Polymer for organic bottom anti-reflective coating and bottom anti-reflective coatings comprising the same
Provided are a polymer for an organic bottom anti-reflective coating and a bottom anti-reflective coating composition containing the same. More specifically, provided are a polymer for an organic bottom anti-reflective coating capable of relieving reflection of exposure light and irradiation light on a substrate of a photoresist layer applied on the substrate in a lithographic process of manufacturing a semiconductor device, and a bottom anti-reflective coating composition containing the same.
1. A polymer for an organic bottom anti-reflective coating comprising:
one or more chemical structures selected from Chemical Formulas 1-1, 1-2, and 1-3 below and one or more chemical structures selected from Chemical Formulas 2-1, 2-2, and 2-3 below:
in Chemical Formulas 1-1, 1-2, 1-3, 2-1, 2-2, and 2-3, Y is a divalent linking group, and R 11 , R 12 , and R 13 are each selected from hydrogen and C1-C10 alkyl, and
each of B 1 and B 2 is selected from Chemical Formula 3 below and has a different chemical structure,
in Chemical Formula 3, R 1 is selected from hydrogen, C1-C40 hydrocarbyl, substituted C1-C40 hydrocarbyl, C1-C40 heterohydrocarbyl, and substituted C1-C40 heterohydrocarbyl,
X 1 and X 2 are each independently selected from —O—, —COO—, —NR—, and —S—, and R is selected from hydrogen and C1-C10 alkyl, and
L 1 and L 2 are each independently selected from C1-C10 alkylene, C2-C15 alkenylene, C3-C10 cycloalkylene, and C6-C20 arylene.
2. The polymer for an organic bottom anti-reflective coating of claim 1 , further comprising:
any one or two or more chemical structures selected from Chemical Formulas 4 and 5 below:
in Chemical Formula 4, Y is a divalent linking group, R 11 , R 12 , and R 13 are each selected from hydrogen and C1-C10 alkyl,
X 3 and X 4 are each independently selected from —O—, —COO—, —NR—, and —S—, and R is selected from hydrogen and C1-C10 alkyl, and
L 3 is selected from a direct bond, C1-C40 hydrocarbylene, and C1-C40 heterohydrocarbylene,
in Chemical Formula 5, Y is a divalent linking group, R 11 , R 12 , and R 13 are each selected from hydrogen and C1-C10 alkyl,
R 2 and R 3 are each independently selected from hydrogen, halogen, nitro, cyano, hydroxy, C1-C40 hydrocarbyl, substituted C1-C40 hydrocarbyl, C1-C40 heterohydrocarbyl, and substituted C1-C40 heterohydrocarbyl, or R 2 and R 3 may be an alicyclic ring linked via C1-C40 hydrocarbylene with or without a hetero atom,
X 5 and X 6 are each independently selected from —O—, —COO—, —NR—, and —S—, and R is selected from hydrogen and C1-C10 alkyl, and
L 4 and L 5 are each independently selected from C1-C10 alkylene, C2-C15 alkenylene, C3-C10 cycloalkylene, and C6-C20 arylene.
3. The polymer for an organic bottom anti-reflective coating of claim 1 , wherein the polymer has a weight average molecular weight of 1,000 to 30,000 g/mol.
4. The polymer for an organic bottom anti-reflective coating of claim 1 , wherein in Chemical Formulas 1-1, 1-2, 1-3, 2-1, 2-2, and 2-3 above, Y is C1-C10 alkylene, R 11 , R 12 , and R 13 are hydrogen,
each of B 1 and B 2 is selected from Chemical Formula 3 above and has a different chemical structure,
in Chemical Formula 3 above, R 1 is C1-C20 alkyl or C3-C10 cycloalkyl C1-C10 alkyl,
X 1 and X 2 are each independently —COO—, and
L 1 and L 2 are each independently C1-C10 alkylene.
5. The polymer for an organic bottom anti-reflective coating of claim 4 , wherein B 1 is a chemical structure in which R 1 in Chemical Formula 3 is C1-C4 alkyl, and B 2 is a chemical structure in which R 1 in Chemical Formula 3 is C6-C14 alkyl or C3-C5 cycloalkyl C1-C10 alkyl.
6. The polymer for an organic bottom anti-reflective coating of claim 2 , wherein in Chemical Formula 4, Y is C1-C10 alkylene, R 11 , R 12 and R 13 are hydrogen, X 3 and X 4 are —COO—, and L 3 is C1-C10 alkylene,
in Chemical Formula 5, Y is C1-C10 alkylene, R 11 , R 12 and R 13 are hydrogen, R 2 and R 3 are each independently C1-C15 alkyl, X 5 and X 6 are —COO—, L 4 and L 5 are each independently C1-C10 alkylene.
7. A bottom anti-reflective coating composition comprising:
the polymer for an organic bottom anti-reflective coating of claim 1 .
8. The bottom anti-reflective coating composition of claim 7 , wherein the bottom anti-reflective coating composition includes 1 to 50 wt % of the polymer and 50 to 99 wt % of an organic solvent.
9. The bottom anti-reflective coating composition of claim 8 , further comprising:
any one or two or more additive(s) selected from an acid, an acid generator, a cross-linking agent, a defoaming agent, a light absorber, a curing agent and a surfactant.
10. A bottom anti-reflective coating formed by applying the bottom anti-reflective coating composition of claim 7 and having a contact angle of 60 degrees or more, a refractive index n of 1.91 to 2.0 at a wavelength of 193 nm, and an extinction coefficient k of 0.20 to 0.30.