IP Library Granted Patent US 11,152,536
Granted Patent B2
US 11,152,536 · App. 16/572,861 · Granted Oct 19, 2021

Photoresist contact patterning of quantum dot films

Inventors: Seok Kim (Champaign, IL); Moonsub Shim (Savoy, IL); Jun Kyu Park (Champaign, IL); Hohyun Keum (Champaign, IL); Yiran Jiang (Freemont, CA)
Assignee: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
H01L33/06H01L33/505H01L33/507H01L2933/0041H01L2933/0058
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Quick Facts
Patent No.
US 11,152,536
App. No.
16/572,861
Granted
Oct 19, 2021
Kind
B2
Abstract

The present disclosure describes one or more embodiment of a method for creating a patterned quantum dot layer. The method includes bringing a patterning stamp in contact with a layer of quantum dots disposed on a substrate, the patterning stamp comprising a patterned photoresist layer disposed on an elastomer layer, such that a portion of the quantum dots in contact with the patterned photoresist layer adheres to the patterning stamp, the portion of the quantum dots being adhered quantum dots. The method also includes peeling the patterning stamp from the substrate with a peeling speed larger than a pre-determined peeling speed to remove the adhered quantum dots from the substrate. A remaining portion of the quantum dots forms a patterned quantum dot layer on the substrate.

Claims (25)

1. A method for creating a patterned quantum dot layer, the method comprising:

bringing a patterning stamp in contact with a layer of quantum dots disposed on a substrate, the patterning stamp comprising a patterned photoresist layer disposed on an elastomer layer, such that a portion of the quantum dots in contact with the patterned photoresist layer adheres to the patterning stamp, the portion of the quantum dots being adhered quantum dots; and

peeling the patterning stamp from the substrate with a peeling speed larger than a pre-determined peeling speed to remove the adhered quantum dots from the substrate, wherein a remaining portion of the quantum dots forms a patterned quantum dot layer on the substrate.

2. The method according to claim 1 , the method further comprising:

spin-casting a solution of quantum dots on the substrate to form the layer of quantum dots.

3. The method according to claim 1 , wherein:

the elastomer layer comprises a polydimethysiloxane (PDMS) layer.

4. The method according to claim 1 , wherein:

the substrate comprises a silicon substrate coated with octadecyltrichlorosilane (ODTS).

5. The method according to claim 1 , wherein:

the pre-determined peeling speed is 1 cm per second.

6. The method according to claim 1 , further comprising:

prior to bringing the patterning stamp in contact with the quantum dots, photolithographically patterning a photoresist film on the elastomeric layer to form the patterned photoresist layer on the elastomer layer.

7. The method according to claim 1 , further comprising:

before bringing the patterning stamp in contact with the layer of quantum dots disposed on the substrate, heating the patterning stamp to about 65° C.; and

before peeling the patterning stamp from the substrate, cooling down the patterning stamp.

8. The method according to claim 1 , the method further comprising:

bringing a transferring stamp in contact with a transferring portion of the pattern quantum dot layer so as to adhere to the transferring portion, the transferring portion of the pattern quantum dot layer being transferring quantum dots;

moving the transferring stamp comprising the transferring quantum dots from the substrate to a desired location with respect to a receiving substrate;

contacting the transferring quantum dots with the receiving substrate; and

removing the transferring stamp from the receiving substrate, the transferring quantum dots being released such that the transferring quantum dots remain on the receiving substrate to form a second patterned quantum dot layer.

9. The method according to claim 8 , wherein:

the transferring stamp comprises at least one of an elastomer stamp or a shape memory polymer (SMP) stamp.

10. The method according to claim 9 , wherein:

the elastomer stamp comprises a PDMS stamp.

Assignments (3)
CONFIRMATORY LICENSE Recorded May 10, 2023
From: UNIVERSITY OF ILLINOIS
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 063601/0124 →
CONFIRMATORY LICENSE Recorded Dec 8, 2020
From: UNIVERSITY OF ILLINOIS, URBANA-CHAMPAIGN
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 054645/0451 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 22, 2019
From: KIM, SEOK; SHIM, MOONSUB; PARK, JUN KYU; KEUM, HOHYUN; JIANG, YIRAN
To: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Reel/Frame 050790/0848 →
Continuity (2)
Provisional Application 62732195 · Sep 17, 2018
Related Publication 20200091375A1 · Mar 19, 2020