Active matrix substrate and liquid crystal display device
An active matrix substrate includes: a signal line provided in an image display region; and a terminal provided in a frame region and electrically connected to the signal line. The terminal includes: a metal layer; a first contact layer located closer to one side in a lamination direction than the metal layer, and electrically connected to the metal layer, a first interlayer insulating layer located closer to the one side in the lamination direction than the first contact layer; and a second contact layer located closer to the one side in the lamination direction than the first interlayer insulating layer, and electrically connected to the first contact layer through a first through-hole formed in the first interlayer insulating layer. The first contact layer is made of a transparent metal oxide or a semiconductor material doped with impurities.
1. An active matrix substrate having an image display region made up of pixels, and a frame region surrounding the image display region, the active matrix substrate comprising:
pixel electrodes respectively provided in the pixels;
a common electrode facing one or more of the pixel electrodes;
a signal line provided in the image display region; and
a terminal provided in the frame region and electrically connected to the signal line,
wherein the terminal includes:
a metal layer,
a first contact layer located closer to one side in a lamination direction than the metal layer, and electrically connected to the metal layer,
a first interlayer insulating layer located closer to the one side in the lamination direction than the first contact layer,
a second contact layer located closer to the one side in the lamination direction than the first interlayer insulating layer, and electrically connected to the first contact layer through a first through-hole formed in the first interlayer insulating layer, and
a second interlayer insulating layer located between the metal layer and the first contact layer,
wherein further
the first contact layer is made of a transparent metal oxide or a semiconductor material doped with impurities,
the first contact layer is electrically connected to the metal layer through a second through-hole formed in the second interlayer insulating layer, and
in a top view of the active matrix substrate, the first through-hole and the second through-hole do not overlap with each other.
2. The active matrix substrate according to claim 1 , wherein the first contact layer is in contact with the metal layer at least in the second through-hole.
3. The active matrix substrate according to claim 1 , wherein the terminal further includes a second metal layer located between the first contact layer and the second contact layer, and wherein further
the second metal layer is in contact with the second contact layer at least in the first through-hole, and
the second metal layer is in contact with the first contact layer at least in the second through-hole.
4. The active matrix substrate according to claim 1 , wherein
the first interlayer insulating layer is made up of a plurality of laminated insulating films, and
the second interlayer insulating layer is made up of a plurality of laminated insulating films.
5. The active matrix substrate according to claim 1 , wherein
the first contact layer is formed in the same layer as the common electrode,
the second contact layer is formed in the same layer as the pixel electrode, and
the metal layer is formed in the same layer as the signal line.
6. The active matrix substrate according to claim 1 , further comprising transistors respectively provided in the pixels,
wherein the metal layer is formed in the same layer as a source electrode and a drain electrode of the transistor.
7. The active matrix substrate according to claim 1 , wherein
the active matrix substrate has a data line as one of the signal lines, and
the terminal is a source terminal.
8. The active matrix substrate according to claim 1 , wherein
the active matrix substrate has a gate line as one of the signal lines, and
the terminal is a gate terminal.
9. The active matrix substrate according to claim 1 , wherein
a plurality of the common electrodes are provided,
the plurality of the common electrodes respectively face one or more of the pixel electrodes,
the active matrix substrate has, as the signal line, a touch line connected to a corresponding one of the plurality of the common electrodes, and
the terminal is a touch terminal for supplying a signal to the touch line.
10. The active matrix substrate according to claim 3 , wherein
a plurality of the common electrodes respectively face one or more of the pixel electrodes,
the active matrix substrate has, as the signal line, a touch line connected to a corresponding one of the plurality of the common electrodes, and
the second metal layer is formed in the same layer as the touch line.
11. The active matrix substrate according to claim 3 , wherein
the common electrode is formed across the plurality of pixels,
the active matrix substrate further comprises a common line that is provided above the common electrode and to which a common potential is applied,
the first contact layer is formed in the same layer as the common electrode, and
the second metal layer is formed in the same layer as the common line.
