Method and system for germanium-on-silicon photodetectors without germanium layer contacts
Methods and systems for germanium-on-silicon photodetectors without germanium layer contacts are disclosed and may include, in a semiconductor die having a photodetector, where the photodetector includes an n-type silicon layer, a germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer: receiving an optical signal, absorbing the optical signal in the germanium layer, generating an electrical signal from the absorbed optical signal, and communicating the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer. The photodetector may include a horizontal or vertical junction double heterostructure where the germanium layer is above the n-type and p-type silicon layers. An intrinsically-doped silicon layer may be below the germanium layer between the n-type silicon layer and the p-type silicon layer. A top portion of the germanium layer may be p-doped.
1. A surface-illuminated photodetector comprising:
a first silicon layer;
a germanium layer disposed on the first silicon layer;
an n-type silicon layer and a p-type silicon layer that are arranged at a periphery of the germanium layer, wherein one or both of the n-type silicon layer and the p-type silicon layer partially overlap a top surface of the germanium layer; and
metal contacts that contact portions of the n-type silicon layer and the p-type silicon layer that are not overlapping with the top surface.
2. The photodetector of claim 1 , wherein the photodetector is configured as a double heterostructure photodetector.
3. The photodetector of claim 1 , wherein the germanium layer is partially recessed into the first silicon layer.
4. The photodetector of claim 1 ,
wherein each the n-type silicon layer and the p-type silicon layer comprise respective fingers, and
wherein the respective fingers are interdigitated above the top surface of the germanium layer.
5. The photodetector of claim 1 , wherein the n-type silicon layer and the p-type silicon layer are formed as respective segments of a ring shape.
6. The photodetector of claim 5 ,
wherein the segment of the p-type silicon layer has a greater width than the segment of the n-type silicon layer, and
wherein the segment of the p-type silicon layer overlaps the top surface of the germanium layer.
7. The photodetector of claim 6 , wherein the germanium layer comprises a p-type germanium layer.
8. The photodetector of claim 1 , wherein the first silicon layer comprises intrinsic silicon.
9. The photodetector of claim 1 , wherein the first silicon layer comprises n-type silicon having a doping level less than the n-type silicon layer.
10. The photodetector of claim 1 , wherein the metal contacts contact the periphery of the n-type silicon layer and the p-type silicon layer.
11. A method comprising:
receiving an optical signal at a top surface of a germanium layer of a photodetector, wherein an n-type silicon layer and a p-type silicon layer of the photodetector are arranged at a periphery of the germanium layer, wherein one or both of the n-type silicon layer and the p-type silicon layer partially overlap the top surface, wherein metal contacts of the photodetector contact portion of the n-type silicon layer and the p-type silicon layer that are not overlapping with the top surface; and
generating an electrical signal from the optical signal.
12. The method of claim 11 , wherein the photodetector is configured as a double heterostructure photodetector.
13. The method of claim 11 ,
wherein the germanium layer is disposed on a first silicon layer, and
wherein the germanium layer is partially recessed into the first silicon layer.
14. The method of claim 13 , wherein the first silicon layer comprises intrinsic silicon.
15. The method of claim 13 , wherein the first silicon layer comprises n-type silicon having a doping level less than the n-type silicon layer.
16. The method of claim 11 ,
wherein each the n-type silicon layer and the p-type silicon layer comprise respective fingers, and
wherein the respective fingers are interdigitated above the top surface of the germanium layer.
17. The method of claim 11 , wherein the n-type silicon layer and the p-type silicon layer are formed as respective segments of a ring shape.
18. The method of claim 17 ,
wherein the segment of the p-type silicon layer has a greater width than the segment of the n-type silicon layer, and
wherein the segment of the p-type silicon layer overlaps the top surface of the germanium layer.
19. The method of claim 18 , wherein the germanium layer comprises a p-type germanium layer.
20. The method of claim 11 , wherein the metal contacts contact the periphery of the n-type silicon layer and the p-type silicon layer.