IP Library Granted Patent US 11,933,942
Granted Patent B2
US 11,933,942 · App. 16/820,338 · Granted Mar 19, 2024

Non-line-of-sight deposition of coating on internal components of assembled device

Inventors: Alexander Berger (Palo Alto, CA); Cheng-Hsuan Chou (Santa Clara, CA); David Knapp (Santa Clara, CA)
Assignee: Applied Materials, Inc.
G02B1/14B05D1/60B05D7/22C23C16/045G02B3/00
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Quick Facts
Patent No.
US 11,933,942
App. No.
16/820,338
Filed
Mar 16, 2020
Granted
Mar 19, 2024
Kind
B2
Art Unit
1782
USPC
428/409
Abstract

Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including one or more internal components enclosed within the assembled device and a coating deposited onto a surface of the internal components enclosed within the assembled device, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.

Claims (18)

1. An article comprising:

an optical encoder comprising:

a plurality of internal components enclosed within the optical encoder;

a wall including one or more openings that expose the plurality of internal components to an exterior environment of the optical encoder during operation of the optical encoder;

an optical window in the wall of the optical encoder, wherein the optical window is configured to transmit light between the exterior environment of the optical encoder and an interior environment of the optical encoder during the operation of the optical encoder,

wherein one or more surfaces of the optical window in the wall of the optical window are covered by a mask during a coating process for the optical encoder; and

a coating that is deposited, by the coating process, onto a surface of each of the plurality of internal components enclosed within the optical encoder and each exterior surface of the optical encoder that is not covered by the mask, wherein the coating is deposited onto the surface of each of the plurality of internal components via the one or more openings of the optical encoder and without altering a structure of the optical encoder and the wall, and wherein the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-based acids, chlorine-based acids, sulfur-based acids, hydrogen-based acids, bromine-based acids, or nitrogen-based acids and that does not negatively impact a functionality of the plurality of internal components.

2. The article of claim 1 , wherein the coating comprises a poly(p-xylylene) polymer coating.

3. The article of claim 2 , wherein the coating comprises Parylene C.

4. The article of claim 1 , wherein the plurality of internal components comprise one or more optical components.

5. The article of claim 4 , wherein the one or more optical components comprise at least one of an optical lens or a laser head.

6. The article of claim 1 , wherein the coating has an approximately uniform thickness of between about 0.1 microns to about 20 microns, and wherein the coating coats an entire interior of the optical encoder.

7. The article of claim 1 , wherein the coating has a thickness of between about 4 microns to about 5 microns.

8. An article comprising an optical encoder comprising a plurality of internal components that are enclosed within an interior of the optical encoder, a wall including one or more openings that expose the plurality of internal components during operation of the optical encoder, an optical window in the wall of the optical encoder, wherein the optical window transmits light between an external environment of the optical encoder and an interior environment of the optical encoder during the operation of the optical encoder, and a coating that is deposited onto a surface of each of the plurality of internal components enclosed within the optical encoder without altering a structure of the optical encoder and the wall, wherein the coating is a conformal, optically transparent coating, the article having been manufactured by a process comprising:

loading the optical encoder into a deposition chamber, wherein the loaded optical encoder comprises a mask covering one or more surfaces of the optical window; and

depositing the coating onto the surface of each of the plurality of internal components using a non-line-of-sight deposition process without altering the structure of the optical encoder or impacting functionality of the optical encoder, wherein depositing the coating onto the surface of the internal components comprises injecting a precursor for the coating into the deposition chamber, wherein the precursor penetrates an exterior of the optical encoder through the one or more openings of the optical encoder that expose the interior of the optical encoder to an external environment, and wherein the coating is deposited on each surface of the optical encoder that is not covered by the mask.

9. The article of claim 8 , wherein depositing the coating onto the surface of the internal components comprises performing a chemical vapor deposition process of a poly(p-xylylene) polymer in a vacuum; and

the coating comprises a poly(p-xylylene) polymer coating.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 17, 2020
From: BERGER, ALEXANDER; CHOU, CHENG-HSUAN; KNAPP, DAVID
To: APPLIED MATERIALS, INC.
Reel/Frame 052138/0958 →
Continuity (2)
Provisional Application 62823540 · Mar 25, 2019
Related Publication 20200310001A1 · Oct 1, 2020
Cited By (1)
US 12,693,449