Micromachined mirror assembly with piezoelectric actuator

1. A micromachined assembly for controlling optical directions in an optical sensing system, the micromachined mirror assembly comprising:

a micro mirror suspended over a substrate by at least one beam, the at least one beam directly coupled to the micro mirror at a first end of the at least one beam and directly coupled to at least one anchor at a second end of the at least one beam; and

at least one piezoelectric actuator mechanically coupled to the at least one beam through the at least one anchor and configured to drive the micro mirror via the at least one beam, the at least one piezoelectric actuator rigidly coupled to the at least one anchor,

wherein a first electrical signal received by the at least one piezoelectric actuator causes a displacement of the at least one anchor, which causes the at least one beam directly coupled to the at least one anchor to rotate which drives the micro mirror to tilt along a first axis.

2. The micromachined mirror assembly of claim 1 , wherein:

the at least one beam comprises a first beam and a second beam, the first beam is directly coupled to one side of the micro mirror and the second beam is directly coupled to an opposite side of the micro mirror; and

the at least one piezoelectric actuator is mechanically coupled to the first and second beams.

3. The micromachined mirror assembly of claim 1 , wherein:

the at least one piezoelectric actuator comprises first and second piezoelectric actuators;

the first piezoelectric actuator is configured to receive the first electrical signal; and

the second piezoelectric actuator is configured to receive a second electrical signal, wherein the first and second electrical signals have a same frequency.

4. The micromachined mirror assembly of claim 3 , wherein:

the frequency of the first or second electrical signal is equal to a resonant frequency of the micro mirror.

5. The micromachined mirror assembly of claim 3 , wherein:

the first and second electrical signals are different in at least one of amplitude or phase.

6. The micromachined mirror assembly of claim 1 , wherein:

the at least one piezoelectric actuator and the at least one anchor are both disposed on the substrate.

7. The micromachined mirror assembly of claim 1 , comprising:

a position sensor configured to detect a position of the micro mirror.

8. The micromachined mirror assembly of claim 7 , wherein:

the position sensor comprises a comb structure, the comb structure comprising a plurality of teeth interleaved with a corresponding plurality of teeth on the micro mirror.

9. The micromachined mirror assembly of claim 7 , wherein:

the position sensor comprises a stator attached to the at least one piezoelectric actuator.

10. The micromachined mirror assembly of claim 1 , wherein:

the at least one piezoelectric actuator comprises a first set of piezoelectric actuators and a second set of piezoelectric actuators;

the first set of piezoelectric actuators are configured to drive the micro mirror to tilt along the first axis; and

the second set of piezoelectric actuators are configured to drive the micro mirror to tilt along a second axis.

11. The micromachined mirror assembly of claim 10 , wherein:

the first axis is perpendicular to the second axis.

12. A method for controlling optical directions in an optical sensing system, the method comprising:

providing a micromachined mirror assembly, wherein the micromachined mirror assembly comprises:

a micro mirror suspended over a substrate by at least one beam, the at least one beam directly coupled to the micro mirror at a first end of the at least one beam and directly coupled to at least one anchor at a second end of the at least one beam;

at least one piezoelectric actuator mechanically coupled to the at least one beam through the at least one anchor and rigidly coupled to the at least one anchor;

receiving, by the at least one piezoelectric actuator, a first electrical signal; and

driving the micro mirror by receiving a first electrical signal at the at least one piezoelectric actuator that causes a displacement of the at least one anchor which causes the at least one beam coupled to the at least one anchor to rotate, which causes the micro mirror to tilt along a first axis.

13. The method of claim 12 , wherein:

the at least one beam comprises a first beam and a second beam, the first beam is directly coupled to one side of the micro mirror and the second beam is directly coupled to an opposite side of the micro mirror;

the at least one piezoelectric actuator comprises a first piezoelectric actuator and a second piezoelectric actuator, each of the first and second piezoelectric actuators is mechanically coupled to the first and second beams, and

the method further comprises:

receiving, by the first piezoelectric actuator, the first electrical signal;

receiving, by the second piezoelectric actuator, a second electrical signal having a same frequency as the first electrical signal.

14. The method of claim 12 , comprising:

detecting, by a position sensor, a position of the micro mirror, wherein the position sensor comprises a stator attached to the at least one piezoelectric actuator.

15. An optical sensing system comprising:

a transmitter configured to emit optical signals in a plurality of directions;

a receiver configured to detect reflected optical signals; and

a mirror assembly configured to control the directions of the optical signals, the mirror assembly comprising:

a micro a micro mirror suspended over a substrate by at least one beam, the at least one beam directly coupled to the micro mirror at a first end of the at least one beam and directly coupled to at least one anchor at a second end of the at least one beam; and

at least one piezoelectric actuator mechanically coupled to the at least one beam through the at least one anchor and configured to drive the micro mirror via the at least one beam, the at least one piezoelectric actuator rigidly coupled to the at least one anchor,

wherein a first electrical signal received by the at least one piezoelectric actuator causes a displacement of the at least one anchor, which causes the at least one beam directly coupled to the at least one anchor to rotate which drives the micro mirror to tilt along a first axis.

16. The optical sensing system of claim 15 , wherein:

the at least one beam comprises a first beam and a second beam, the first beam is directly coupled to one side of the micro mirror and the second beam is directly coupled to an opposite side of the micro mirror; and

the at least one piezoelectric actuator is mechanically coupled to the first and second beams.

17. The optical sensing system of claim 15 , wherein:

the at least one piezoelectric actuator comprises a first set of piezoelectric actuators and a second set of piezoelectric actuators;

the first set of piezoelectric actuators are configured to drive the micro mirror to tilt along the first axis; and

the second set of piezoelectric actuators are configured to drive the micro mirror to tilt along a second axis.