Ultrasonic transducer device, acoustic biometric imaging system and manufacturing method
An ultrasonic transducer device for use in an acoustic biometric imaging system, the ultrasonic transducer device comprising: a first piezoelectric element having a first face, a second face opposite the first face, and side edges extending between the first face and the second face; a first transducer electrode on the first face of the first piezoelectric element; a second transducer electrode on the second face of the first piezoelectric element; and a spacer structure leaving at least a portion of the first transducer electrode of the first piezoelectric element uncovered.
1. A method of manufacturing ultrasonic transducer devices, for use in an acoustic biometric imaging system, comprising the steps of:
fabricating an ultrasonic transducer panel; and
dividing said ultrasonic transducer panel into said ultrasonic transducer devices,
wherein the step of fabricating said ultrasonic transducer panel comprises the steps of:
providing a first carrier;
arranging a plurality of piezoelectric elements spaced apart on said carrier;
arranging a plurality of integrated circuits spaced apart on said carrier;
applying a dielectric material on said plurality of piezoelectric elements and on said plurality of integrated circuits to embed each piezoelectric element of said plurality of piezoelectric elements and each integrated circuit of said plurality of integrated circuits in said dielectric material, thereby forming a piezoelectric element device layer on said first carrier;
thinning said piezoelectric element device layer, resulting in an exposed first side of each piezoelectric element of said plurality of piezoelectric elements;
forming a first electrode layer on said piezoelectric element device layer, said first electrode layer including a first transducer electrode on the exposed first side of each piezoelectric element in said piezoelectric element device layer; and
separating said piezoelectric element device layer from said first carrier.
2. The method according to claim 1 , wherein said piezoelectric element device layer is thinned in such a way that each integrated circuit of said plurality of integrated circuits is completely embedded in said dielectric material following the step of thinning said piezoelectric element device layer.
3. The method according to claim 1 , wherein the step of fabricating said ultrasonic transducer panel further comprises the steps of:
sandwiching said piezoelectric element device layer and said first electrode layer between said first carrier and a second carrier; and
forming, after separating said piezoelectric element device layer from said first carrier, a second electrode layer on said piezoelectric element device layer, said second electrode layer including a second transducer electrode on a second side, opposite said first side, of each piezoelectric element in said piezoelectric element device layer.
4. The method according to claim 3 , wherein said second electrode layer is configured to electrically connect the second transducer electrode of at least one of said piezoelectric elements of said plurality of piezoelectric elements with at least one integrated circuit of said plurality of integrated circuits; and
said ultrasonic transducer panel is divided into said ultrasonic transducer devices in such a way that each ultrasonic transducer device comprises at least a first piezoelectric element and at least a first integrated circuit, the second transducer electrode of said first piezoelectric element being electrically connected with said first integrated circuit.
5. The method according to claim 1 , wherein said ultrasonic transducer panel is divided into said ultrasonic transducer devices in such a way that each ultrasonic transducer device comprises at least a first piezoelectric element and a second piezoelectric element.
6. The method according to claim 1 , wherein the step of fabricating said ultrasonic transducer panel further comprises the step of:
providing a plurality of conductive vias through said piezoelectric element layer.
7. The method according to claim 6 , wherein said first electrode layer is formed in such a way that each first transducer electrode is conductively connected to at least one conductive via of said plurality of conductive vias.
8. The method according to claim 1 , wherein said ultrasonic transducer panel is divided by cutting through said dielectric material embedding said plurality of piezoelectric elements.