IP Library Granted Patent US 11,464,102
Granted Patent B2
US 11,464,102 · App. 16/594,011 · Granted Oct 4, 2022

Methods and systems for treatment of superconducting materials to improve low field performance

Inventors: Alexander Romanenko (Batavia, IL); Sam Posen (Arlington Heights, IL); Anna Grassellino (Batavia, IL)
Assignee: FERMI RESEARCH ALLIANCE, LLC
H05H7/20G06N10/00H01L39/24H01P7/06
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Quick Facts
Patent No.
US 11,464,102
App. No.
16/594,011
Granted
Oct 4, 2022
Kind
B2
Abstract

A system and method for treating a cavity comprises preparing a superconducting radio frequency (SRF) cavity for removal of a dielectric layer from on an inner surface of the SRF cavity, subjecting the SRF cavity to a heat treatment in order to remove the dielectric layer from the inner surface of the SRF cavity, and preventing the development of a new dielectric layer on the inner surface of the SRF cavity by preventing an interaction between the inner surface of the SRF cavity and atmospheric gasses.

Claims (39)

1. A method comprising:

preparing a device for removal of a dielectric layer from on an inner surface of the device;

removing the dielectric layer from the inner surface of the device; and

reducing two-level-system (TLS) degradation of the device, wherein reducing TLS degradation of the device further comprises:

preventing development of a new dielectric layer on the inner surface of the device by preventing an interaction between the inner surface of the device and atmospheric gasses by adding a capping layer to the inner surface of the device, the capping layer comprising Aluminum Oxide.

2. The method of claim 1 wherein removing the dielectric layer further comprises:

exposing the device to a heat treatment.

3. The method of claim 2 wherein exposing the device to a heat treatment further comprises:

evacuating an internal volume of the device during the heat treatment;

ramping the device to a medium temperature bake of 300-400 degrees Celsius;

baking the device for a prescribed time; and

ramping the temperature of the device down.

4. The method of claim 1 wherein removing the dielectric layer further comprises:

creating a chemical reaction with the dielectric layer on the inner surface of the device by introducing acid on the inner surface of the device.

5. The method of claim 1 wherein removing the dielectric layer further comprises:

sputtering the dielectric layer.

6. The method of claim 1 wherein preventing the development of a new dielectric layer on the inner surface of the device by preventing an interaction between the inner surface of the device and atmospheric gasses further comprises:

preventing the introduction of atmospheric gasses into the interior volume of the device.

7. The method of claim 1 wherein the capping layer exhibits minimal TLS degradation.

8. The method of claim 1 wherein the device comprises a superconducting radio frequency cavity for quantum computing or quantum sensing.

9. The method of claim 8 wherein the superconducting radio frequency cavity is comprised of niobium.

10. A method for treating a cavity comprising:

preparing a superconducting radio frequency (SRF) cavity for quantum computing applications, for removal of a dielectric layer from on an inner surface of the SRF cavity;

subjecting the SRF cavity to a heat treatment in order to remove the dielectric layer from the inner surface of the SRF cavity; and

reducing TLS degradation of the SRF cavity, wherein reducing TLS degradation of the SRF cavity further comprises:

preventing the development of a new dielectric layer on the inner surface of the SRF cavity by preventing an interaction between the inner surface of the SRF cavity and atmospheric gasses; and

wherein the prepared SRF cavity has a quality factor greater than 1×10 10 at temperatures between 1.4 Kelvin and 20 mKelvin.

11. The method for treating a cavity of claim 10 wherein the superconducting radio frequency cavity is comprised of niobium.

12. The method of claim 11 wherein subjecting the SRF cavity to a heat treatment further comprises:

evacuating an internal volume of the SRF cavity;

ramping the cavity to a medium temperature bake of 300-400 degrees Celsius at a nominal rate of 2 degrees Celsius per minute, in order to dissolve oxides on the inner surface of the SRF cavity;

baking the SRF cavity for a prescribed time; and

ramping the temperature of the SRF cavity down.

13. The method of claim 11 wherein preparing the superconducting radio frequency (SRF) cavity for removal of the dielectric layer from on the inner surface of the SRF cavity further comprises:

electropolishing the SRF cavity;

ultrasonically cleaning the SRF cavity;

rinsing the SRF cavity with a high pressure rinse; and

assembling the SRF cavity to vacuum hardware; and

nitrogen doping the SRF cavity.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 30, 2024
From: FERMI RESEARCH ALLIANCE, LLC
To: FERMI FORWARD DISCOVERY GROUP, LLC
Reel/Frame 069795/0347 →
CONFIRMATORY LICENSE Recorded May 17, 2023
From: FERMI RESEARCH ALLIANCE, LLC
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 063669/0315 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2019
From: POSEN, SAM; ROMANENKO, ALEXANDER; GRASSELLINO, ANNA
To: FERMI RESEARCH ALLIANCE, LLC
Reel/Frame 050633/0674 →
Continuity (2)
Provisional Application 62742328 · Oct 6, 2018
Related Publication 20200113039A1 · Apr 9, 2020