Microelectromechanical systems vibration sensor

1. A microelectromechanical systems (MEMS) vibration sensor die comprising:

a substrate having a top portion, a mounting surface, and an aperture extending at least partially through the substrate;

a plurality of posts protruding from the mounting surface of the substrate, the plurality of posts formed integrally with the substrate;

an adhesive surrounding a periphery of each post of the plurality of posts;

a first electrode coupled to the top portion of the substrate and positioned over the aperture;

a second electrode disposed between the substrate and the first electrode, where the second electrode is spaced apart from the first electrode;

a proof mass having:

a first portion coupled to the first electrode or the second electrode; and

a second end opposite the first portion, the second end recessed within the aperture relative to the mounting surface of the substrate,

wherein the proof mass is suspended freely within the aperture, and wherein the proof mass moves the first electrode or the second electrode from which it is suspended in response to vibration.

2. The die according to claim 1 further comprising a lateral support member adjacent the proof mass, wherein the lateral support member limits movement of the proof mass in a direction non-parallel to a direction of movement of the first or second electrode to which the proof mass is coupled.

3. The die according to claim 2 further comprising a plurality of protrusions, the plurality of protrusions extending from the substrate toward the proof mass or from the proof mass toward the substrate, wherein the lateral support member is a part of the substrate from which the protrusions extend or a part of the substrate toward which the protrusions extend from the proof mass.

4. The die according to claim 3 , wherein the proof mass has a hollow portion and the substrate substantially surrounds the proof mass, where the hollow portion extends throughout the proof mass from the first portion to the second end, where the hollow portion has a width in a direction parallel to the mounting surface, where the width is constant from the first portion to the second end.

5. The die according to claim 3 in combination with:

a base portion of a MEMS sensor housing, the mounting surface of the substrate mounted on the base portion and the aperture extends fully through the substrate, and the proof mass disposed between the base portion and the first electrode; and

a displacement-limiting support member coupled to the base portion, the displacement-limiting support member located beneath and spaced apart from the proof mass, wherein the displacement-limiting support member limits displacement of the proof mass in a direction of movement of the first or second electrode to which the proof mass is coupled.

6. The combination according to claim 5 ,

wherein the adhesive couples the mounting surface of the substrate to the base portion, and

wherein the posts are embedded in the adhesive and disposed between the substrate and the base portion.

7. The combination according to claim 6 further comprising:

a MEMS sensor housing comprising a lid mounted on the base portion; and

an integrated circuit disposed in the housing, the integrated circuit electrically coupled to the vibration sensor and to electrical contacts on a surface-mount interface disposed on an external surface of the base portion.

8. The die according to claim 3 ,

wherein the aperture comprises a first aperture,

wherein the die is in combination with:

an acoustic sensor comprising:

a second aperture extending through a second portion of the substrate;

a first acoustic electrode coupled to the substrate and positioned over the second aperture; and

a second acoustic electrode disposed between the substrate and the first acoustic electrode, the second acoustic electrode spaced apart from the first acoustic electrode, and

wherein the first acoustic electrode or second acoustic electrode is movable relative to the other in response to sound.

9. The die according to claim 8 in combination with:

wherein the adhesive couples the mounting surface of the substrate to the base portion; and

wherein the posts are embedded in the adhesive and disposed between the substrate and the base portion.

10. The die according to claim 9 in combination with:

a MEMS sensor housing comprising a lid mounted on the base portion, the MEMS sensor housing having a sound port acoustically coupled to the second aperture of the substrate; and

an integrated circuit disposed in the housing, the integrated circuit electrically coupled to the acoustic sensor, to the vibration sensor, and to electrical contacts on a surface-mount interface disposed on an external surface of the base portion.

11. The die according to claim 1 further comprising a displacement-limiting support member coupled to the substrate, the displacement-limiting support member located beneath and spaced apart from the proof mass, wherein the displacement-limiting support member limits displacement of the proof mass in a direction of movement of the first or second electrode to which the proof mass is coupled.

12. The die according to claim 1 , wherein the die comprises a semiconductor.

13. A microelectromechanical systems (MEMS) vibration sensor die comprising:

a substrate having a top portion and a mounting surface;

an aperture extending at least partially through the substrate;

a plurality of posts protruding from the mounting surface of the substrate, the plurality of posts formed integrally with the substrate;

an adhesive surrounding a periphery of each post of the plurality of posts;

capacitive electrodes arranged in spaced apart relation and disposed on the top portion of the substrate, at least one of the capacitive electrodes coupled to the substrate; and

a proof mass coupled to one of the capacitive electrodes and suspended freely within the aperture, the proof mass substantially surrounded by the substrate and recessed relative to the mounting surface of the substrate,

wherein the proof mass moves the capacitive electrode from which it is suspended in response to vibration.

14. The die according to claim 13 further comprising a lateral support member comprising a plurality of protrusions, the plurality of protrusions extending from the substrate toward the proof mass or from the proof mass toward the substrate, wherein the lateral support member limits movement of the proof mass in a direction non-parallel to a direction of movement of the capacitive electrode to which the proof mass is coupled.

15. The die according to claim 14 ,

wherein the proof mass has a first end proximal to the electrodes and a second end distal from the electrodes, where the proof mass has a hollow portion that extends throughout the proof mass from the first end to the second end, and where the substrate substantially surrounds the proof mass, and

wherein the hollow portion has a width in a direction parallel to the mounting surface, where the width is constant from the first end to the second end.

16. The die according to claim 15 , wherein the die comprises a semiconductor material.