Piezoelectric pump and liquid ejection device
According to an embodiment, a piezoelectric pump includes a pressure chamber. A groove is provided to a bottom portion of the pressure chamber. The groove includes an inlet and an outlet on a bottom portion of the groove, liquid being caused to flow in the pressure chamber through the inlet and to be discharged from the pressure chamber through the outlet.
1. A piezoelectric pump, comprising:
a pressure chamber having an inlet and an outlet;
a diaphragm that deforms to vary the volume of the pressure chamber to cause a liquid to flow in from the inlet and out from the outlet;
a groove in a bottom portion of the pressure chamber, the inlet and the outlet of the pressure chamber being in a bottom portion of the groove;
a first check valve at the inlet to regulate the flow of the liquid through the inlet; and
a second check valve at the outlet to regulate the flow of the liquid through the outlet, wherein
the groove comprises:
a pair of first groove portions in a central portion of the bottom of the pressure chamber, the pair of first groove portions individually extending in a curved shape from the inlet to the outlet, and
a pair of second groove portions in an outer portion of the bottom of the pressure chamber at a position between the central portion and an outer edge of the bottom of the pressure chamber, the pair of second groove portions individually extending in a curved shape from the inlet to the outlet, and
the bottom of the pressure chamber has a first stage portion between one of the pair of first groove portions and one of the pair of second groove portions and a second stage portion between the pair of first groove portions.
2. The piezoelectric pump according to claim 1 , wherein
the diaphragm faces the bottom of the pressure chamber.
3. The piezoelectric pump according to claim 1 , wherein
the groove has a depth greater than a distance between the diaphragm and an upper surface of the bottom portion of the pressure chamber.
4. The piezoelectric pump according to claim 1 , further comprising:
a first buffer chamber provided on a primary side of the inlet; and
a second buffer chamber provided on a secondary side of the outlet.
5. The piezoelectric pump according to claim 1 , wherein, when the diaphragm deforms in a direction toward the bottom of the pressure chamber, the diaphragm contacts the second stage portion.
6. The piezoelectric pump according to claim 1 , wherein the pair of first groove portions are symmetric about a line connecting a center position of the inlet and a center position of the outlet.
7. The piezoelectric pump according to claim 1 , wherein the pair of first groove portions are each arc-shaped within a plane parallel to an upper surface of the second stage portion.
8. The piezoelectric pump according to claim 7 , wherein the pair of second groove portions each comprise an arc shape within the plane parallel to the upper surface of the second stage portion.
9. The piezoelectric pump according to claim 1 , wherein the pair of second groove portions each comprise an arc shape within a plane parallel to an upper surface of the second stage portion.
10. The piezoelectric pump according to claim 1 , wherein
the pair of first groove portions connect to the inlet at different positions from each other, and
the pair of second groove portions connect to the inlet at the same position as each other.
11. A liquid ejection device, comprising:
a liquid tank;
a liquid ejection head having a primary side connected to the liquid tank and a secondary side also connected to of the liquid tank;
a piezoelectric pump on one of the primary side or the secondary side of the liquid ejection head; and
a circulation path that connects the liquid tank, the liquid ejection head, and the piezoelectric pump to one another, wherein
the piezoelectric pump includes:
a pressure chamber having an inlet and an outlet,
a diaphragm that deforms to vary the volume of the pressure chamber to cause a liquid to flow in from the inlet and out from the outlet,
a groove in a bottom of the pressure chamber, the inlet and the outlet of the pressure chamber being in a bottom portion of the groove,
a first check valve at the inlet to regulate the flow of the liquid through the inlet, and
a second check valve at the outlet to regulate the flow of the liquid through the outlet, and
the groove comprises:
a pair of first groove portions in a central portion of the bottom of the pressure chamber, the pair of first groove portions individually extending in a curved shape from the inlet to the outlet, and
a pair of second groove portions in an outer portion of the bottom of the pressure chamber at a position between the central portion and an outer edge of the bottom of the pressure chamber, the pair of second groove portions individually extending in a curved shape from the inlet to the outlet, and
the bottom of the pressure chamber has a first stage portion between one of the pair of first groove portions and one of the pair of second groove portions and a second stage portion between the pair of first groove portions.
12. The liquid ejection device according to claim 11 , wherein
the diaphragm faces the bottom of the pressure chamber.
13. The liquid ejection device according to claim 11 , wherein
the groove has a depth greater than a distance between the diaphragm and an upper surface of the bottom of the pressure chamber.
14. The liquid ejection device according to claim 11 , further comprising:
a first buffer chamber provided on a primary side of the inlet; and
a second buffer chamber provided on a secondary side of the outlet.
15. The liquid ejection device according to claim 11 , wherein, when the diaphragm deforms in a direction toward the bottom of the pressure chamber, the diaphragm contacts the second stage portion.
16. The liquid ejection device according to claim 11 , wherein the pair of first groove portions are symmetric about a line connecting a center position of the inlet and a center position of the outlet.
17. The liquid ejection device according to claim 11 , wherein the pair of first groove portions are each arc-shaped within a plane parallel to an upper surface of the second stage portion.
18. The liquid ejection device according to claim 17 , wherein the pair of second groove portions each comprise an arc shape within the plane parallel to the upper surface of the second stage portion.
19. The liquid ejection device according to claim 11 , wherein the pair of second groove portions each comprise an arc shape within a plane parallel to an upper surface of the second stage portion.
20. The liquid ejection device according to claim 11 , wherein
the pair of first groove portions connect to the inlet at different positions from each other, and
the pair of second groove portions connect to the inlet at the same position as each other.