IP Library Granted Patent US 12,025,375
Granted Patent B2
US 12,025,375 · App. 16/766,857 · Granted Jul 2, 2024

Method for drying a substrate, dryer module for carrying out the method, and dryer system

Inventors: Bernhard Graziel (Hanau, DE); Michael Tittmann (Hanau, DE); Vincent Krafft (Hanau, DE); Larisa Von Riewel (Hanau, DE)
Assignee: Excelitas Noblelight GmbH
F26B3/283F26B3/04F26B3/30F26B15/00F26B21/004F26B25/005B41F23/0413B41F23/0436B41F23/0456
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Quick Facts
Patent No.
US 12,025,375
App. No.
16/766,857
Granted
Jul 2, 2024
Kind
B2
Abstract

Methods for drying a substrate. The methods include the following steps: (a) emitting infrared radiation towards a substrate moving through a process space using an emitter unit comprising at least one inflated emitter, (b) generating at least two process gas streams of a process gas directed towards the substrate, (c) drying the substrate by the action of infrared radiation and process gas on the substrate, and (d) extracting moisture-laden process gas from the process space via an extraction duct, forming an exhaust air stream leading away from the substrate. To specify a drying method which is reproducible and effective and leads to an improved result, in particular in terms of homogeneity and speed of drying of the substrate, the at least two process gas streams are guided to the infrared emitter before they act on the substrate, and an exhaust air stream is spatially assigned to each process gas stream.

Claims (31)

1. An infrared dryer module for drying a substrate that moves through a process space in a substrate plane and in a transport direction, the dryer module comprising:

(a) an emitter unit comprising a plurality of infrared emitters emitting infrared radiation towards the substrate plane, and each having a longitudinal axis, the longitudinal axes of which are parallel to each other;

(b) a process gas supply unit with a process gas collection space having at least one inlet opening for an introduction of process gas from the process gas collection space into the process space, each inlet opening having a gas-guiding element which extends in a direction of the substrate plane and borders the respective inlet opening;

(c) an exhaust air unit with at least one extraction duct for discharging moisture-laden process gas from the process space,

wherein each of the infrared emitters is arranged in relation to the at least one inlet opening such that, together with the gas-guiding element, it forms an inlet channel for the process gas on each side of its longitudinal axis, and wherein the at least one extraction duct is adjacent to each process gas inlet channel,

wherein the at least one extraction duct includes a common extraction duct arranged between adjacent infrared emitters, and

wherein each of the plurality of infrared emitters has a length, and a volume characteristic is imposed on a process gas stream which increases in the transport direction at least partially over the length of the infrared emitter.

2. The dryer module according to claim 1 , wherein the gas-guiding element and the at least one extraction duct have a common wall section, which ends at a distance from the substrate plane.

3. The dryer module according to claim 1 , wherein the longitudinal axes of the infrared emitters form an angle of less than 30 degrees with the transport direction.

4. The dryer module according to claim 1 , further comprising, located in the process space, and viewed in the transport direction, a front air knife, an irradiation space fitted with the plurality of infrared emitters arranged parallel to each other, an air exchanger unit with an integrated extraction mechanism and a rear air knife.

5. The dryer module according to claim 4 , wherein the front air knife is followed in the transport direction by an additional extraction mechanism.

6. A dryer system for drying a substrate moving through a process space in a substrate plane and in a transport direction, containing multiple dryer modules according to claim 1 which are arranged next to one another and/or one behind another in the transport direction.

7. An infrared dryer module for drying a substrate that moves through a process space in a substrate plane and in a transport direction, the dryer module comprising:

(a) an emitter unit comprising a plurality of infrared emitters emitting infrared radiation towards the substrate plane, each having a longitudinal axis, the longitudinal axes of which are parallel to each other;

(b) a process gas supply unit with a process gas collection space having at least one inlet opening for an introduction of process gas from the process gas collection space into the process space, each inlet opening having a gas guiding element which extends in a direction of the substrate plane and borders the respective inlet opening;

(c) an exhaust air unit with at least one extraction duct for discharging moisture-laden process gas from the process space,

wherein each of the infrared emitters is arranged in relation to the at least one inlet opening such that, together with the gas guiding element, it forms an inlet channel for the process gas on each side of its longitudinal axis, and wherein the at least one extraction duct is adjacent to each process gas inlet channel, and

wherein each of the plurality of infrared emitters has a length, and a volume characteristic is imposed on a process gas stream which increases in the transport direction at least partially over the length of the infrared emitter.

8. The dryer module according to claim 7 , wherein the gas guiding element and the at least one extraction duct have a common wall section, which ends at a distance from the substrate plane.

9. The dryer module according to claim 7 , wherein the longitudinal axes of the infrared emitters form an angle of less than 30 degrees with the transport direction.

10. The dryer module according to claim 7 , further comprising, located in the process space, and viewed in the transport direction, a front air knife, an irradiation space fitted with the plurality of infrared emitters arranged parallel to each other, an air exchanger unit with an integrated extraction mechanism, and a rear air knife.

11. The dryer module according to claim 10 , wherein the front air knife is followed in the transport direction by an additional extraction mechanism.

12. The dryer module according to claim 7 , wherein the gas guiding element arches over each of the plurality of infrared emitters in a bell shape and extends in the direction of the substrate plane until it reaches a distance of 10 mm from the substrate.

13. The dryer module according to claim 7 , wherein each of the plurality of infrared emitters comprises a quartz glass bulb having a cross-section in a figure-of-eight shape.

14. The dryer module according to claim 13 , wherein the quartz glass bulb for each of the plurality of infrared emitters has external dimensions of 34 mm by 14 mm.

15. The dryer module according to claim 7 , wherein each of the plurality of infrared emitters has an output of 3500 W.

16. The dryer module according to claim 7 , wherein each of the plurality of infrared emitters has a length of 70 cm.

17. The dryer module according to claim 7 , further comprising an elongated opening that connects the process gas collection space and the process space, wherein the elongated opening has a shape of a longitudinal slit extending in the transport direction.

18. The dryer module according to claim 17 , wherein the elongated opening has a width which broadens continuously in the transport direction.

19. The dryer module according to claim 18 , wherein a width of the at least one extraction duct remains constant.

20. The dryer module according to claim 7 , wherein the at least one extraction duct forms an angle of 10 degrees with the transport direction.

Assignments (2)
CHANGE OF NAME Recorded May 1, 2024
From: HERAEUS NOBLELIGHT GMBH
To: EXCELITAS NOBLELIGHT GMBH
Reel/Frame 067288/0100 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 8, 2020
From: GRAZIEL, BERNHARD; TITTMANN, MICHAEL; KRAFFT, VINCENT; VON RIEWEL, LARISA
To: HERAEUS NOBLELIGHT GMBH
Reel/Frame 053147/0666 →
Priority Claims (1)
DE 10 2017 129 017.6 · Dec 6, 2017 · national
Continuity (1)
Related Publication 20200300542A1 · Sep 24, 2020
Cited By (1)
US 12,339,064