Piezoelectric pump and liquid ejection device
According to an embodiment, a piezoelectric pump includes a pressure chamber and a buffer chamber. The buffer chamber is provided for at least one of an inlet of the pressure chamber in which liquid flows or an outlet of the pressure chamber from which the liquid is discharged. The buffer chamber includes a wall portion that forms a gas chamber that retains gas from the liquid.
1. A piezoelectric pump, comprising:
a pressure chamber having a variable volume, an inlet and an outlet being formed on a bottom portion of the pressure chamber, liquid being caused to flow in to the pressure chamber through the inlet and to be discharged from the pressure chamber through the outlet;
a diaphragm that deforms to change the volume of the pressure chamber;
a first check valve that is provided at the inlet and regulates a flow of the liquid;
a second check valve that is provided at the outlet and regulates the flow of the liquid;
a first buffer chamber that is provided out of the inlet;
a first port that is connected to an inner circumferential surface of the first buffer chamber and through which the liquid flows into the first buffer chamber;
a second port through which the liquid discharged from the pressure chamber flows out of the piezoelectric pump; and
a first wall portion that is provided in the first buffer chamber and forms a wall of a first gas chamber, the first wall portion comprising an arc portion having a first end that is spaced from the first port and faces the inner circumferential surface of the first buffer chamber on a side of the first port and a second end that is integrally provided on the inner circumferential surface of the first buffer chamber on a side of the second port, the arc portion being curved so as to avoid the inlet, the first gas chamber retaining gas in the liquid flowing in the first buffer chamber.
2. The piezoelectric pump according to claim 1 , wherein
the diaphragm is provided to face the bottom portion of the pressure chamber,
the bottom portion of the pressure chamber has a groove, and
the inlet and the outlet are formed on a bottom portion of the groove and fluidly connected to each other.
3. The piezoelectric pump according to claim 1 , further comprising:
a second buffer chamber that is provided out of the outlet, wherein
the second port is connected to the second buffer chamber and the liquid flows out of the second buffer chamber through the second port.
4. The piezoelectric pump according to claim 3 , further comprising:
a second wall portion that is provided in the second buffer chamber and forms a wall of a second gas chamber retaining gas in the liquid discharged from the pressure chamber to the second buffer chamber through the outlet.
5. The piezoelectric pump according to claim 4 , wherein
the first wall portion includes a claw portion at the first end.
6. The piezoelectric pump according to claim 4 , wherein
the second port is connected to an inner circumferential surface of the second buffer chamber, and
the second wall portion comprises a second arc portion having a first end that is spaced from the inner circumferential surface of the second buffer chamber on a side of the first buffer chamber and a second end that is integrally provided on the inner circumferential surface of the second buffer chamber on a side of the second port, the second arc portion being curved so as to avoid the outlet.