Vibration device, electronic apparatus and vehicle

1. A vibration device comprising:

a base substrate which is a semiconductor substrate having first conductivity type;

a lid substrate;

a vibration element disposed between the base substrate and the lid substrate;

a wiring disposed on a surface of the base substrate at the lid substrate side; and

a coupling member that electrically couples the wiring and the vibration element to each other, wherein

the base substrate includes

a well having second conductivity type which is different from the first conductivity type, and

a first contact area that is disposed in the well and has a first contact surface which is a part of the surface, the first contact area having the first conductivity type, and

the wiring and the coupling member are in contact with the first contact surface, and are electrically coupled to each other via the first contact area.

2. The vibration device according to claim 1 , further comprising:

an intermediate substrate that is disposed between the base substrate and the lid substrate, and includes the vibration element, a frame surrounding the vibration element, and a coupler linking the vibration element and the frame;

a conductive first joining member that is located between the frame and the base substrate, and joins the frame and the base substrate; and

a conductive second joining member that is located between the frame and the lid substrate, and joins the frame and the lid substrate.

3. The vibration device according to claim 2 , wherein

the lid substrate is a semiconductor substrate having the first conductivity type, and

the base substrate and the lid substrate are electrically coupled to each other via the first joining member and the second joining member.

4. The vibration device according to claim 3 , wherein

the base substrate includes

a second contact area having the first conductivity type and in which first conductivity type impurities are doped at a high concentration relative to surroundings, and which includes a second contact surface that is a part of the surface, and

the first joining member is in contact with the second contact surface.

5. The vibration device according to claim 3 , wherein

the lid substrate includes

a third contact area having first conductivity type and in which first conductivity type impurities are doped at a high concentration relative to surroundings, and which includes a third contact surface that is a part of the surface, and

the second joining member is in contact with the third contact surface.

6. The vibration device according to claim 2 , wherein

a coupling surface of the base substrate that is coupled to the coupling member and a coupling surface of the base substrate that is coupled to the first joining member are flush with each other, and

a coupling surface of the intermediate substrate that is coupled to the coupling member and a coupling surface of the intermediate substrate that is coupled to the first joining member are flush with each other.

7. The vibration device according to claim 1 , wherein

the lid substrate includes a recess that opens to a surface at the base substrate side and that accommodates the vibration element, and is directly joined to the base substrate.

8. The vibration device according to claim 1 , further comprising:

an oscillator circuit formed on the base substrate and including the wiring.

9. An electronic apparatus comprising:

the vibration device including

a base substrate which is a semiconductor substrate having first conductivity type;

a lid substrate;

a vibration element disposed between the base substrate and the lid substrate;

an oscillator circuit formed on the base substrate and including a wiring disposed on a surface of the base substrate at the lid substrate side; and

a coupling member that electrically couples the wiring and the vibration element to each other, wherein

the base substrate includes

a well having second conductivity type which is different from the first conductivity type, and

a first contact area that is disposed in the well and has a first contact surface which is a part of the surface, the first contact area having the first conductivity type, and

the wiring and the coupling member are in contact with the first contact surface, and are electrically coupled to each other via the first contact area; and

a processing circuit that operates based on an oscillation signal output from the oscillator circuit of the vibration device.

10. A vehicle comprising:

the vibration device a including

a base substrate which is a semiconductor substrate having first conductivity type;

a lid substrate;

a vibration element disposed between the base substrate and the lid substrate;

an oscillator circuit formed on the base substrate and including a wiring disposed on a surface of the base substrate at the lid substrate side; and

a coupling member that electrically couples the wiring and the vibration element to each other, wherein

the base substrate includes

a well having second conductivity type which is different from the first conductivity type, and

a first contact area that is disposed in the well and has a first contact surface which is a part of the surface, the first contact area having the first conductivity type, and

the wiring and the coupling member are in contact with the first contact surface, and are electrically coupled to each other via the first contact area; and

an processing circuit that operates based on an oscillation signal output from the oscillator circuit of the vibration device.