IP Library Granted Patent US 11,114,290
Granted Patent B1
US 11,114,290 · App. 16/868,783 · Granted Sep 7, 2021

Ion funnels and systems incorporating ion funnels

Inventors: Joshua A. Silveira (San Jose, CA); Eloy R. Wouters (San Jose, CA); Alexander A. Makarov (Bremen, DE); Mikhail G. Skoblin (Dolgoprudny, RU); Viacheslav I. Kozlovskiy (Chernogolovka, RU)
Assignees: THERMO FINNIGAN LLC; Thermo Fisher Scientific (Bremen) GmbH
H01J49/066H01J49/24
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Quick Facts
Patent No.
US 11,114,290
App. No.
16/868,783
Granted
Sep 7, 2021
Kind
B1
Abstract

An ion transport system comprises: (I) an ion transfer tube extending between an atmospheric-pressure ionization chamber and a partially evacuated chamber; and (II) an ion funnel within the chamber comprising: (1) an exit electrode that has an exit aperture configured to deliver the gas and charged particles to a high-vacuum chamber; and (2) a funnel portion comprising a plurality of plate electrodes configured as a stack, each electrode comprising a respective aperture, wherein an aperture diameter of each of the plurality of electrodes is greater than or equal to three times an inter-electrode pitch and wherein no DC electrical potential gradient is applied between the exit electrode and an adjacent one of the plurality of plate electrodes.

Claims (37)

1. An atmosphere-to-vacuum ion transport system comprising:

an ion transfer tube extending between an atmospheric-pressure ionization chamber and a partially evacuated chamber;

an ion tunnel within the partially evacuated chamber configured to receive gas and charged particles from the ion transfer tube, comprising:

a first plurality of plate electrodes configured as a stack, each electrode of the first plurality of electrodes having an aperture therein, all apertures of the first plurality of electrodes having a same diameter, θ T ; and

an ion funnel within the partially evacuated chamber configured to receive the charged particles from the ion tunnel, comprising:

a first funnel portion comprising a second plurality of plate electrodes configured as a stack, each electrode of the second plurality of electrodes comprising an aperture therein, each aperture having a respective diameter, θ, where θ≤θ T ;

wherein the aperture diameter, θ, of each of the second plurality of plate electrodes is greater than or equal to three times an inter-electrode pitch, d, of the second plurality of plate electrodes; and

an exit electrode configured to receive the charged particles from the ion funnel and to deliver the charged particles to a high-vacuum chamber, wherein no DC electrical potential gradient is applied between the exit electrode and an adjacent one of the first plurality of plate electrodes.

2. An atmosphere-to-vacuum ion transport system as recited in claim 1 , wherein the exit electrode has an exit aperture therein having a diameter, ϑ, wherein ϑ≤2 millimeters.

3. An atmosphere-to-vacuum ion transport system as recited in claim 1 , wherein the aperture diameter, θ, of each of the second plurality of plate electrodes is greater than or equal to four times the inter-electrode pitch, d, of the second plurality of plate electrodes.

4. An atmosphere-to-vacuum ion transport system as recited in claim 3 , wherein the aperture diameter, θ, of each of the second plurality of plate electrodes is six times the inter-electrode pitch, d, of the second plurality of plate electrodes.

5. An atmosphere-to-vacuum ion transport system as recited in claim 1 , wherein a longitudinal axis of the ion transfer tube is disposed at a non-zero angle, β, relative to a central longitudinal axis of the ion funnel.

6. An atmosphere-to-vacuum ion transport system as recited in claim 5 , wherein β≤2 degrees.

7. An atmosphere-to-vacuum ion transport system as recited in claim 5 , wherein the ion transfer tube comprises a slotted bore.

8. An atmosphere-to-vacuum ion transport system as recited in claim 5 , wherein the ion transfer tube comprises a plurality of bores.

