IP Library Granted Patent US 11,217,966
Granted Patent B1
US 11,217,966 · App. 16/658,693 · Granted Jan 4, 2022

Narrow sized laser diode

Inventors: James W. Raring (Santa Barbara, CA); Hua Huang (Vancouver, WA)
Assignee: KYOCERA SLD Laser, Inc.
H01S5/34333H01S5/0014H01S5/0202H01S5/0203H01S5/0234H01S5/02345H01S5/02375H01S5/1082H01S5/22H01S5/3013H01S5/3202H01S5/32341H01L2224/48091H01L2224/48465H01S5/0042
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,217,966
App. No.
16/658,693
Granted
Jan 4, 2022
Kind
B1
Abstract

Gallium and nitrogen containing optical devices operable as laser diodes and methods of forming the same are disclosed. The devices include a gallium and nitrogen containing substrate member, which may be semipolar or non-polar. The devices include a chip formed from the gallium and nitrogen substrate member. The chip has a width and a length, a dimension of less than 150 microns characterizing the width of the chip. The devices have a cavity oriented substantially parallel to the length of the chip.

Claims (37)

1. A gallium and nitrogen containing optical device operable as a laser diode, the device comprising:

a gallium and nitrogen containing member having a semipolar surface orientation selected from the ( 20 - 21 ) or ( 20 - 2 - 1 ) or ( 30 - 31 ) or ( 30 - 3 - 1 ) or ( 11 - 22 ) plane orientations, or an offcut of any of the foregoing orientations;

a chip formed from the gallium and nitrogen containing member, the chip having a width and a length, the width of the chip being a distance between sides of the chip and the length of the chip being a distance between ends of the chip, the chip also having a p-type region and an n-side contact opposite the p-type region;

a ridge waveguide configured to emit laser light, the ridge waveguide oriented substantially parallel to the length of the chip and having a pair of etched facets configured on the ends thereof, the ridge waveguide having a width that is less than the width of the chip;

at least one wirebond disposed on the n-side contact of the chip for coupling a wire to the chip, wherein the width of the chip is no more than a width of the at least one wirebond; and

a submount coupled to the chip such that the p-type region of the chip is facing the submount.

2. The device of claim 1 , wherein the pair of etched facets are formed by a dry etching method selected from reactive ion etching (ME), inductively plasma coupled etching (ICP), and chemical assisted ion beam etching (CAIBE).

3. The device of claim 1 , wherein the width of the chip is either less than 110 microns or less than 70 microns.

4. The device of claim 1 , wherein the laser diode is operable at a wavelength from 430 nm to 480 nm or from 480 nm to 535 nm or from 390 nm to 430 nm.

5. The device of claim 1 , wherein the gallium and nitrogen containing member has a ( 20 - 21 ) surface orientation or an offcut thereof.

6. The device of claim 1 , wherein the gallium and nitrogen containing member has a ( 30 - 31 ) surface orientation or an offcut thereof.

7. A system comprising:

a lighting apparatus; and

an optical device configured to provide light for the lighting apparatus, the optical device operable as a laser diode, the optical device comprising:

a gallium and nitrogen containing member;

a chip formed from the gallium and nitrogen containing member, the chip having a width and a length, the width of the chip being a distance between sides of the chip and the length of the chip being a distance between ends of the chip, the chip also having a p-type region and an n-side contact opposite the p-type region;

a ridge waveguide configured to emit laser light, the ridge waveguide oriented substantially parallel to the length of the chip and having a pair of etched facets configured on the ends thereof, the ridge waveguide having a width that is less than the width of the chip;

at least one wirebond disposed on the n-side contact of the chip for coupling a wire to the chip, wherein the width of the chip is no more than a width of the at least one wirebond plus a minimum wirebonding placement tolerance; and

a submount coupled to the chip such that the p-type region of the chip is facing the submount.

8. The device of claim 7 , wherein the pair of etched facets are configured on the ends of the chip.

9. The device of claim 7 , wherein the width of the chip is less than 110 microns.

10. The device of claim 7 , wherein the width of the chip is less than 70 microns.

11. The device of claim 7 , wherein the optical device is operable at a wavelength from 430 nm to 480 nm.

12. The device of claim 7 , wherein the optical device is operable at a wavelength from 480 nm to 535 nm.

13. The device of claim 7 , wherein the optical device is operable at a wavelength from 390 nm to 430 nm.

14. The device of claim 7 , wherein the gallium and nitrogen containing member of the optical device has a semipolar surface orientation selected from the ( 20 - 21 ) or ( 20 - 2 - 1 ) or ( 30 - 31 ) or ( 30 - 3 - 1 ) or ( 11 - 22 ) plane orientations, or an offcut of any of the foregoing orientations.

15. The device of claim 7 , wherein the gallium and nitrogen containing member of the optical device has a nonpolar surface orientation, or an offcut thereof.

16. A method of forming gallium and nitrogen containing optical device operable as a laser diode, the method comprising:

providing a gallium and nitrogen containing member;

forming a chip from the gallium and nitrogen containing member, the chip having a width and a length, the width of the chip being a distance between sides of the chip and the length of the chip being a distance between ends of the chip, the chip also having a p-type region and an n-side contact opposite the p-type region;

forming a ridge waveguide configured to emit laser light, the ridge waveguide oriented substantially parallel to the length of the chip and having a pair of etched facets configured on the ends thereof, the ridge waveguide having a width that is less than the width of the chip;

forming at least one wirebond on the n-side contact of the chip for coupling a wire to the chip, wherein the width of the chip is no more than a width of the at least one wirebond; and

coupling the chip to a submount such that the p-type region of the chip is facing the submount.

17. The method of claim 16 , wherein the width of the chip is either less than 110 microns or less than 70 microns.

18. The method of claim 16 , wherein the laser diode is operable at a wavelength from 430 nm to 480 nm or from 480 nm to 535 nm or from 390 nm to 430 nm.

19. The method of claim 16 , wherein the gallium and nitrogen containing member has a semipolar surface orientation selected from the ( 20 - 21 ) or ( 20 - 2 - 1 ) or ( 30 - 31 ) or ( 30 - 3 - 1 ) or ( 11 - 22 ) plane orientations, or an offcut of any of the foregoing orientations.

20. The method of claim 16 , wherein the gallium and nitrogen containing member has a nonpolar surface orientation, or an offcut thereof.

Assignments (3)
CHANGE OF NAME Recorded Mar 15, 2021
From: SORAA LASER DIODE, INC.
To: KYOCERA SLD LASER, INC.
Reel/Frame 056001/0313 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 3, 2021
From: SORAA, INC.
To: SORAA LASER DIODE, INC.
Reel/Frame 055478/0994 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 26, 2021
From: RARING, JAMES W.; HUANG, HUA
To: SORAA, INC.
Reel/Frame 055427/0540 →
Continuity (5)
Continuation 15982323 · May 17, 2018
Continuation 15485474 · Apr 12, 2017
Continuation 14742297 · Jun 17, 2015
Continuation 13928805 · Jun 27, 2013
Provisional Application 61666414 · Jun 29, 2012