Magnetic substance detection sensor
A magnetic substance detection sensor includes a support substrate, a semiconductor chip provided on the support substrate and having a magnetic field detection element, a permanent magnet provided on the support substrate, and a resin encapsulation layer covering the semiconductor chip and the permanent magnet. The resin encapsulation layer has a first resin layer exposing the permanent magnet and covering the semiconductor chip, and a second resin layer continuously covering the permanent magnet and the first resin layer, and stress caused by curing contraction of the second resin layer is smaller than that of the first resin layer.
1. A magnetic substance detection sensor, comprising:
a support substrate;
a semiconductor chip provided on the support substrate and having a magnetic field detection element;
a permanent magnet provided on the support substrate; and
a resin encapsulation layer covering the semiconductor chip and the permanent magnet,
wherein the resin encapsulation layer comprises a first resin layer exposing the permanent magnet and covering the semiconductor chip, and a second resin layer continuously covering the permanent magnet and the first resin layer, and
wherein stress caused by curing contraction of the second resin layer is smaller than that of the first resin layer.
2. The magnetic substance detection sensor according to claim 1 , wherein a glass transition temperature of the first resin layer is higher than that of the second resin layer.
3. The magnetic substance detection sensor according to claim 1 , wherein an elastic modulus of the first resin layer is larger than that of the second resin layer.
4. The magnetic substance detection sensor according to claim 1 , wherein the permanent magnet is disposed in a recess provided in the support substrate.
5. The magnetic substance detection sensor according to claim 1 , wherein the second resin layer further covers a rear surface of the support substrate on which the first resin layer and the permanent magnet are not provided.
6. The magnetic substance detection sensor according to claim 1 , wherein the support substrate is formed of the same material as that of the second resin layer.