IP Library Granted Patent US 11,674,047
Granted Patent B2
US 11,674,047 · App. 16/774,454 · Granted Jun 13, 2023

Composition for manufacturing passivation layer and passivation layer using the same

Inventors: Eunhwa Jung (Chungcheongbuk-do, KR); Jinkuk Kim (Chungcheongbuk-do, KR); Hyoyeon Kim (Chungcheongbuk-do, KR); Seungsun Jang (Chungcheongbuk-do, KR); Bonggyu Kim (Chungcheongbuk-do, KR); Xudong Chen (Hockessin, DE)
Assignees: THE CHEMOURS COMPANY FC, LLC; NEPES CORPORATION
C09D127/12C08F8/34C08F214/188C08F230/08C09D127/18H01L21/02282H01L23/293H01L23/3171C08F2810/20C08K5/053C08K5/13C08K5/5419C08K2201/014
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Quick Facts
Patent No.
US 11,674,047
App. No.
16/774,454
Granted
Jun 13, 2023
Kind
B2
Abstract

The present invention relates to a composition for manufacturing a passivation layer, and specifically, to a composition for manufacturing a passivation layer and a passivation layer formed using the composition, which simultaneously exhibit effects such as a low dielectric constant, a low water absorption rate, excellent pattern formability, and excellent adhesion to an adherend surface.

Claims (40)

1. A composition for manufacturing a passivation layer, comprising:

a fluorocopolymer which is a random copolymer of monomers comprising a fluoroolefin-based compound, a vinyl ether-based compound, and a crosslinkable compound selected from the group consisting of silane-based compounds having at least one alkenyl group and epoxide-based compounds having at least one alkenyl group; and

a diol-based adhesion promoter.

2. The composition according to claim 1 , wherein the fluoroolefin-based compound is a compound represented by the following formula 1, the vinyl ether-based compound is a compound represented by the following formula 2, and the crosslinkable compound is a silane-based compound having at least one alkenyl group represented by the following formula 3:

wherein in formula 1, R 1 is a straight-chain perfluoroalkoxy group having 1 to 5 carbon atoms, a branched perfluoroalkoxy group having 3 to 5 carbon atoms, a straight-chain perfluoroalkyl group having 1 to 3 carbon atoms, H, F, or Cl,

wherein in formula 2, R 2 is a straight-chain alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 6 carbon atoms, a cyclic alkyl group having 3 to 6 carbon atoms, or a substituted or unsubstituted aryl group, and

wherein in formula 3, R 3 is an ethylenically unsaturated hydrocarbon radical, R 4 is aryl, aryl substituted hydrocarbon radical, branched alkoxy radical, substituted or unsubstituted cyclic alkoxy radical, branched alkyl radical, or substituted or unsubstituted 5 or 6 carbon cyclic alkyl radical, and R 5 and R 6 are independently selected from linear or branched alkoxy radical, or substituted or unsubstituted cyclic alkoxy radical.

3. The composition according to claim 1 , wherein the fluoroolefin-based compound is a compound represented by the following formula 1, the vinyl ether-based compound is a compound represented by the following formula 2, and the crosslinkable compound is a silane-based compound having at least one alkenyl group represented by the following formula 3:

wherein in formula 1, R 1 is a straight-chain perfluoroalkoxy group having 1 to 5 carbon atoms, a branched perfluoroalkoxy group having 3 to 5 carbon atoms, a straight-chain perfluoroalkyl group having 1 to 3 carbon atoms, H, F, or Cl,

wherein in formula 2, R 2 is a straight-chain alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 6 carbon atoms, a cyclic alkyl group having 3 to 6 carbon atoms, or a substituted or unsubstituted aryl group, and

wherein in formula 3, R 3 is an ethylenically unsaturated hydrocarbon radical having 2 to 5 carbon atoms, R 4 is aryl, aryl substituted hydrocarbon radical, branched alkoxy radical having 3 to 6 carbon atoms, substituted or unsubstituted 5 or 6 carbon cyclic alkoxy radical, branched alkyl radical having 3 to 6 carbon atoms, or substituted or unsubstituted 5 or 6 carbon cyclic alkyl radical, and R 4 and R 5 are independently selected from linear or branched alkoxy radical having 1 to 6 carbon atoms, or substituted or unsubstituted 5 or 6 carbon cyclic alkoxy radical.

