Semiconductor element and flow rate measurement device using same
Provided are a semiconductor device and a thermal type fluid flow rate sensor which suppress strain occurring in an aluminum film and suppresses disconnection due to repeated metal fatigue of the aluminum film. The semiconductor device and the thermal type fluid flow rate sensor of the present invention are configured so that the heights of a silicon film and an aluminum film satisfy D>D 1 between a flow rate sensor part (immediately above a diaphragm end part) D and a circuit part (LSI part) D 1.
1. A semiconductor element, comprising:
a semiconductor substrate having a cavity part; and
a laminate part laminated on the semiconductor substrate, wherein
the laminate part forms a diaphragm covering the cavity part,
the laminate part has a silicon film and an aluminum film that constitute a thermocouple, and a connection part connecting between the silicon film and the aluminum film,
the connection part is provided in the diaphragm,
the silicon film is provided on a substrate side relative to a neutral axis of the diaphragm, and
the aluminum film is provided on an opposite side to a substrate side relative to the neutral axis in a part crossing an end part of the diaphragm.
2. A semiconductor element, comprising:
a semiconductor substrate having a cavity part; and
a laminate part laminated on the semiconductor substrate, wherein
the laminate part forms a diaphragm covering the cavity part,
the laminate part has a silicon film and an aluminum film that constitute a thermocouple, and a connection part connecting between the silicon film and the aluminum film,
the connection part is provided in the diaphragm,
the semiconductor element includes a circuit part having a transistor provided outside the diaphragm, a first aluminum layer formed outside the diaphragm in the laminate part, and a second aluminum layer formed above the first aluminum layer, and
in the aluminum film constituting the thermocouple, a part crossing an end part of the diaphragm is formed above the first aluminum layer.
3. A semiconductor element, comprising:
a semiconductor substrate having a cavity part; and
a laminate part laminated on the semiconductor substrate, wherein
the laminate part forms a diaphragm covering the cavity part,
the laminate part has a silicon film and an aluminum film that constitute a thermocouple, and a connection part connecting between the silicon film and the aluminum film,
the connection part is provided in the diaphragm,
the semiconductor element has a circuit part including a transistor provided outside the diaphragm part, and
a distance D in a thickness direction between the aluminum film and the silicon film at an end part of the diaphragm is larger than a distance D 1 in a thickness direction between the transistor and an aluminum film formed immediately above the transistor.
4. The semiconductor element according to claim 1 , wherein
an intermediate layer is formed in the diaphragm part, and
the silicon film and the aluminum film are electrically connected via the intermediate layer.
5. The semiconductor element according to claim 2 , wherein
an intermediate layer is formed in the diaphragm part, and
the silicon film and the aluminum film are electrically connected via the intermediate layer.
6. The semiconductor element according to claim 3 , wherein
an intermediate layer is formed in the diaphragm part, and
the silicon film and the aluminum film are electrically connected via the intermediate layer.
7. The semiconductor element according to claim 2 , wherein
an intermediate layer is formed, in the diaphragm, below the aluminum film and above the silicon film,
the connection part has a first connection part and a second connection part,
the aluminum film and the intermediate layer are connected by the first connection part, and
the intermediate layer and the silicon film are connected by the second connection part.
8. The semiconductor element according to claim 3 , wherein
an intermediate layer is formed, in the diaphragm, below the aluminum film and above the silicon film,
the connection part has a first connection part and a second connection part,
the aluminum film and the intermediate layer are connected by the first connection part, and
the intermediate layer and the silicon film are connected by the second connection part.
9. The semiconductor element according to claim 7 , wherein
the intermediate layer is an aluminum film,
the first and second connection parts are through-holes, and
a height of through-hole connecting between the silicon film and the intermediate layer is equal to a height of through-hole connecting between the transistor and an aluminum film formed immediately above the transistor.
10. The semiconductor element according to claim 1 , wherein an aluminum film of the end part of the diaphragm part is provided at a position where a generated strain is equal to or less than 0.015.
11. The semiconductor element according to claim 2 , wherein an aluminum film of the end part of the diaphragm part is provided at a position where a generated strain is equal to or less than 0.015.
12. The semiconductor element according to claim 3 , wherein an aluminum film of the end part of the diaphragm part is provided at a position where a generated strain is equal to or less than 0.015.
13. The semiconductor element according to claim 1 , wherein an aluminum film constituting the thermocouple formed immediately above the end part of the diaphragm is arranged in a second layer from an uppermost layer of the laminate part.
14. The semiconductor element according to claim 2 , wherein an aluminum film constituting the thermocouple formed immediately above the end part of the diaphragm is arranged in a second layer from an uppermost layer of the laminate part.
15. The semiconductor element according to claim 3 , wherein an aluminum film constituting the thermocouple formed immediately above the end part of the diaphragm is arranged in a second layer from an uppermost layer of the laminate part.
16. A flow rate measurement device, comprising the semiconductor element according to claim 1 .
17. A flow rate measurement device, comprising the semiconductor element according to claim 2 .
18. A flow rate measurement device, comprising the semiconductor element according to claim 3 .