Hybrid filter
The invention combines two filter technologies on a single device using the same substrate there for. On this substrate a filter circuit is arranged that has a ladder-type or a lattice arrangement of series and parallel impedance elements to provide a hybrid filter having for example a band pass function. The impedance elements are chosen from BAW resonators and LC elements.
1. A hybrid filter, comprising:
a substrate; and
a filter circuit with a ladder-type or lattice arrangement of series and parallel impedance elements comprising at least one bulk acoustic wave (BAW) resonator and a plurality of LC elements, arranged on the substrate, wherein:
the plurality of LC elements comprise a metal-isolator-metal capacitor and a coil,
the plurality of LC elements are formed from a multi-level metallization,
at least one metallization level of the plurality of LC elements is embedded in a dielectric,
LC elements of the plurality of LC elements that are formed in the same metallization level are electrically connected by conductor lines,
LC elements of the plurality of LC elements that are formed in different metallization levels are interconnected by at least one via,
at least one LC element of the plurality of LC elements is formed on the substrate,
a plane dielectric layer is arranged above the at least one LC element, and
the at least one BAW resonator is formed directly on the plane dielectric layer.
2. The hybrid filter of claim 1 , wherein the substrate is a glass substrate.
3. The hybrid filter of claim 1 , wherein at least one LC element of the plurality of LC elements is embodied as a passive element on the substrate.
4. The hybrid filter of claim 1 , wherein the at least one LC element of the plurality of LC elements and the at least one BAW resonator are formed adjacent to each other on a same surface of the substrate.
5. The hybrid filter of claim 1 , wherein the plane dielectric layer comprises a polished silicon oxide layer.
6. The hybrid filter of claim 1 , wherein at least one external contacts pad of the filter circuit is arranged on a top surface of the at least one BAW resonator.
7. A hybrid filter of claim 1 , comprising:
a substrate; and
a filter circuit with a ladder-type or lattice arrangement of series and parallel impedance elements comprising at least one BAW resonator and a plurality of LC elements, arranged on the substrate, wherein:
the plurality of LC elements comprise a metal-isolator-metal capacitor and a coil,
the plurality of LC elements are formed from a multi-level metallization,
at least one metallization level of the plurality of LC elements is embedded in a dielectric,
LC elements of the plurality of LC elements that are formed in the same metallization level are electrically connected by conductor lines,
LC elements of the plurality of LC elements that are formed in different metallization levels are interconnected by at least one via,
the at least one BAW resonator is formed on a surface of the substrate,
the at least one BAW resonator comprises at least a top acoustic mirror, and
at least one LC element of the plurality of LC elements is formed as a passive element on the top acoustic mirror.
8. The hybrid filter of claim 7 , wherein the substrate is a glass substrate.
9. The hybrid filter of claim 7 , wherein at least one LC element of the plurality of LC elements is embodied as a passive element on the substrate.
10. The hybrid filter of claim 7 , wherein at least one LC element of the plurality of LC elements and the at least one BAW resonator are formed adjacent to each other on a same surface of the substrate.
11. The hybrid filter of claim 7 , wherein a plane dielectric layer is arranged above at least one LC element of the plurality of LC elements and the plane dielectric layer comprises a polished silicon oxide layer.
12. The hybrid filter of claim 7 , wherein at least one external contacts pad of the filter circuit is arranged on a top surface of the at least one BAW resonator.
13. A hybrid filter, comprising:
a substrate; and
a filter circuit with a ladder-type or lattice arrangement of series and parallel impedance elements comprising at least one BAW resonator and a plurality of LC elements, arranged on the substrate, wherein:
the plurality of LC elements comprise a metal-isolator-metal capacitor and a coil,
the plurality of LC elements are formed from a multi-level metallization,
at least one metallization level of the plurality of LC elements is embedded in a dielectric,
LC elements of the plurality of LC elements that are formed in the same metallization level are electrically connected by conductor lines, and
LC elements of the plurality of LC elements that are formed in different metallization levels are interconnected by at least one via, and
at least one LC element of the plurality of LC elements and the at least one BAW resonator are formed on opposite surfaces of the substrate.
14. The hybrid filter of claim 13 , wherein a plane dielectric layer is arranged above at least one LC element of the plurality of LC elements and the plane dielectric layer comprises a polished silicon oxide layer.
15. The hybrid filter of claim 13 , wherein at least one external contacts pad of the filter circuit is arranged on a top surface of the at least one BAW resonator.
16. The hybrid filter of claim 13 , wherein the substrate is a glass substrate.
17. The hybrid filter of claim 13 , wherein at least one LC element of the plurality of LC elements is embodied as a passive element on the substrate.
18. A hybrid filter, comprising:
a substrate; and
a filter circuit with a ladder-type or lattice arrangement of series and parallel impedance elements comprising at least one BAW resonator and a plurality of LC elements, arranged on the substrate, wherein:
the plurality of LC elements comprise a metal-isolator-metal capacitor and a coil,
the plurality of LC elements are formed from a multi-level metallization,
at least one metallization level of the plurality of LC elements is embedded in a dielectric,
LC elements of the plurality of LC elements that are formed in the same metallization level are electrically connected by conductor lines,
LC elements of the plurality of LC elements that are formed in different metallization levels are interconnected by at least one via,
the filter circuit comprises the metal-isolator-metal capacitor as a series impedance element and the coil as a parallel reactance element of the ladder-type or lattice type arrangement, and
the at least one BAW resonator and at least one LC element of the plurality of LC elements are interconnected by the at least one via.
19. The hybrid filter of claim 18 , wherein at least one LC element of the plurality of LC elements is embodied as a passive element on the substrate.
20. The hybrid filter of claim 18 , wherein the substrate is a glass substrate.