4. The composition according to claim 1 , wherein the fluoroolefin-based compound is a compound represented by the following formula 1, the vinyl ether-based compound is a compound represented by the following formula 2, and the crosslinkable compound is an epoxide-based compound having at least one alkenyl group represented by the following formula 4:

wherein in formula 1, R 1 is a straight-chain perfluoroalkoxy group having 1 to 5 carbon atoms, a branched perfluoroalkoxy group having 3 to 5 carbon atoms, a straight-chain perfluoroalkyl group having 1 to 3 carbon atoms, H, F, or Cl,

wherein in formula 2, R 2 is a straight-chain alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 6 carbon atoms, a cyclic alkyl group having 3 to 6 carbon atoms, or a substituted or unsubstituted aryl group, and

wherein in formula 4, R 7 is an alkenyl group having 2 to 5 carbon atoms, or an acrylate group represented by the formula —R 8 —O—C(═O)—CR 9 ═CH 2 , wherein R 8 is an alkylene radical having 1 to 5 carbon atoms and R 9 is hydrogen or methyl.

5. The composition according to claim 1 , wherein said diol-based adhesion promoter is selected from the group consisting of 1,n-hydrocarbon diols, wherein n is from 2 to 6, and alkyl substituted 1,2-benzenediols.

6. The composition according to claim 1 , wherein said diol-based adhesion promoter is selected from the group consisting of 4-tert-butylbenzene-1,2-diol, hexane-1,6-diol, and 1,3-butylene glycol.

7. The composition according to claim 1 further comprising a thiol-based adhesion promoter.

8. The composition according to claim 7 , wherein the thiol-based adhesion promoter is one or more selected from the group consisting of sulfur functionalized carboxylic acids, sulfur functionalized alcohols, and sulfur functionalized silanes, and the diol-based adhesion promoter is one or more selected from the group consisting of 1,n-hydrocarbon diols, wherein n is from 2 to 6, and alkyl substituted 1,2-benzenediols.

9. The composition according to claim 7 , wherein the thiol-based adhesion promoter is one or more selected from the group consisting of 3-(triethoxysilyl) propanethiol (MPTES), 6-mercapto-1-hexanol, 3-mercaptopropionic acid, 11-mercapto-1-undecanol, and 3-(trimethoxysilyl) propanethiol (MPTMS), and the diol-based adhesion promoter is one or more selected from the group consisting of 4-tert-butylbenzene-1,2-diol, hexane-1,6-diol, and 1,3-butylene glycol.

10. The composition according to claim 7 , wherein the weight ratio of the thiol-based adhesion promoter to the diol-based adhesion promoter is from 1:0.5 to 3.5.

11. The composition according to claim 1 , comprising 0.5 to 3.5 parts by weight of the diol-based adhesion promoter based on 100 parts by weight of the fluorocopolymer.

12. The composition according to claim 1 , further comprising 0.1 to 5 parts by weight of a photo acid generator (PAG) based on 100 parts by weight of the fluorocopolymer.

13. The composition according to claim 1 , further comprising 150 to 450 parts by weight of a solvent based on 100 parts by weight of the fluorocopolymer.

14. The composition according to claim 1 , further comprising 0.05 to 5 parts by weight of a photosensitizer (PS) based on 100 parts by weight of the fluorocopolymer.

15. A composition for manufacturing a passivation layer, comprising:

a fluorocopolymer which is a random copolymer of monomers comprising a fluoroolefin-based compound, a vinyl ether-based compound, and a crosslinkable compound selected from the group consisting of silane-based compounds having at least one alkenyl group and epoxide-based compounds having at least one alkenyl group; and

a thiol-based adhesion promoter selected from the group consisting of 3-(triethoxysilyl) propanethiol (MPTES), 6-mercapto-1-hexanol, 3-mercaptopropionic acid, 11-mercapto-1-undecanol, and 3-(trimethoxysilyl) propanethiol (MPTMS).

