IP Library Granted Patent US 10,879,674
Granted Patent B1
US 10,879,674 · App. 16/730,136 · Granted Dec 29, 2020

Laser devices using a semipolar plane

Inventors: James W. Raring (Santa Barbara, CA); You-Da Lin (Goleta, CA); Christiane Elsass (Santa Barbara, CA)
Assignee: Soraa Laser Diode, Inc.
H01S5/34333H01L33/08H01S5/028H01S5/0287H01S5/2009H01S5/2201H01S5/2214H01S5/3216H01S5/320275H01S5/3401H01L21/0274H01L21/042H01L21/28123H01L21/302H01L21/311H01L21/461H01L21/469H01L21/4828H01L33/16H01L41/332H01S5/0014H01S5/04252H01S5/22H01S5/3214
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Quick Facts
Patent No.
US 10,879,674
App. No.
16/730,136
Granted
Dec 29, 2020
Kind
B1
Abstract

An optical device includes a gallium and nitrogen containing substrate comprising a surface region configured in a (20-2-1) orientation, a (30-3-1) orientation, or a (30-31) orientation, within +/−10 degrees toward c-plane and/or a-plane from the orientation. Optical devices having quantum well regions overly the surface region are also disclosed.

Claims (53)

1. A system comprising:

a housing having an aperture;

an input interface for receiving one or more frames of images;

a laser diode device;

a power source electrically coupled to the laser diode device; wherein the laser diode device is configured to emit electromagnetic radiation with a peak wavelength of between 400 nm and 500 nm or between 500 nm and 560 nm; and

an application configured with the laser diode device, the laser diode device comprising:

a gallium and nitrogen containing material comprising a semipolar surface configured on a (30-3-1) orientation, a (30-31) orientation, a (20-2-1) orientation, or a (30-3-2) orientation, the semipolar surface having an offcut of the orientation;

an n-type cladding region overlying the semipolar surface;

an active region comprising at least one light emitting active layer region overlying the n-type cladding region; the light emitting active layer region comprising a quantum well region or a double hetero-structure region;

a p-type cladding region overlying the active region;

a conductive oxide overlying the p-type cladding region;

a laser stripe region comprising at least a portion of the p-type cladding region and the conductive oxide, the laser stripe region being characterized by a cavity orientation substantially parallel to the projection of a c-direction, the laser stripe region having a first end and a second end;

a first facet provided on the first end of the laser stripe region; and

a second facet provided on the second end of the laser stripe region.

2. The system of claim 1 , wherein the offcut of the orientation is between +/−5 degrees toward a c-plane and between +/−10 degrees toward an a-plane; and

wherein the active region contains a plurality of quantum well regions comprising 1 to 7 quantum wells, each of the quantum well regions comprising substantially InGaN; the plurality of quantum well regions ranging in thickness from 2 nm to 5 nm or from 5 nm to 10 nm; or wherein the active region contains a double heterostructure region; the double heterostructure region ranging in thickness from 10 nm to about 25 nm.

3. The system of claim 1 , wherein the first facet and the second facet are etched facets formed using a lithography and etching process.

4. The system of claim 1 , wherein the application is selected from one of a laser display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.

5. A system comprising:

a housing having an aperture;

an input interface for receiving one or more frames of images;

a green laser device;

a power source electrically coupled to the green laser device; wherein the green laser device is configured to emit electromagnetic radiation with a peak wavelength of between 500 nm and 580 nm; and

an application configured with the green laser device, the green laser device comprising:

a gallium and nitrogen containing material comprising a semipolar surface configured on a (30-3-1) orientation, a (30-31) orientation, a (20-2-1) orientation, a (20-21) orientation, or a (30-3-2) orientation, the semipolar surface having an offcut of the orientation;

an n-type cladding region overlying the semipolar surface;

an active region comprising at least one light emitting active layer region overlying the n-type cladding region; the light emitting active layer region comprising a quantum well region or a double hetero-structure region;

a laser stripe region overlying the active region, the laser stripe region comprising conductive oxide and being characterized by a cavity orientation substantially parallel to the projection of a c-direction, the laser stripe region having a first end and a second end;

a first facet provided on the first end of the laser stripe region; and

a second facet provided on the second end of the laser stripe region.

6. The system of claim 5 , wherein the offcut of the orientation is between +/−5 degrees toward a c-plane and between +/−10 degrees toward an a-plane;

wherein the active region contains a plurality of quantum well regions comprising 1 to 7 quantum wells, each of the quantum well regions comprising substantially InGaN; the plurality of quantum well regions ranging in thickness from 2 nm to 5 nm or from 5 nm to 10 nm; or wherein the active region contains a double heterostructure region; the double heterostructure region ranging in thickness from about 10 nm to about 25 nm; and

wherein the first facet and the second facet are formed using a lithography and etching process.

7. The system of claim 5 , wherein the conductive oxide comprises at least one of indium tin oxide (ITO) or zinc oxide (ZnO).

8. The system of claim 5 , comprising a p-type gallium and nitrogen containing layer overlying the active region and underlying the conductive oxide.

9. The system of claim 5 , wherein the first facet and the second facet are etched facets formed using a lithography and etching process.

10. The system of claim 5 , wherein the application is selected from one of a laser display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.

11. A system comprising:

a housing having an aperture;

an input interface for receiving one or more frames of images;

a laser device;

a power source electrically coupled to the laser device; wherein the laser device is configured to emit an electromagnetic radiation with a peak wavelength of between 400 nm and 500 nm or between 500 nm and 580 nm; and

an application configured with the laser device, the laser device comprising:

a gallium and nitrogen containing material comprising a semipolar surface configured on a (30-31) orientation, a (30-31) orientation, a (20-2-1) orientation, a (20-21) orientation, or a (30-3-2) orientation, the semipolar surface having an offcut of the orientation, the offcut of the orientation characterized by an offcut toward an a-plane; the offcut toward the a-plane being greater in magnitude than 1 degree and less than about 12 degrees;

an n-type cladding region overlying the semipolar surface;

an active region comprising at least one light emitting active layer region overlying the n-type cladding region; the light emitting active layer region comprising a quantum well region or a double hetero-structure region;

a p-type cladding region overlying the active region;

a laser stripe region overlying a portion of the semipolar surface, the laser stripe region being characterized by a cavity orientation substantially parallel to the projection of a c-direction, the laser stripe region having a first end and a second end;

a first etched facet provided on the first end of the laser stripe region; and

a second etched facet provided on the second end of the laser stripe region.

12. The system of claim 11 , wherein the offcut toward the a-plane is characterized by an absolute magnitude of angle between 3 and 10 degrees.

13. The system of claim 11 , wherein the offcut of the orientation is characterized by an offcut toward a c-plan of between +/−5 degrees.

14. The system of claim 11 , wherein the application is selected from one of a laser display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.

Assignments (1)
CHANGE OF NAME Recorded Mar 15, 2021
From: SORAA LASER DIODE, INC.
To: KYOCERA SLD LASER, INC.
Reel/Frame 056001/0313 →
Continuity (6)
Continuation 16118217 · Aug 30, 2018
Continuation 15424551 · Feb 3, 2017
Continuation 14883137 · Oct 14, 2015
Continuation 14604223 · Jan 23, 2015
Continuation 13651291 · Oct 12, 2012
Provisional Application 61546792 · Oct 13, 2011