Microelectronic devices including staircase structures, and related memory devices and electronic systems
A microelectronic device comprises a stack structure, at least one staircase structure, contact structures, and support structures. The stack structure comprises vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures. The at least one staircase structure is within the stack structure and has steps comprising edges of at least some of the tiers. The contact structures are on the steps of the at least one staircase structure. The support structures horizontally alternate with the contact structures in a first horizontal direction and vertically extend through the stack structure. The support structures have oblong horizontal cross-sectional shapes. Additional microelectronic devices, memory devices, and electronic systems are also described.
1. A microelectronic device, comprising:
a stack structure comprising vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures;
a staircase structure within the stack structure and having steps comprising edges of at least some of the tiers;
contact structures on the steps of the staircase structure; and
support structures horizontally alternating with the contact structures in a first horizontal direction and vertically extending through the stack structure, the support structures having oblong horizontal cross-sectional shapes.
2. The microelectronic device of claim 1 , wherein horizontal centers of the support structures are substantially aligned with a horizontal centerline of the staircase structure extending in the first horizontal direction.
3. The microelectronic device of claim 1 , wherein horizontal centers of the support structures are substantially horizontally aligned with horizontal centers the contact structures in a second horizontal direction orthogonal to the first horizontal direction.
4. The microelectronic device of claim 1 , wherein each of the support structures has a length in a second horizontal direction orthogonal to the first horizontal direction extending across a majority of a length of the steps of the staircase structure in the second horizontal direction.
5. The microelectronic device of claim 1 , wherein the contact structures and the support structures comprise at least one electrically conductive material.
6. The microelectronic device of claim 1 , wherein the stack structure is divided into blocks separated from one another by slots filled with dielectric material.
7. The microelectronic device of claim 1 , further comprising a source tier underlying the stack structure and comprising:
a source structure; and
discrete conductive structures in physical contact with the support structures, the discrete conductive structures horizontally separated from one another and the source structure.
8. The microelectronic device of claim 7 , wherein the source structure is electronically isolated from each of the discrete conductive structures.
9. The microelectronic device of claim 1 , wherein the conductive structures of the stack structure comprise at least one metal.