Bottom leads chemical mechanical planarization for TMR magnetic sensors
A Wheatstone bridge array comprising a tunneling magnetoresistive (TMR) sensor and a method for manufacturing is disclosed. The bottom lead for the TMR sensor has a very small surface roughness due to not only chemical mechanical planarization (CMP) but also due to forming the bottom lead from multiple layers. The multiple layers include at least a bottom first metal layer and a top second metal layer disposed on the first metal layer. The second metal layer generally has a lower surface roughness than the first metal layer. Additionally, the second metal layer has a slower polishing rate. Therefore, not only does the second metal layer reduce the surface roughness simply be being present, but the slower polishing rate enables the top second metal film to be polished to a very fine surface roughness of less than or equal to ˜2 Angstroms.
1. A tunnel magnetoresistive (TMR) sensor device, comprising:
a substrate;
a bottom lead disposed over the substrate, the bottom lead formed by a chemical mechanical planarizing (CMP) process, wherein the bottom lead comprises alternating conductive layers that have different physical characteristics or different material compositions, at least one conductive layer being amorphous;
a TMR sensor stack coupled to the bottom lead; and
a top lead coupled to the TMR sensor stack.
2. The TMR sensor device of claim 1 , wherein the bottom lead has a surface roughness less than or equal to 2 Angstroms.
3. The TMR sensor device of claim 1 , wherein the alternating conductive layers have different surface roughnesses.
4. The TMR sensor device of claim 3 , wherein the alternating conductive layers comprise different materials.
5. The TMR sensor device of claim 1 , wherein a first layer of the alternating conductive layers comprises copper and a second layer of the alternating conductive layers comprises tantalum.
6. The TMR sensor device of claim 1 , further comprising a CMP stop layer disposed adjacent a top surface of the bottom lead.
7. The TMR sensor device of claim 1 , wherein the bottom lead has a surface roughness that translates through the TMR sensor stack.
8. A method of fabricating a TMR sensor device, comprising:
forming a bottom lead over a substrate, wherein the forming includes:
depositing a first conductive material over a substrate;
depositing a second conductive material on the first conductive material,
wherein the first conductive material and the second conductive material are different;
depositing a photoresist layer over the bottom lead;
selectively removing a portion of the bottom lead;
depositing an electrically insulating material adjacent remaining bottom lead;
depositing a CMP stop layer on the electrically insulating material;
performing a CMP process on the bottom lead;
forming a TMR sensor stack over the bottom lead; and
forming a top lead over the TMR sensor stack.
9. The method of claim 8 , wherein the CMP process reduces a surface roughness of a top layer of the bottom lead to less than or equal to 2 Angstroms.
10. The method of claim 8 , wherein the CMP stop layer comprises SiOx.
11. The method of claim 8 , wherein the CMP stop layer and the electrically insulating material comprise different materials.
12. The method of claim 8 , wherein forming the bottom lead comprises repeating the depositing the first conductive material and depositing the second conductive material at least one time.
13. The method of claim 8 , wherein the first conductive material has a greater thickness than the second conductive material.
14. The method of claim 8 , wherein an uppermost second conductive film has a thickness of between about 10-13 nm after the CMP process.
15. A method for manufacturing a bottom lead, comprising:
depositing alternating layers of conductive material onto a substrate to create a bottom lead stack;
depositing a layer of a CMP-inert metal film on top of the bottom lead stack;
depositing an outer insulating material around the bottom lead stack;
depositing a CMP stopper layer on top of the outer insulating material, wherein the CMP stopper layer is a silicon oxide; and
performing a CMP process on the CMP-inert metal film using a polishing slurry.
16. The method of claim 15 , wherein the alternating layers of conductive material are copper and tantalum.
17. The method of claim 15 , wherein the CMP-inert metal film is tantalum.
18. The method of claim 15 , wherein the CMP-inert metal film has a thickness of 10-15 nm prior to performing the CMP process.
19. The method of claim 15 , wherein the outer insulating material comprises aluminum oxide.
20. The method of claim 15 , wherein the CMP process removes less than 5 nm of the CMP-inert metal film.
21. The method of claim 15 , wherein the CMP-inert metal film has a surface roughness of 2 Angstroms or less after application of the CMP process.
22. A method for manufacturing a bottom lead, comprising:
depositing alternating layers of conductive material onto a substrate to create a bottom lead stack;
depositing a layer of a CMP-inert metal film on top of the bottom lead stack;
depositing an outer insulating material around the bottom lead stack;
depositing a CMP stopper layer on top of the outer insulating material; and
performing a CMP process on the CMP-inert metal film using a polishing slurry, wherein the CMP process removes less than 5 nm of the CMP-inert metal film.