Semiconductor device
A semiconductor device includes a lead frame having a die pad; a semiconductor chip having a front surface in which an integrated circuit is formed, and a back surface that is die-bonded onto the die pad through intermediation of an interposing film and an adhesive layer; and an encapsulating resin for encapsulating the lead frame, the adhesive layer, the interposing film, and the semiconductor chip. The interposing film has a first opening which forms a space between a part of the back surface of the semiconductor chip and the adhesive layer.
1. A semiconductor device, comprising:
a lead frame having a die pad;
a semiconductor chip having a front surface in which an integrated circuit is formed, and a back surface on which an interposing film is formed, a back surface of the interposing film that is die-bonded onto the die pad by an adhesive layer; and
an encapsulating resin for encapsulating the lead frame, the adhesive layer, the interposing film, and the semiconductor chip,
wherein the interposing film has a first opening which forms a space between a part of the back surface of the semiconductor chip and the adhesive layer.
2. The semiconductor device according to claim 1 , wherein the adhesive layer is a die attach film.
3. The semiconductor device according to claim 1 , wherein, in plan view, the first opening overlaps at least a part of an element or circuit section that is most liable to vary in characteristic value due to stress among element or circuit sections forming the integrated circuit.
4. The semiconductor device according to claim 2 , wherein the interposing film has a plurality of second openings formed in regions other than a region of the first opening so that a plurality of spaces is formed between the back surface of the semiconductor chip and the die attach film.
5. The semiconductor device according to claim 1 , wherein the interposing film includes any one of polyimide, a silicon oxide film, a silicon nitride film, an alloy containing aluminum as a main component, copper, and polysilicon.
6. The semiconductor device according to claim 2 , wherein, in plan view, the first opening overlaps at least a part of an element or circuit section that is most liable to vary in characteristic value due to stress among element or circuit sections forming the integrated circuit.
7. The semiconductor device according to claim 3 , wherein the first opening surrounds an entirety of the element or circuit section in plan view.
8. The semiconductor device according to claim 3 , wherein the element or circuit section is any one of a sensor element, a reference voltage circuit, a bleeder resistor, and a comparator.
9. The semiconductor device according to claim 3 ,
wherein the element or circuit section is arranged substantially at a center of the front surface of the semiconductor chip, and
wherein the first opening is formed in the back surface of the semiconductor chip at a position corresponding to a position of the element or circuit section.
10. The semiconductor device according to claim 6 , wherein the first opening surrounds an entirety of the element or circuit section in plan view.
11. The semiconductor device according to claim 6 , wherein the element or circuit section is any one of a sensor element, a reference voltage circuit, a bleeder resistor, and a comparator.
12. The semiconductor device according to claim 6 ,
wherein the element or circuit section is arranged substantially at a center of the front surface of the semiconductor chip, and
wherein the first opening is formed in the back surface of the semiconductor chip at a position corresponding to a position of the element or circuit section.
13. The semiconductor device according to claim 9 ,
wherein the adhesive layer is a die attach film,
wherein the interposing film further has a plurality of second openings having substantially the same shape and substantially the same size as the first opening, the plurality of second openings being formed around the first opening so that a plurality of spaces is formed between the back surface of the semiconductor chip and the die attach film, and
wherein the first opening and the plurality of second openings are uniformly arranged.
14. The semiconductor device according to claim 12 ,
wherein the interposing film further has a plurality of second openings having substantially the same shape and substantially the same size as the first opening, the plurality of second openings being formed around the first opening so that a plurality of spaces is formed between the back surface of the semiconductor chip and the die attach film, and
wherein the first opening and the plurality of second openings are uniformly arranged.