Integrated multilayer actuators
A multilayer actuator includes a primary electrode, a secondary electrode overlapping at least a portion of the primary electrode, and an electroactive layer disposed between and abutting the primary electrode and the secondary electrode. The multilayer actuator further includes a primary antireflective coating overlapping at least a portion of the primary electrode opposite the electroactive layer, a secondary antireflective coating overlapping at least a portion of the secondary electrode opposite the electroactive layer, and a barrier layer overlapping the secondary antireflective coating opposite the secondary electrode.
1. A multilayer actuator comprising:
a first barrier layer;
a first primary antireflective coating directly contacting the first barrier layer, wherein the first primary antireflective coating is a single layer comprising a refractive index gradient;
a first primary electrode directly contacting the first primary antireflective coating;
a first electroactive layer directly contacting the first primary electrode;
a first secondary electrode directly contacting the first electroactive layer; and
a first secondary antireflective coating directly contacting the first secondary electrode.
2. The multilayer actuator of claim 1 , wherein the first electroactive layer comprises an electrostrictive ceramic or a piezoelectric ceramic.
3. The multilayer actuator of claim 1 , wherein the first electroactive layer comprises a single crystal material.
4. The multilayer actuator of claim 1 , wherein the first barrier layer comprises an epoxy compound.
5. The multilayer actuator of claim 1 , further comprising a bonding layer disposed directly over the first secondary antireflective coating.
6. The multilayer actuator of claim 5 , further comprising from bottom to top:
a second primary antireflective coating disposed directly over the bonding layer;
a second primary electrode;
a second electroactive layer;
a second secondary electrode; and
a second secondary antireflective coating.
7. The multilayer actuator of claim 5 , wherein the bonding layer comprises a pressure sensitive adhesive.
8. The multilayer actuator of claim 5 , further comprising a transparent support disposed directly over the bonding layer.
9. The multilayer actuator of claim 8 , wherein the transparent support comprises a material selected from a group consisting of plastic, glass, ceramic, and sapphire.
10. The multilayer actuator of claim 8 , further comprising a second primary antireflective coating disposed directly over a surface of the transparent support.
11. The multilayer actuator of claim 10 , further comprising a second barrier layer disposed directly over a second secondary antireflective coating.
12. A head-mounted display comprising the multilayer actuator of claim 1 .
13. A multilayer actuator comprising:
a bonding layer;
a primary antireflective coating disposed over and directly contacting the bonding layer, wherein the primary antireflective coating is a single layer comprising a refractive index gradient;
a primary electrode disposed over and directly contacting the primary antireflective coating;
an electroactive layer disposed over and directly contacting the primary electrode;
a secondary electrode disposed over and directly contacting the electroactive layer;
a secondary antireflective coating disposed over and directly contacting the secondary electrode; and
a barrier layer disposed over and directly contacting the secondary antireflective coating, wherein the bonding layer comprises a pressure sensitive adhesive and the barrier layer comprises an epoxy compound.
14. The multilayer actuator of claim 13 , wherein the bonding layer comprises an acrylate-based polymer.
15. The multilayer actuator of claim 13 , wherein the bonding layer and the barrier layer each respectively comprise a transparent layer.
16. The multilayer actuator of claim 13 , further comprising a transparent support disposed directly over the bonding layer.
17. A method comprising:
forming an electroactive layer;
forming a first primary electrode directly contacting a first surface of the electroactive layer;
forming a first secondary electrode over a second surface of the electroactive layer;
forming a first primary antireflective coating directly contacting the first primary electrode, wherein the first primary antireflective coating is a single layer comprising a refractive index gradient;
forming a first secondary antireflective coating disposed over and directly contacting the first secondary electrode;
forming a bonding layer over the first secondary antireflective coating; and
forming a barrier layer directly contacting the first primary antireflective coating.
18. The method of claim 17 , wherein the bonding layer comprises an acrylate-based polymer and the barrier layer comprises an epoxy compound.
19. The method of claim 17 , further comprising forming a second primary antireflective coating directly contacting the bonding layer.
20. The method of claim 17 , further comprising affixing a transparent support to the bonding layer.