Thin-film deposition methods with thermal management of evaporation sources
In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.
1. An evaporation system comprising:
an evaporation chamber having an interior enclosed by one or more chamber walls;
an evaporation source comprising (i) a source body with a cavity configured to contain a feedstock material, the cavity including a base surface surrounded by a sidewall, the sidewall having a shoulder formed opposite to the base surface and (ii) an evaporation port formed on the shoulder, the evaporation port including a neck portion extending from the shoulder, the neck portion having a first opening and a second opening, both the first opening and the second opening fluidly coupling the cavity with an interior of the evaporation chamber;
an insulation material; and
a computer-based controller for configuring the insulation material in (i) a first configuration in which the insulation material is disposed snugly around a source body perimeter defined by a combination of outer surfaces of each of the base surface, the sidewall, the shoulder, and the neck portion of the evaporation source and (ii) a second configuration in which at least a portion of the insulation material is spaced away from at least a portion of the source body perimeter.
2. The system of claim 1 , wherein the insulation material is segmented into a plurality of segments.
3. The system of claim 2 , wherein two or more of the segments of insulation material are connected at hinged points.
4. The system of claim 1 , wherein, in the second configuration, at least a second portion of the insulation material is disposed snugly around the source body perimeter.
5. The system of claim 4 , wherein the at least a second portion of the insulation material is disposed opposite the evaporation port.
6. The system of claim 1 , further comprising one or more mechanical positioners, responsive to the controller, for configuring the insulation in the first configuration and the second configuration.
7. The system of claim 6 , wherein at least one of the mechanical positioners extends through a chamber wall of the evaporation chamber.
8. The system of claim 1 , wherein the second configuration establishes a direct line of sight between at least one said chamber wall of the evaporation chamber and at least a portion of the source body perimeter.
9. The system of claim 1 , wherein the insulation material comprises at least one of carbon or a ceramic material.
10. The system of claim 1 , wherein the insulation material comprises at least one of graphite, carbon fiber, mullite, alumina, silica, or zirconia.
11. The system of claim 1 , wherein the insulation material comprises at least one of tantalum, niobium, or molybdenum.
12. The system of claim 1 , wherein the insulation material comprises a felt, a foam, a sol gel material, or a plurality of spaced-apart solid shields.
13. The system of claim 1 , wherein the controller comprises a system memory having stored within instructions for configuring the insulation material from the first configuration to the second configuration during an evaporation process.
14. The system of claim 13 , wherein the system memory comprises instructions for configuring the insulation material from the second configuration back to the first configuration during the evaporation process.
15. The system of claim 1 , wherein the controller comprises a system memory having stored within instructions for configuring the insulation material in the first configuration during heating of the evaporation source and/or in the second configuration during cooling of the evaporation source.
16. The system of claim 1 , wherein at least a portion of the insulation material is disposed in contact with at least one said chamber wall of the evaporation chamber.
17. The system of claim 1 , further comprising a heat source disposed around the evaporation source and configured to heat the source body and the insulation material therearound.