Organic EL display panel and method of manufacturing organic EL display panel
An organic EL display panel includes a substrate, a plurality of pixel electrodes disposed in a matrix pattern over the substrate, a first current feeding auxiliary electrode layer disposed to extend in a column or row direction in at least one of gaps between adjacent ones of the pixel electrodes over the substrate, a second current feeding auxiliary electrode layer that contains aluminum as a main constituent and is disposed to be superposed on the first current feeding auxiliary electrode layer, a plurality of light emitting layers disposed on the plurality of pixel electrodes, and a common electrode layer disposed continuously to cover the first current feeding auxiliary electrode layer and the second current feeding auxiliary electrode layer as well as an upper side of the plurality of light emitting layers.
1. An EL (Electro Luminescence) display panel comprising:
a substrate;
a plurality of pixel electrodes over the substrate, wherein a gap is defined between adjacent pixel electrodes of the plurality of pixel electrodes;
a first current feeding auxiliary electrode layer extending in a column direction or a row direction in the gap, wherein the first current feeding auxiliary electrode layer is over the substrate, the first current feeding auxiliary electrode layer comprises a first metal, and a surface layer of the first current feeding auxiliary electrode layer has a first resistance;
a second current feeding auxiliary electrode layer on the first current feeding auxiliary electrode layer, wherein the second current feeding auxiliary electrode layer extends parallel to the first current feeding auxiliary electrode layer, a portion of the first current feeding auxiliary electrode layer extends beyond a boundary of the second current feeding auxiliary electrode layer, the second current feeding auxiliary electrode layer comprises a second metal different from the first metal, and a surface layer of the second current feeding auxiliary electrode layer has a second resistance higher than the first resistance;
a plurality of light emitting layers, wherein each light emitting layer of the plurality of light emitting layer is on a corresponding pixel electrode of the plurality of pixel electrodes; and
a common electrode layer over the first current feeding auxiliary electrode layer, the second current feeding auxiliary electrode layer and each of the plurality of light emitting layers, wherein the common electrode layer is a continuous layer.
2. The EL display panel according to claim 1 , wherein the surface layer of the second current feeding auxiliary electrode layer comprises a metallic oxide layer.
3. The EL display panel according to claim 1 , wherein a sheet resistance of the first current feeding auxiliary electrode layer is higher than a sheet resistance of the second current feeding auxiliary electrode layer.
4. The EL display panel according to claim 1 , wherein a contact resistance between the first current feeding auxiliary electrode layer and the common electrode layer is less than a contact resistance between the second current feeding auxiliary electrode layer and the common electrode layer.
5. The EL display panel according to claim 1 , wherein a surface area of the first current feeding auxiliary electrode layer is greater than a surface area of the second current feeding auxiliary electrode layer.
6. The EL display panel according to claim 1 , wherein the first metal is selected from the group consisting of tungsten and molybdenum.
7. The EL display panel according to claim 1 , wherein the second metal is aluminum.
8. A method of manufacturing an EL display panel, the method comprising:
forming a plurality of pixel electrodes arranged over a substrate by a vapor phase growth method, wherein a gap is defined between adjacent pixel electrodes of the plurality of pixel electrodes;
forming a first current feeding auxiliary electrode layer in a column direction or a row direction in the gap by a vapor phase growth method;
forming a second current feeding auxiliary electrode layer parallel to the first current feeding auxiliary electrode layer by a vapor phase growth method, wherein the second current feeding auxiliary electrode layer exposes a portion of the first current feeding auxiliary electrode layer;
forming a plurality of light emitting layers by a wet film forming method, wherein each light emitting layer of the plurality of light emitting layers is over a corresponding pixel electrode of the plurality of pixel electrodes; and
forming a common electrode layer continuously over the first current feeding auxiliary electrode layer, the second current feeding auxiliary electrode layer and each of the plurality of light emitting layers by a sputtering method or a chemical vapor deposition (CVD) method.
9. The method according to claim 8 , wherein forming the second current feeding auxiliary electrode layer comprises forming the second current feeding auxiliary electrode layer comprising a different metal from that in the first current feeding auxiliary electrode layer.
10. The method according to claim 8 , wherein forming the second current feeding auxiliary electrode layer comprises forming the second current feeding auxiliary electrode layer having a surface layer having a higher resistance higher than a surface layer of the first current feeding auxiliary electrode layer.
11. The method according to claim 8 , further comprising forming a surface layer on the second current feeding auxiliary electrode layer using an oxidizing process.
12. The method according to claim 8 , wherein forming the first current feeding auxiliary electrode layer comprises forming the first current feeding auxiliary electrode layer having a sheet resistance higher than a sheet resistance of the second current feeding auxiliary electrode layer.
13. The method according to claim 8 , wherein forming the first current feeding auxiliary electrode layer comprises forming the first current feeding auxiliary electrode layer having a contact resistance between the first current feeding auxiliary electrode layer and the common electrode layer be less than a contact resistance between the second current feeding auxiliary electrode layer and the common electrode layer.
14. The method according to claim 8 , wherein forming the first current feeding auxiliary electrode layer comprises forming the first current feeding auxiliary electrode layer having a surface area greater than a surface area of the second current feeding auxiliary electrode layer.
15. The method according to claim 8 , wherein forming the first current feeding auxiliary electrode layer comprises forming the first current feeding auxiliary electrode layer comprising a metal is selected from the group consisting of tungsten and molybdenum.
16. The method according to claim 8 , wherein forming the second current feeding auxiliary electrode layer comprises forming the second current feeding auxiliary electrode layer comprising aluminum.
17. An EL (Electro Luminescence) display panel comprising:
a substrate;
a plurality of pixel electrodes over the substrate, wherein a gap is defined between adjacent pixel electrodes of the plurality of pixel electrodes;
a first current feeding auxiliary electrode layer in the gap, wherein the first current feeding auxiliary electrode layer is over the substrate, the first current feeding auxiliary electrode layer comprises a first metal, and a surface layer of the first current feeding auxiliary electrode layer has a first resistance;
a second current feeding auxiliary electrode layer on the first current feeding auxiliary electrode layer, wherein the second current feeding auxiliary electrode layer extends parallel to the first current feeding auxiliary electrode layer, a portion of the first current feeding auxiliary electrode layer extends beyond a boundary of the second current feeding auxiliary electrode layer, the second current feeding auxiliary electrode layer comprises a second metal, and a surface layer of the second current feeding auxiliary electrode layer has a second resistance;
a plurality of light emitting layers, wherein each light emitting layer of the plurality of light emitting layer is on a corresponding pixel electrode of the plurality of pixel electrodes; and
a common electrode layer over the first current feeding auxiliary electrode layer, the second current feeding auxiliary electrode layer and each of the plurality of light emitting layers, wherein the common electrode layer is a continuous layer.
18. The EL display panel according to claim 17 , wherein a light emitting layer of the plurality of light emitting layer comprising an organic material.
19. The EL display panel according to claim 17 , wherein the common electrode layer directly contacts a top-most surface of the first current feeding auxiliary electrode layer.
20. The EL display panel according to claim 17 , wherein a bottom-most surface of the common electrode layer is co-planar with a bottom-most surface of the first current feeding auxiliary electrode layer.