Semiconductor device and method of manufacturing same
View Patent ↗A semiconductor device includes a semiconductor part; first and second electrodes, the semiconductor part being provided between the first and second electrodes; a control electrode selectively provided between the semiconductor part and the second electrode; and a contacting part electrically connecting the semiconductor part and the second electrode. The semiconductor part includes a first layer of a first conductivity type, a second layer of a second conductivity type provided between the first layer and the second electrode, a third layer of the first conductivity type selectively provided between the second layer and the second electrode, and a fourth layer of the second conductivity type selectively provided between the second layer and the second electrode. The contacting part includes a first semiconductor portion of the first conductivity type contacting the third layer, and a second semiconductor portion of the second conductivity type contacting the fourth layer.
1. A method of manufacturing a semiconductor device, comprising:
forming an insulating film on a semiconductor wafer, the insulating film having a contact hole;
forming a semiconductor portion filling the contact hole, the semiconductor portion including at least one element of platinum (Pt), ruthenium (Rh), palladium (Pd), osmium (Os), iridium (Ir), or gold (Au); and
diffusing the at least one element inside the semiconductor wafer from the semiconductor portion.
2. The method according to claim 1 , further comprising:
forming a metal film covering the insulating film and the semiconductor portion, the metal film including the at least one element; and
diffusing the at least one element inside the semiconductor portion.
3. The method according to claim 2 , further comprising:
forming a silicide region including the at least one element on the semiconductor portion,
wherein the at least one element is diffused into the semiconductor portion from the silicide region.
4. The method according to claim 1 , wherein the semiconductor portion is removed after the diffusing of the at least one element inside the semiconductor wafer.
5. The method according to claim 1 , further comprising:
selectively forming another insulating film on the insulating film; and
forming a metal film covering the insulating film, the metal film including the at least one element, wherein
a plurality of the contact holes and a plurality of the semiconductor portions are provided in the insulating film, the plurality of semiconductor portions including a first semiconductor portion and a plurality of second semiconductor portions, the second semiconductor portions being provided around the first semiconductor portion;
the another insulating film covers the second semiconductor portions and a portion of the insulating film around the second semiconductor portions;
the metal film is in contact with the first semiconductor portion; and
the at least one element is selectively diffused into the first semiconductor portion.
6. The method according to claim 5 , wherein
the metal film covers the insulating film and the another insulating film, and
the metal film is in contact with the first semiconductor portion and the another insulating film on the second semiconductor portions.
7. The method according claim 1 , wherein
the at least one element is ion-implanted into the semiconductor portion, and is diffused into the semiconductor wafer by performing heat treatment of the semiconductor wafer.