12. A liquid crystal display device comprising the active matrix substrate according to claim 1 .
13. The liquid crystal display device according to claim 12 , wherein
the liquid crystal display device is an in-cell touch panel in which the pixels are arranged in a first direction and a second direction orthogonal to the first direction, the liquid crystal display device comprising:
transistors and pixel electrodes respectively provided in the pixels;
gate lines, data lines, and touch lines provided as the signal line; and
a terminal portion provided in the frame region,
the common electrodes are arranged in the first direction and the second direction, respectively face one or more of the pixel electrodes, and are provided separately from each other,
the gate lines extend along the first direction and supply gate signals to the transistors respectively,
the data lines extend along the second direction and supply data signals to the transistors respectively,
the touch lines extend along the second direction and are each connected to a corresponding one of the common electrodes,
the terminal portion includes, as the terminal, touch terminal electrodes electrically connected to the touch lines respectively,
the touch lines include a first touch line and a second touch line,
the touch terminal electrodes include a first touch terminal electrode electrically connected to the first touch line via a first touch relay wiring, and a second touch terminal electrode electrically connected to the second touch line via a second touch relay wiring,
the first touch relay wiring includes a first relay wiring portion formed in a different layer from the first touch line and the first touch terminal electrode, and
the second touch relay wiring includes a first relay wiring portion formed in a different layer from the second touch line and the second touch terminal electrode and formed in a different layer from the first relay wiring portion of the first touch relay wiring.
14. The liquid crystal display device according to claim 13 , wherein
the first relay wiring portion of the first touch relay wiring is formed in the same layer as the gate lines, and
the first relay wiring portion of the second touch relay wiring is formed in the same layer as the data lines.
15. The liquid crystal display device according to claim 14 , wherein
the first touch relay wiring includes a second relay wiring portion provided in a wiring path between the first touch line and the first relay wiring portion of the first touch relay wiring,
the second touch relay wiring includes a second relay wiring portion provided in a wiring path between the second touch line and the first relay wiring portion of the second touch relay wiring,
the second relay wiring portion of the first touch relay wiring and the second relay wiring portion of the second touch relay wiring are formed in the same layer as the pixel electrodes,
the first touch relay wiring includes
a third relay wiring portion provided in a wiring path between the second relay wiring portion and the first relay wiring portion of the first touch relay wiring, and
a fourth relay wiring portion provided in a wiring path between the first relay wiring portion of the first touch relay wiring and the first touch terminal electrode, and
the third relay wiring portion and the fourth relay wiring portion are formed in the same layer as the data lines.
16. An active matrix substrate having an image display region made up of pixels, and a frame region surrounding the image display region, the active matrix substrate comprising:
pixel electrodes respectively provided in the pixels;
a common electrode facing one or more of the pixel electrodes;
a signal line provided in the image display region; and
a terminal provided in the frame region and electrically connected to the signal line,
wherein the terminal includes:
a metal layer,
a first contact layer located closer to one side in a lamination direction than the metal layer, and electrically connected to the metal layer,
a first interlayer insulating layer located closer to the one side in the lamination direction than the first contact layer,
a second contact layer located closer to the one side in the lamination direction than the first interlayer insulating layer, and electrically connected to the first contact layer through a first through-hole formed in the first interlayer insulating layer,
a second interlayer insulating layer located between the metal layer and the first contact layer, and
a second metal layer located between the first contact layer and the second contact layer,
the first contact layer is electrically connected to the metal layer through a second through-hole formed in the second interlayer insulating layer,
the first contact layer is made of a transparent metal oxide or a semiconductor material doped with impurities,
the second metal layer is in contact with the second contact layer at least in the first through-hole, and
the second metal layer is in contact with the first contact layer at least in the second through-hole.
17. The active matrix substrate according to claim 16 , wherein
the common electrode is formed across the plurality of pixels,
the active matrix substrate further comprises a common line that is provided above the common electrode and to which a common potential is applied,
the first contact layer is formed in the same layer as the common electrode, and
the second metal layer is formed in the same layer as the common line.