9. An atmosphere-to-vacuum ion transport system as recited in claim 1 , wherein no DC electrical potential gradient is applied between the exit electrode and two or more of the second plurality of plate electrodes adjacent to the exit electrode.

10. An atmosphere-to-vacuum ion transport system as recited in claim 1 , wherein the ion funnel further comprises:

a second funnel portion disposed between the ion tunnel and the first funnel portion and comprising a third plurality of plate electrodes configured as a stack, each electrode of the third plurality of electrodes comprising a respective aperture, θ;

wherein one or more of an inter-electrode pitch, d, an electrode thickness and a funnel half-axis, α, differs or differ between the first and second funnel portions.

11. An atmosphere-to-vacuum ion transport system comprising:

an ion transfer tube extending between an atmospheric-pressure ionization chamber and a partially evacuated chamber;

a first ion tunnel within the partially evacuated chamber configured to receive gas and charged particles from the ion transfer tube, comprising:

a first plurality of plate electrodes configured as a stack, each electrode of the first plurality of electrodes having an aperture therein, all apertures of the first plurality of electrodes having a same diameter, θ T ;

a second ion tunnel comprising:

a second plurality of plate electrodes configured as a stack,

each electrode of the second plurality of electrodes having an aperture therein, all apertures of the first plurality of electrodes having a same diameter, θ 0 , where θ 0 <θ T and wherein θ 0 is greater than or equal to three times an inter-electrode pitch, d, of the second plurality of plate electrodes;

an exit electrode having an exit aperture therein having a diameter, ϑ, and configured to receive the charged particles from the second ion tunnel and to deliver the charged particles to a high-vacuum chamber, wherein ϑ<θ 0 ; and

an ion funnel within the partially evacuated chamber configured to receive the charged particles from the first ion tunnel and to deliver the charged particles to the second ion tunnel, comprising:

a third plurality of plate electrodes configured as a stack, each electrode of the third plurality of electrodes comprising an aperture therein, each aperture having a respective diameter, θ, where θ T ≥θ≥θ 0 .

12. An atmosphere-to-vacuum ion transport system as recited in claim 11 , wherein no DC electrical potential gradient is applied between the exit electrode and an adjacent one of the first plurality of plate electrodes.

13. An atmosphere-to-vacuum ion transport system as recited in claim 11 , wherein θ 0 is greater than or equal to four times the inter-electrode pitch, d, of the second plurality of plate electrodes.

14. An atmosphere-to-vacuum ion transport system as recited in claim 13 , wherein θ 0 is equal to six times the inter-electrode pitch, d, of the second plurality of plate electrodes.

15. An atmosphere-to-vacuum ion transport system as recited in claim 11 , wherein a longitudinal axis of the ion transfer tube is disposed at a non-zero angle, β, relative to a central longitudinal axis of the ion funnel.

16. An atmosphere-to-vacuum ion transport system as recited in claim 15 , wherein β≤2 degrees.

17. An atmosphere-to-vacuum ion transport system as recited in claim 15 , wherein the ion transfer tube comprises a slotted bore.

18. An atmosphere-to-vacuum ion transport system as recited in claim 15 , wherein the ion transfer tube comprises a plurality of bores.

19. An atmosphere-to-vacuum ion transport system as recited in claim 11 , wherein no DC electrical potential gradient is applied between the exit electrode and two or more of the first plurality of plate electrodes adjacent to the exit electrode.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 10, 2020
From: SILVEIRA, JOSHUA A.; WOUTERS, ELOY R.
To: THERMO FINNIGAN LLC
Reel/Frame 053440/0826 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 10, 2020
From: MAKAROV, ALEXANDER A.; SKOBLIN, MIKHAIL G.; KOZLOVSKIY, VIACHESLAV I.
To: THERMO FISHER SCIENTIFIC (BREMEN) GMBH
Reel/Frame 053441/0197 →
Cited By (3)
US 12,376,770 US 12,376,771 US 12,381,073