Storage device
A storage device according to embodiments includes a first conductive layer; a second conductive layer; a resistance change element provided between the first conductive layer and the second conductive layer; and an intermediate layer provided in any one of a position between the resistance change element and the first conductive layer and a position between the resistance change element and the second conductive layer, the intermediate layer containing at least one element of silicon (Si) and germanium (Ge), tellurium (Te), and aluminum (Al).
1. A storage device comprising:
a first conductive layer;
a second conductive layer;
a resistance change element provided between the first conductive layer and the second conductive layer; and
an intermediate layer provided in any one of a position between the resistance change element and the first conductive layer and a position between the resistance change element and the second conductive layer, the intermediate layer containing at least one element of silicon (Si) and germanium (Ge), tellurium (Te), and aluminum (Al),
wherein an atomic concentration of the at least one element in the intermediate layer is higher than an atomic concentration of aluminum (Al) in the intermediate layer.
2. The storage device according to claim 1 , wherein the intermediate layer contains nitrogen (N).
3. The storage device according to claim 2 , wherein an atomic concentration of nitrogen (N) in the intermediate layer is 30 atomic % or more.
4. The storage device according to claim 1 , wherein the intermediate layer contains oxygen (O).
5. The storage device according to claim 1 , wherein a sum of atomic concentrations of the at least one element, tellurium (Te), and aluminum (Al) in the intermediate layer is 50 atomic % or more.
6. The storage device according to claim 1 , wherein the resistance change element includes a magnetic tunnel junction.
7. The storage device according to claim 1 , wherein the at least one element is silicon (Si).
8. A storage device comprising:
a plurality of first wires;
a plurality of second wires intersecting the plurality of first wires; and
memory cells provided, in regions where the first wires and the second wires intersect each other,
wherein one of the memory cells includes a resistance change element provided between one of the first wires and one of the second wires and an intermediate layer provided in any one of a position between the resistance change element and the one of the first wires and a position between the resistance change element and the one of the second wire, the intermediate layer containing at least one element of silicon (Si) and germanium (Ge), tellurium (Te), and aluminum (Al), and
an atomic concentration of the at least one element in the intermediate layer is higher than an atomic concentration of aluminum (Al) in the intermediate layer.
9. The storage device according to claim 8 , wherein the intermediate layer contains nitrogen (N).
10. The storage device according to claim 9 , wherein an atomic concentration of nitrogen (N) in the intermediate layer is 30 atomic % or more.
11. The storage device according to claim 8 , wherein the intermediate layer contains oxygen (O).
12. The storage device according to claim 8 , wherein a sum of atomic concentrations of the at least one element, tellurium (Te), and aluminum (Al) in the intermediate layer is 50 atomic % or more.
13. The storage device according to claim 8 , wherein the resistance change element includes a magnetic tunnel junction.
14. The storage device according to claim 8 , wherein the at least element is silicon (Si).
15. A storage device comprising:
a plurality of first wires;
a plurality of second wires intersecting the plurality of first wires; and
memory cells provided in regions where the first wires and the second wires intersect each other,
wherein one of the memory cells includes a resistance change element and a switching element, the switching element provided in any one of a position between the resistance change element and the one of the first wires and a position between the resistance change element and the one of the second wires, the switching element containing at least one element of silicon (Si) and germanium (Ge), tellurium (Te), and aluminum (Al), and
an atomic concentration of the at least one element in the switching element is higher than an atomic concentration of aluminum (Al) in the switching element.