IP Library Granted Patent US 11,075,129
Granted Patent B2
US 11,075,129 · App. 16/656,140 · Granted Jul 27, 2021

Substrate processing carrier

Inventor: Michael J. Seddon (Gilbert, AZ)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L22/34G01R31/2831H01L21/6836H01L21/78H01L22/12H01L22/32G01R31/2865H01L21/304H01L22/14H01L2221/6834H01L2221/68327H01L2221/68381
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Quick Facts
Patent No.
US 11,075,129
App. No.
16/656,140
Granted
Jul 27, 2021
Kind
B2
Abstract

Implementations of a substrate carrier may include: a top ring configured to enclose an edge of a first side of a substrate; and a bottom support configured to enclose an entire second side and an edge of the second side of the substrate.

Claims (29)

1. A substrate carrier comprising:

a top ring configured to encircle an edge ring of a substrate; and

a bottom support configured to enclose and directly contact a second side and an edge of the second side of the substrate.

2. The substrate carrier of claim 1 , wherein the top ring is configured to enclose at least a portion of the edge ring of the substrate.

3. The substrate carrier of claim 1 , wherein a first side of the substrate is background.

4. The substrate carrier of claim 1 , wherein the second side of the substrate comprises a plurality of semiconductor die therein.

5. The substrate carrier of claim 1 , wherein a thickness of the substrate is less than 39 microns.

6. The substrate carrier of claim 1 , wherein a thickness of the substrate is less than 10 microns.

7. The substrate carrier of claim 1 , wherein the top ring is configured to couple to the bottom support with a one of a clamp, friction fit, snap, or hinge.

8. The substrate carrier of claim 1 , wherein the substrate carrier is not bonded to the substrate.

9. A substrate carrier comprising:

a top ring configured to enclose at least a portion of an edge ring of a first side of a substrate;

a bottom support configured to contact a second side and enclose an edge of the second side of the substrate, wherein the bottom support further comprises a cavity between the second side and the bottom support, the cavity configured to receive backgrinding tape applied to the second side of the substrate; and

a locking mechanism configured to couple the top ring to the bottom support.

10. The substrate carrier of claim 9 , wherein the top ring encircles the edge ring of the substrate.

11. The substrate carrier of claim 9 , wherein the first side of the substrate is background.

12. The substrate carrier of claim 9 , wherein the second side of the substrate comprises a plurality of semiconductor die therein.

13. The substrate carrier of claim 9 , wherein a thickness of the substrate is less than 39 microns.

14. The substrate carrier of claim 9 , wherein a thickness of the substrate is less than 10 microns.

15. The substrate carrier of claim 9 , wherein the locking mechanism comprises one of a clamp, friction fit, snap, or hinge.

16. The substrate carrier of claim 9 , wherein the substrate carrier is not bonded to the substrate.

17. An apparatus for testing a semiconductor substrate, comprising:

a substrate carrier, the substrate carrier comprising:

a top ring configured to enclose an edge ring of a substrate;

a bottom support configured to enclose and contact a second side and the edge ring of the substrate, wherein the bottom support is configured to allow the substrate coupled with the substrate carrier to be electrically tested using a probe; and

a locking mechanism configured to couple the top ring to the bottom support.

18. The apparatus of claim 17 , further comprising one or more openings in the bottom support configured to allow the probe to directly contact the substrate during electrical testing.

19. The apparatus of claim 17 , wherein the substrate carrier is formed of one of a metal, a plastic coated in a metal, or a metal coated in a secondary metal.

20. The apparatus of claim 17 , wherein the substrate carrier is one of formed of an electrically conductive material or comprises an electrically conductive material coupled thereto.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 054090, FRAME 0617 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064081/0167 →
SECURITY INTEREST Recorded Oct 16, 2020
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION; ON SEMICONDUCTOR CONNECTIVITY SOLUTIONS, INC.
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 054090/0617 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 17, 2019
From: SEDDON, MICHAEL J.
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 050752/0429 →
Continuity (5)
Continuation In Part 15907931 · Feb 28, 2018
Continuation In Part 15704246 · Sep 14, 2017
Continuation 15230875 · Aug 8, 2016
Provisional Application 62827982 · Apr 2, 2019
Related Publication 20200051877A1 · Feb 13, 2020