Semiconductor optical amplifier, optical output device, and distance measuring device
A semiconductor optical amplifier includes: a substrate; a light source unit formed on the substrate; and an optical amplification part that amplifies light propagating in a predetermined direction from the light source unit and emits the amplified light in an emission direction intersecting with the substrate surface. The optical amplification part includes a conductive region extending in the predetermined direction along the substrate surface from the light source unit, and a nonconductive region formed around the conductive region. The conductive region includes a first region extending from the light source unit and having a predetermined width as seen from a direction perpendicular to the substrate surface, and a second region connected to the first region and having a width widened relative to the predetermined width of the first region, the second region being configured to expand the propagation light in a direction intersecting with the predetermined direction.
1. A semiconductor optical amplifier comprising:
a substrate having a substrate surface;
a light source disposed on the substrate; and
an optical amplifier that amplifies light propagating in a predetermined direction from the light source and emits, from a light emitting surface parallel to the substrate surface, the amplified light in an emission direction intersecting with the substrate surface, the optical amplifier including:
a conductive region extending in the predetermined direction along the substrate surface from the light source, the conductive region including:
a first region extending from the light source in the predetermined direction and having a predetermined width as seen from a direction perpendicular to the substrate surface; and
a second region connected to the first region and having a width widened relative to the predetermined width of the first region, the second region being configured to expand the light in a direction intersecting with the predetermined direction, the second region having an interior in which the light is reflected; and
a nonconductive region disposed around the conductive region,
wherein the predetermined direction and the direction intersecting the predetermined direction both intersect the emission direction in which the light is emitted from the light emitting surface.
2. The semiconductor optical amplifier according to claim 1 , wherein
the width of the second region varies, in a tapered shape, from the predetermined width of the first region.
3. The semiconductor optical amplifier according to claim 2 , wherein
the second region has a rectangular shape as seen from the direction perpendicular to the substrate surface.
4. The semiconductor optical amplifier according to claim 1 , further comprising:
a first semiconductor multi-layer reflector of a first conductivity type disposed on the substrate;
an active region disposed on the first semiconductor multi-layer reflector; and
a second semiconductor multi-layer reflector of a second conductivity type disposed on the active region, wherein
the nonconductive region is an oxidized region or an ion-implanted region disposed at a part of at least one of the first semiconductor multi-layer reflector and the second semiconductor multi-layer reflector.
5. The semiconductor optical amplifier according to claim 2 , further comprising:
a first semiconductor multi-layer reflector of a first conductivity type disposed on the substrate;
an active region disposed on the first semiconductor multi-layer reflector; and
a second semiconductor multi-layer reflector of a second conductivity type disposed on the active region, wherein
the nonconductive region is an oxidized region or an ion-implanted region disposed at a part of at least one of the first semiconductor multi-layer reflector and the second semiconductor multi-layer reflector.
6. The semiconductor optical amplifier according to claim 3 , further comprising:
a first semiconductor multi-layer reflector of a first conductivity type disposed on the substrate;
an active region disposed on the first semiconductor multi-layer reflector; and
a second semiconductor multi-layer reflector of a second conductivity type disposed on the active region, wherein
the nonconductive region is an oxidized region or an ion-implanted region disposed at a part of at least one of the first semiconductor multi-layer reflector and the second semiconductor multi-layer reflector.
7. The semiconductor optical amplifier according to claim 4 , wherein
the semiconductor optical amplifier has a mesa structure extending to at least a lower part of the second semiconductor multi-layer reflector, and
the semiconductor optical amplifier has a profile at least partly along the second region.
8. The semiconductor optical amplifier according to claim 5 , wherein
the semiconductor optical amplifier has a mesa structure extending to at least a lower part of the second semiconductor multi-layer reflector, and
the semiconductor optical amplifier has a profile at least partly along the second region.
9. The semiconductor optical amplifier according to claim 6 , wherein
the semiconductor optical amplifier has a mesa structure extending to at least a lower part of the second semiconductor multi-layer reflector, and
the semiconductor optical amplifier has a profile at least partly along the second region.
10. The semiconductor optical amplifier according to claim 1 , further comprising:
an electrode disposed above the nonconductive region, at least partly along the conductive region.
11. The semiconductor optical amplifier according to claim 10 , wherein
the electrode covers at least a part of the second region.
12. An optical output device comprising:
the semiconductor optical amplifier according to claim 1 ; and
a light condenser that condenses light emitted from the semiconductor optical amplifier.
13. A distance measuring device comprising:
the semiconductor optical amplifier according to claim 1 ;
a photo sensor that receives reflected light emitted from the semiconductor optical amplifier and reflected from an object to be measured; and
a sensor that measures distance to the object based on the reflected light received by the photo sensor.