IP Library Granted Patent US 11,442,000
Granted Patent B2
US 11,442,000 · App. 16/716,218 · Granted Sep 13, 2022

In-situ, real-time detection of particulate defects in a fluid

Inventors: Mehdi Vaez-Iravani (Los Gatos, CA); Sankesha Bhoyar (Singapore, SG); Rachit Sharma (Bangalore, IN); Guoheng Zhao (Palo Alto, CA)
Assignee: Applied Materials, Inc.
G01N15/1434G01N15/1459
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,442,000
App. No.
16/716,218
Granted
Sep 13, 2022
Kind
B2
Abstract

Examples disclosed herein generally relate to an apparatus and method for detecting particles in a fluid. A system for imaging a particle includes an imaging device. The imaging device has a lens and a detector. A laser source is configured to emit a laser beam. The detector is configured to accumulate an intensity of an accumulated light that passes through the lens. The accumulated light is scattered by the particle. The particle passes through the laser beam over a given period.

Claims (45)

1. A system for imaging a particle, comprising

an imaging device comprising:

a lens;

a detector;

a laser source configured to emit a laser beam having a circle cross-section, wherein the detector is configured to accumulate an intensity of an accumulated light that passes through the lens, the accumulated light being scattered by the particle, wherein the laser beam is configured to form an interrogation volume, the interrogation volume defined by the circle cross-section and a length of the laser beam captured by the imaging device, the particle passing through the interrogation volume of the laser beam over a given period.

2. The system for imaging a particle according to claim 1 , further comprising:

a hollow vessel, wherein the laser beam is configured to pass through the interrogation volume disposed within the hollow vessel.

3. The system for imaging a particle according to claim 2 , further comprising:

a pool configured to store a fluid, wherein the hollow vessel coupled to the pool, wherein at least a portion of the fluid passes through the hollow vessel at a given velocity.

4. The system for imaging a particle according to claim 3 , wherein the hollow vessel comprises a first side orthogonal to a second side, the laser beam further configured to pass parallel to the first side, and the second side is substantially perpendicular to the laser beam.

5. The system for imaging a particle according to claim 1 , wherein an intensity of light that passes through the lens is accumulated in the imaging device by a time delay integration of the intensity.

6. The system for imaging a particle according to claim 1 , further comprising:

a pool configured to store a fluid; and

a hollow vessel coupled to the pool, wherein at least a portion of the fluid passes through hollow vessel at a given velocity, the laser beam enters the hollow vessel at a position that is substantially orthogonal to a flow of the fluid, the interrogation volume comprising a portion of the fluid.

7. The system for imaging a particle according to claim 1 , further comprising:

a pool configured to store a fluid; and

a hollow vessel coupled to the pool, wherein at least a portion of the fluid passes through hollow vessel at a given velocity, the laser beam enters the hollow vessel at a position that is substantially parallel to a flow of the fluid.

8. A light intensity measuring system, comprising:

an imaging device comprising:

at least one lens;

an array detector, the array detector having n rows and m columns;

a laser source configured to emit a laser beam having a circle cross-section, the array detector configured to accumulate an intensity of an accumulated light that passes through the lens, the accumulated light scattered by a particle, wherein laser beam is configured to form an interrogation volume, the interrogation volume defined by the circle cross-section and a length of the laser beam captured by the imaging device, the particle passing through the interrogation volume of the laser beam over a given period; and

a vessel proximate the laser source configured to flow fluid therein, the laser beam configured to pass through the vessel, the interrogation volume disposed in the vessel and comprising a portion of the fluid.

9. The light intensity measuring system according to claim 8 , wherein the laser beam is configured to pass through the vessel.

10. The light intensity measuring system according to claim 9 , further comprising:

a pool configured to store the fluid, wherein the vessel is coupled to the pool, wherein at least a portion of the fluid passes through the vessel at a given velocity.

11. The light intensity measuring system according to claim 10 , wherein the vessel comprises a first side orthogonal to a second side, the laser beam further configured to pass parallel to the first side, and the second side is substantially perpendicular to the laser beam.

12. The light intensity measuring system according to claim 8 , wherein an intensity of light that passes through the lens is accumulated in the imaging device by a time delay integration of the intensity.

13. The light intensity measuring system according to claim 8 , further comprising:

a pool configured to store a fluid, wherein at least a portion of the fluid passes through the vessel at a given velocity, the laser beam enters the vessel at a position that is substantially orthogonal to a flow of the fluid.

14. The light intensity measuring system according to claim 8 , further comprising:

a pool configured to store a fluid, wherein at least a portion of the fluid passes through the vessel at a given velocity, the laser beam enters the vessel at a position that is substantially parallel to a flow of the fluid.

15. A method of measuring light intensity, comprising:

flowing a fluid through a hollow vessel, the fluid having at least one particle;

emitting a laser beam having a circle cross-section through the hollow vessel onto the at least one particle;

forming an interrogation volume with the laser beam within the hollow vessel, the interrogation volume defined by the circle cross-section and a length of the laser beam; and

accumulating an intensity of light scattered by passing the particle the through interrogation volume over a given period, wherein the intensity is accumulated parallel to the length of the interrogation volume or orthogonal to the length of the interrogation volume, and the intensity corresponds to a refractive index of the particle.

16. The method of measuring light intensity according to claim 15 , further comprising:

coupling the hollow vessel to a pool, wherein at least a portion of the fluid passes through vessel at a given velocity and mass flow rate.

17. The method of measuring light intensity according to claim 15 , wherein the hollow vessel comprises a first side orthogonal to a second side, the laser beam further configured to pass parallel to the first side, and the second side is substantially perpendicular to the laser beam.

18. The method of measuring light intensity according to claim 15 , wherein accumulating an intensity of light comprises accumulating light that passes through a lens of an imaging device by a time delay integration of the intensity of light.

19. The method of measuring light intensity according to claim 15 , further comprising:

coupling the hollow vessel to a pool, wherein at least a portion of the fluid passes through hollow vessel at a given velocity, the laser beam enters the hollow vessel at a position that is substantially orthogonal to a flow of the fluid.

20. The method of measuring light intensity according to claim 15 , further comprising:

coupling the hollow vessel to a pool, wherein at least a portion of the fluid passes through hollow vessel at a given velocity, the laser beam enters the hollow vessel at a position that is substantially parallel to a flow of the fluid.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2021
From: VAEZ-IRAVANI, MEHDI; BHOYAR, SANKESHA; SHARMA, RACHIT; ZHAO, GUOHENG
To: APPLIED MATERIALS, INC.
Reel/Frame 055199/0889 →
Continuity (1)
Related Publication 20210181084A1 · Jun 17, 2021
Cited By (5)
US 12,195,338 US 12,214,420 US 12,261,023 US 12,311,447 US 12,406,829