IP Library Granted Patent US 11,502,212
Granted Patent B2
US 11,502,212 · App. 16/770,388 · Granted Nov 15, 2022

Photovoltaic devices and semiconductor layers with group V dopants and methods for forming the same

Inventors: Hongbo Cao (Cohoes, NY); Sachit Grover (Campbell, CA); William Hullinger Huber (Ottawa Hills, OH); Xiaoping Li (Santa Clara, CA); Dingyuan Lu (San Jose, CA); Roger Malik (Santa Clara, CA); Hongying Peng (Clifton Park, NY); Joseph John Shiang (Niskayuna, NY); Qianqian Xin (Shanghai, CN); Gang Xiong (Santa Clara, CA)
Assignee: First Solar, Inc.
H01L31/02963H01L31/02966H01L31/073H01L31/1832H01L31/1864
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Quick Facts
Patent No.
US 11,502,212
App. No.
16/770,388
Granted
Nov 15, 2022
Kind
B2
Abstract

A photovoltaic device ( 100 ) can include an absorber layer ( 160 ). The absorber layer ( 160 ) can be doped p-type with a Group V dopant and can have a carrier concentration of the Group V dopant greater than 4×10 15 cm −3 . The absorber layer ( 160 ) can include oxygen in a central region of the absorber layer ( 160 ). The absorber layer ( 160 ) can include an alkali metal in the central region of the absorber layer ( 160 ). Methods for carrier activation can include exposing an absorber layer ( 160 ) to an annealing compound in a reducing environment ( 220 ). The annealing compound ( 224 ) can include cadmium chloride and an alkali metal chloride.

Claims (38)

1. A method for carrier activation, comprising:

exposing an absorber layer to a reducing environment, wherein the absorber layer comprises cadmium, tellurium, selenium, and a Group V dopant;

contacting the absorber layer with an annealing compound, wherein:

the annealing compound comprises cadmium chloride and an alkali metal chloride;

the alkali metal chloride comprises an alkali metal;

an atomic ratio of alkali metal to cadmium in the annealing compound is less than 10,000 parts per million; and

annealing the absorber layer, whereby at least a portion of the Group V dopant is activated, and wherein, after the absorber layer is annealed, the absorber layer has a carrier concentration greater than 4×10 15 cm −3 .

2. The method of claim 1 , wherein the reducing environment comprises a forming gas configured to mitigate formation of group V oxides, the forming gas comprising hydrogen, nitrogen, or combinations thereof.

3. The method of claim 1 , wherein the reducing environment is at a vacuum pressure between 200 Torr and 800 Torr.

4. The method of claim 1 , wherein the absorber layer is annealed at a temperature between 350° C. and 500° C. for between 5 minutes and 60 minutes.

5. The method of claim 1 , wherein the alkali metal chloride comprises LiCl, KCl, RbCl, or combinations thereof.

6. The method of claim 1 , wherein the atomic ratio of the alkali metal to cadmium in the annealing compound is between 500 parts per million and 6,000 parts per million.

7. The method of claim 6 , wherein the alkali metal is potassium.

8. The method of claim 6 , wherein the alkali metal is rubidium.

9. The method of claim 1 , wherein, after the absorber layer is annealed, the absorber layer has a carrier concentration between 8×10 15 cm −3 and 6×10 16 cm −3 .

10. The method of claim 9 , wherein an atomic concentration of the Group V dopant in the absorber layer is greater than 1×10 17 cm −3 .

11. The method of claim 1 , wherein the Group V dopant is arsenic.

12. The method of claim 1 , wherein after the absorber layer is annealed:

an atomic concentration of the Group V dopant in a central region of the absorber layer is between about 3×10 17 cm −3 and about 1×10 19 cm −3 ;

the absorber layer has a carrier concentration between 8×10 15 cm −3 and 6×10 16 cm −3 ;

the absorber layer comprises oxygen in the central region of the absorber layer;

the absorber layer comprises the alkali metal in the central region of the absorber layer; and

a ratio of an atomic concentration of the alkali metal to an atomic concentration of the oxygen in the central region of the absorber layer is in a range between 0.1 and 100.

13. A method for carrier activation, comprising:

contacting an absorber layer with an annealing composition, wherein:

the absorber layer comprises cadmium, tellurium, selenium, and a first dopant including at least one of phosphorous, arsenic, antimony, or bismuth;

the annealing composition comprises cadmium chloride and an alkali metal chloride;

the alkali metal chloride comprises an alkali metal, including at least one of potassium or rubidium;

an atomic ratio of alkali metal to cadmium in the annealing composition is between 500 parts per million to 6,000 parts per million;

exposing an absorber layer to a reducing environment, wherein:

the reducing environment is at a vacuum pressure between 200 Torr and 800 Torr;

the reducing environment comprises hydrogen gas, nitrogen gas, methane, carbon monoxide, or combinations thereof; and

annealing the absorber layer, by heating the absorber layer at a temperature between 350° C. and 500° C. for a duration of 5 minutes to 60 minutes, in the reducing environment, wherein, after the absorber layer is annealed:

an atomic concentration of the first dopant in a central region of the absorber layer is between about 3×10 17 cm −3 and about 1×10 19 cm −3 ;

the absorber layer has a carrier concentration between 8×10 15 cm −3 and 6×10 16 cm −3 ;

the absorber layer comprises oxygen in the central region of the absorber layer;

the absorber layer comprises the alkali metal in the central region of the absorber layer; and

a ratio of an atomic concentration of the alkali metal to an atomic concentration of the oxygen in the central region of the absorber layer is in a range between 0.1 and 100.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Feb 13, 2026
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 074858/0364 →
SECURITY INTEREST Recorded Jul 10, 2023
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 064237/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 9, 2020
From: GROVER, SACHIT; HUBER, WILLIAM HULLINGER; LI, XIAOPING; LU, DINGYUAN; MALIK, ROGER; XIONG, GANG; CAO, HONGBO; SHIANG, JOSEPH JOHN; PENG, HONGYING; XIN, QIANQIAN
To: FIRST SOLAR, INC.
Reel/Frame 052880/0469 →