Semiconductor body and method for producing a semiconductor body
A semiconductor body main include a III-V compound semiconductor material having a p-conductive region doped with a p-dopant. The p-conductive region may include at least one first section, one second section, and one third section. The second section may be arranged between the first and third sections. The second section may directly adjoin the first and third sections. An indium concentration of at least one of the sections differs from an indium concentration of the other two sections.
1. A semiconductor body comprising a III-V compound semiconductor material; wherein the semiconductor body comprises:
a p-conductive region doped with a p-dopant, wherein the p-conductive region comprises at least one first section, at least one second section, and at least one third section;
wherein the second section is arranged between the first section and the third section;
wherein the second section is directly adjacent to the first and the third sections;
wherein an indium concentration of the second section is higher than the indium concentrations of both of the other two sections; wherein the indium concentration of the second section is at least 1×10 18 atoms per cm 3 and wherein the first section, the second section, and the third section have different concentrations of the p-dopant.
2. The semiconductor body as claimed in claim 1 , wherein the second section has a higher concentration of the p-dopant than the first section.
3. The semiconductor body as claimed in claim 1 , wherein at least the first section or the third section has an indium concentration of at least 1×10 17 atoms per cm 3 .
4. The semiconductor body as claimed in claim 1 , wherein
the second section has a higher concentration of the p-dopant than the third section.
5. The semiconductor body as claimed in claim 4 , wherein the concentration of the p-dopant in the second section has a local maximum.
6. The semiconductor body as claimed in claim 1 , wherein the concentration of the p-dopant in the p-conductive region has a rate of change of at least ±1E+21 atoms/cm 3 /μm perpendicularly to a main extent plane of the first section, the second section, and the third section.
7. The semiconductor body as claimed in claim 1 , further comprising an active region, wherein the p-conductive region comprises an electron blocking layer;
wherein the electron blocking layer is present on a side of the p-conductive region facing toward the active region;
wherein the first section and/or the second section lie at least partially inside the electron blocking layer;
wherein the first section is adjacent to the active region and the third section is adjacent to the second section; and
wherein the first section and/or the second section have a higher concentration of the p-dopant than the active region adjacent to the electron blocking layer and the third section adjacent to the second section.
8. The semiconductor body as claimed in claim 1 , further comprising an active region; wherein the p-conductive region comprises a p-contact layer;
wherein the p-contact layer is present on a side of the p-conductive region facing away from the active region; and
the second section lies at least partially inside the p-contact layer.
9. The semiconductor body as claimed in claim 1 , wherein the p-dopant comprises magnesium.
10. A semiconductor body comprising a III-V compound semiconductor material; wherein the semiconductor body comprises:
an active region; and
a p-conductive region doped with a p-dopant, wherein the p-conductive region comprises at least one first section, at least one second section, and at least one third section;
wherein the at least one second section is arranged between the at least one first section and the at least one third section;
wherein the at least one second section is directly adjacent to the at least one first section and to the at least one third section;
wherein the at least one first section is directly adjacent to the active region;
wherein the at least one first section, the at least one second section and the at least one third section have different concentrations of the p-dopant;
wherein an indium concentration of at least one of the at least one first section, the at least one second section, and the at least one third section is different to the indium concentration of the other sections;
wherein the at least one second section has a higher indium concentration than the at least one first section;
wherein the at least one second section has a higher p-dopant concentration than the at least one first section; and
wherein the at least one third section has a lower p-dopant concentration than the at least one first section.