wherein the additive element compensates at least one of a defect and a grain boundary in the nonmagnetic layer.

3. The device of claim 1 , wherein a ratio of the additive element in the nonmagnetic layer is less than or equal to 5 atomic percent.

4. The device of claim 1 , wherein a ratio of the additive element in the nonmagnetic layer is greater than or equal to 0.002 atomic percent.

5. The device of claim 1 , wherein the first magnetic layer contains at least iron (Fe) and boron (B).

6. The device of claim 1 , wherein the second magnetic layer contains at least iron (Fe) and boron (B).

7. The device of claim 1 , wherein the stacked structure forms a spin-transfer-torque (STT) magnetoresistive element.

8. The device of claim 1 , wherein the stacked structure forms a magnetoresistive element having perpendicular magnetization.

9. A magnetic memory device comprising a stacked structure, the stacked structure comprising:

a first magnetic layer having a variable magnetization direction;

a second magnetic layer having a fixed magnetization direction; and

a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, and containing magnesium (Mg) and oxygen (O),

wherein:

the nonmagnetic layer further contains a first additive element and a second additive element,

a combination of the first additive element and the second additive element is selected from a combination of aluminum (Al) and nitrogen (N) and a combination of aluminum (Al) and lithium (Li), and

the first additive element and the second additive element form a charge compensation pair.

10. The device of claim 9 , wherein the combination of the first additive element and the second additive element compensates at least one of a defect and a grain boundary in the nonmagnetic layer.

11. The device of claim 9 , wherein a ratio of the first additive element in the nonmagnetic layer is less than or equal to 5 atomic percent, and a ratio of the second additive element in the nonmagnetic layer is less than or equal to 5 atomic percent.

12. The device of claim 9 , wherein a ratio of the first additive element in the nonmagnetic layer is greater than or equal to 0.002 atomic percent, and a ratio of the second additive element in the nonmagnetic layer is greater than or equal to 0.002 atomic percent.

13. The device of claim 9 , wherein the first magnetic layer contains at least iron (Fe) and boron (B).

14. The device of claim 9 , wherein the second magnetic layer contains at least iron (Fe) and boron (B).

15. The device of claim 9 , wherein the stacked structure forms a spin-transfer-torque (STT) magnetoresistive element.

16. The device of claim 9 , wherein the stacked structure forms a magnetoresistive element having perpendicular magnetization.

17. A magnetic memory device comprising a stacked structure, the stacked structure comprising:

a first magnetic layer having a variable magnetization direction;

a second magnetic layer having a fixed magnetization direction; and

a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, and containing magnesium (Mg) and oxygen (O),

wherein:

the nonmagnetic layer further contains a first additive element and a second additive element, and

a combination of the first additive element and the second additive element is selected from a combination of gallium (Ga) and nitrogen (N), a combination of nitrogen (N) and fluorine (F), a combination of nitrogen (N) and hydrogen (H), and a combination of hydrogen (H) and fluorine (F).

18. The device of claim 17 , wherein the combination of the first additive element and the second additive element compensates at least one of a defect and a grain boundary in the nonmagnetic layer.

Assignments (2)
CHANGE OF NAME Recorded Feb 15, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 059110/0850 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2020
From: DAIBOU, TADAOMI; NAKASAKI, YASUSHI; KAI, TADASHI; KAWAI, HIROKI; ISHIHARA, TAKAMITSU; ITO, JUNICHI
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051473/0851 →
Priority Claims (1)
JP JP2019-052166 · Mar 20, 2019 · national
Continuity (1)
Related Publication 20200303628A1 · Sep 24, 2020
Cited By (1)
US 12,482,588