Connection pad configuration of semiconductor device
A semiconductor device comprises a semiconductor substrate, a connection pad, and a bump. The connection pad is connected to the bump and disposed between the semiconductor substrate and the bump. The connection pad has one or more slits.
1. A semiconductor device comprising:
a semiconductor substrate;
a bump; and
a connection pad connected to the bump and disposed between the semiconductor substrate and the bump, the connection pad having one or more slits,
wherein the one or more slits comprise a plurality of first slits arrayed in a longitudinal direction of the connection pad and wherein each of the plurality of first slits has first geometric centers positioned on a first straight line extending in the longitudinal direction.
2. The semiconductor device according to claim 1 , wherein the connection pad is elongated in a longitudinal direction, and
wherein the one or more slits are extended in a first direction orthogonal to the longitudinal direction of the connection pad.
3. The semiconductor device according to claim 1 , wherein the one or more slits are extended in a longitudinal direction of the connection pad.
4. The semiconductor device according to claim 1 , wherein the plurality of first slits are extended in a first direction orthogonal to the longitudinal direction of the connection pad.
5. The semiconductor device according to claim 1 , wherein lengths of the plurality of first slits are longer than one-third of a width of the connection pad in the first direction.
6. The semiconductor device according to claim 1 , wherein the first straight line comprises a center line of the connection pad.
7. The semiconductor device according to claim 1 , wherein the one or more slits further comprises a plurality of second slits arrayed in the longitudinal direction of the connection pad, and
wherein each of the plurality of second slits has second geometric centers aligned on a second straight line extending in the longitudinal direction, the second straight line being different from the first straight line.
8. The semiconductor device according to claim 7 , wherein the plurality of first slits and the plurality of second slits are extended in a first direction orthogonal to the longitudinal direction of the connection pad.
9. The semiconductor device according to claim 8 , wherein lengths of the plurality of first slits and lengths the plurality of second slits are longer than one sixth of a width of the connection pad in the first direction.
10. The semiconductor device according to claim 7 , wherein the plurality of first slits and the plurality of second slits are extended in the longitudinal direction of the connection pad.
11. The semiconductor device according to claim 1 , wherein the one or more slits comprises a plurality of slits spaced at equal intervals.
12. The semiconductor device according to claim 11 , further comprising a passivation layer comprising an opening through which the bump is connected to the connection pad,
wherein the plurality of slits are positioned in a second direction with respect to the opening, the second direction being parallel to a longitudinal direction of the connection pad.
13. The semiconductor device according to claim 1 , wherein the one or more slits have an open end and a closed end.
14. A semiconductor device comprising:
a semiconductor substrate;
a bump; and
a connection pad connected to the bump and disposed between the semiconductor substrate and the bump, the connection pad having one or more slits;
a passivation layer comprising an opening through which the bump is connected to the connection pad,
wherein the one or more slits comprises:
a first slit positioned in a second direction parallel to a longitudinal direction of the connection pad with respect to the opening; and
a second slit positioned in a third direction opposite to the second direction with respect to the opening.
15. A semiconductor device comprising:
a semiconductor substrate;
a bump; and
a connection pad connected to the bump and disposed between the semiconductor substrate and the bump, the connection pad having one or more slits,
wherein the one or more slits comprises a first slit and a second slit extended in a first direction orthogonal to a longitudinal direction of the connection pad,
wherein the first slit has a first open end in the first direction and a first closed end in a second direction opposite to the first direction, and
wherein the second slit has a second open end in the second direction and a second closed end in the first direction.
16. A method comprising:
preparing a semiconductor substrate;
forming a connection pad comprising one or more slits over the semiconductor substrate, wherein the one or more slits comprise a plurality of first slits arrayed in a longitudinal direction of the connection pad and wherein each of the plurality of first slits has first geometric centers positioned on a first straight line extending in the longitudinal direction; and
forming a bump over the connection pad, wherein the bump is connected to the connection pad.
17. The method according to claim 16 , wherein the connection pad is elongated in a longitudinal direction, and
wherein the one or more slits are extended in a first direction orthogonal to the longitudinal direction of the connection pad.
18. A semiconductor device comprising:
a semiconductor substrate;
a bump; and
a connection pad connected to the bump and disposed between the semiconductor substrate and the bump, the connection pad having one or more slits,
wherein the connection pad comprises a narrow portion and a wide portion, and wherein one or more of the one or more slits is positioned in the wide portion.
19. The semiconductor device according to claim 18 , wherein the narrow portion is extended from the wide portion along a center line of the connection pad.