Bonding methods for light emitting diodes
Disclosed herein are techniques for bonding components of LEDs. According to certain embodiments, a device includes a first component having a semiconductor layer stack including an n-side semiconductor layer, an active light emitting layer, and a p-side semiconductor layer. A plurality of mesa shapes are formed within the n-side semiconductor layer, the active light emitting layer, and the p-side semiconductor layer. The semiconductor layer stack comprises a III-V semiconductor material. The device also includes a second component having a passive or an active matrix integrated circuit within a Si layer. A first dielectric material of the first component is bonded to a second dielectric material of the second component, first contacts of the first component are aligned with and bonded to second contacts of the second component, and a run-out between the first contacts and the second contacts is less than 200 nm.
1. A method comprising:
aligning a first component with a second component by:
aligning first contacts of the first component with second contacts of the second component,
wherein the first component comprises a semiconductor layer stack including an n-side semiconductor layer, an active light emitting layer, and a p-side semiconductor layer;
forming a plurality of mesa shapes within the n-side semiconductor layer, the active light emitting layer, and the p-side semiconductor layer;
performing hybrid bonding of the first component to the second component by:
performing dielectric bonding of a first dielectric material of the first component with a second dielectric material of the second component at a first temperature, and
subsequently performing metal bonding of the first contacts of the first component with the second contacts of the second component by annealing the first contacts and the second contacts at a second temperature, wherein the second temperature is higher than the first temperature; and
compensating a run-out between the first contacts and the second contacts, wherein:
compensating the run-out between the first contacts and the second contacts comprises, prior to performing hybrid bonding, forming a set of trenches,
the set of trenches comprises a plurality of first trenches through the semiconductor layer stack between adjacent mesa shapes of the plurality of mesa shapes or between groups of the plurality of mesa shapes,
the set of trenches further comprises a plurality of second trenches through at least part of a substrate on which the semiconductor layer stack is formed, and
the plurality of second trenches are at least partially aligned with the plurality of first trenches.
2. The method of claim 1 , wherein the second temperature is between 150° C. and 250° C.
3. The method of claim 1 , wherein:
the first component further comprises a reflector layer,
the plurality of first trenches are formed within the reflector layer, and
the plurality of first trenches extend across the reflector layer.
4. The method of claim 3 , wherein the plurality of first trenches extend from a surface of a substrate on which the semiconductor layer stack is formed to a surface of a substrate on the second component.
5. The method of claim 3 , wherein the reflector layer corresponds to n-contacts of the first component.
6. The method of claim 5 , wherein the first contacts are the n-contacts of the first component, and wherein the second contacts are corresponding n-contacts of the second component.
7. The method of claim 5 , wherein the first contacts are p-contacts of the first component, and wherein the second contacts are corresponding p-contacts of the second component.
8. A method comprising:
aligning a first component with a second component by:
aligning first contacts of the first component with second contacts of the second component,
wherein the first component comprises a semiconductor layer stack including an n-side semiconductor layer, an active light emitting layer, and a p-side semiconductor layer;
forming a plurality of mesa shapes within the n-side semiconductor layer, the active light emitting layer, and the p-side semiconductor layer;
performing hybrid bonding of the first component to the second component by:
performing dielectric bonding of a first dielectric material of the first component with a second dielectric material of the second component at a first temperature, and
subsequently performing metal bonding of the first contacts of the first component with the second contacts of the second component by annealing the first contacts and the second contacts at a second temperature, wherein the second temperature is higher than the first temperature; and
compensating a run-out between the first contacts and the second contacts, wherein:
compensating the run-out between the first contacts and the second contacts comprises, prior to performing hybrid bonding, forming a set of trenches between adjacent mesa shapes or between groups of mesa shapes,
the first component further comprises a reflector layer,
the set of trenches comprises a plurality of first trenches that are formed within the reflector layer, and
the plurality of first trenches extend across the reflector layer.
9. The method of claim 8 , wherein the second temperature is between 150° C. and 250° C.
10. The method of claim 8 , wherein the plurality of first trenches extend from a surface of a substrate on which the semiconductor layer stack is formed to a surface of a substrate on the second component.
11. The method of claim 8 , wherein the reflector layer corresponds to n-contacts of the first component.
12. The method of claim 11 , wherein the first contacts are the n-contacts of the first component, and wherein the second contacts are corresponding n-contacts of the second component.
13. The method of claim 11 , wherein the first contacts are p-contacts of the first component, and wherein the second contacts are corresponding p-contacts of the second component.