16. The composition according to claim 15 , wherein the fluoroolefin-based compound is a compound represented by the following formula 1, the vinyl ether-based compound is a compound represented by the following formula 2, and the crosslinkable compound is a silane-based compound having at least one alkenyl group represented by the following formula 3:

wherein in formula 1, R 1 is a straight-chain perfluoroalkoxy group having 1 to 5 carbon atoms, a branched perfluoroalkoxy group having 3 to 5 carbon atoms, a straight-chain perfluoroalkyl group having 1 to 3 carbon atoms, H, F, or Cl,

wherein in formula 2, R 2 is a straight-chain alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 6 carbon atoms, a cyclic alkyl group having 3 to 6 carbon atoms, or a substituted or unsubstituted aryl group, and

wherein in formula 3, R 3 is an ethylenically unsaturated hydrocarbon radical, R 4 is aryl, aryl substituted hydrocarbon radical, branched alkoxy radical, substituted or unsubstituted cyclic alkoxy radical, branched alkyl radical, or substituted or unsubstituted 5 or 6 carbon cyclic alkyl radical, and R 5 and R 6 are independently selected from linear or branched alkoxy radical, or substituted or unsubstituted cyclic alkoxy radical.

17. The composition according to claim 15 , wherein the fluoroolefin-based compound is a compound represented by the following formula 1, the vinyl ether-based compound is a compound represented by the following formula 2, and the crosslinkable compound is a silane-based compound having at least one alkenyl group represented by the following formula 3:

wherein in formula 1, R 1 is a straight-chain perfluoroalkoxy group having 1 to 5 carbon atoms, a branched perfluoroalkoxy group having 3 to 5 carbon atoms, a straight-chain perfluoroalkyl group having 1 to 3 carbon atoms, H, F, or Cl,

wherein in formula 2, R 2 is a straight-chain alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 6 carbon atoms, a cyclic alkyl group having 3 to 6 carbon atoms, or a substituted or unsubstituted aryl group, and

wherein in formula 3, R 3 is an ethylenically unsaturated hydrocarbon radical having 2 to 5 carbon atoms, R 4 is aryl, aryl substituted hydrocarbon radical, branched alkoxy radical having 3 to 6 carbon atoms, substituted or unsubstituted 5 or 6 carbon cyclic alkoxy radical, branched alkyl radical having 3 to 6 carbon atoms, or substituted or unsubstituted 5 or 6 carbon cyclic alkyl radical, and R 4 and R 5 are independently selected from linear or branched alkoxy radical having 1 to 6 carbon atoms, or substituted or unsubstituted 5 or 6 carbon cyclic alkoxy radical.

18. The composition according to claim 15 , wherein the fluoroolefin-based compound is a compound represented by the following formula 1, the vinyl ether-based compound is a compound represented by the following formula 2, and the crosslinkable compound is an epoxide-based compound having at least one alkenyl group represented by the following formula 4:

wherein in formula 1, R 1 is a straight-chain perfluoroalkoxy group having 1 to 5 carbon atoms, a branched perfluoroalkoxy group having 3 to 5 carbon atoms, a straight-chain perfluoroalkyl group having 1 to 3 carbon atoms, H, F, or Cl,

wherein in formula 2, R 2 is a straight-chain alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 6 carbon atoms, a cyclic alkyl group having 3 to 6 carbon atoms, or a substituted or unsubstituted aryl group, and

wherein in formula 4, R 7 is an alkenyl group having 2 to 5 carbon atoms, or an acrylate group represented by the formula —R 8 —O—C(═O)—CR 9 ═CH 2 , wherein R 8 is an alkylene radical having 1 to 5 carbon atoms and R 9 is hydrogen or methyl.

Assignments (2)
PATENT SECURITY AGREEMENT Recorded May 7, 2020
From: THE CHEMOURS COMPANY FC, LLC
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 052598/0572 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 28, 2020
From: JUNG, EUNHWA; KIM, JINKUK; KIM, HYOYEON; JANG, SEUNGSUN; KIM, BONGGYU; CHEN, XUDONG
To: THE CHEMOURS COMPANY FC, LLC; NEPES CORPORATION
Reel/Frame 051645/0832 →
Continuity (2)
Provisional Application 62797552 · Jan 28, 2019
Related Publication 20200239724A1 · Jul 30, 2020