Semiconductor devices
A device including a stack of layers defining a first conductor pattern at a first level of the stack and one or more semiconductor channels in respective regions, connecting a pair of parts of the first conductor pattern, and capacitively coupled via a dielectric to a coupling conductor of a second conductor pattern at a second level of the stack. The stack includes at least two insulator patterns over which the first level or second level conductor patterns is formed. A first insulator pattern occupies one or more semiconductor channel regions to provide the dielectric. The second insulator pattern defines one or more windows in the one or more semiconductor channel regions through which the second conductor pattern contacts the first insulator pattern other than via the second insulator pattern. The second insulator pattern overlaps the first insulator pattern outside the one or more semiconductor channel regions.
1. A device, comprising: a stack of layers defining at least: a source-drain conductor pattern at a first level of the stack; and one or more semiconductor channels in respective semiconductor channel regions, connecting a pair of parts of the source-drain conductor pattern, and capacitively coupled via a dielectric to a coupling conductor of a gate conductor pattern at a second level of the stack; wherein the stack comprises: at least two insulator patterns; wherein a first insulator pattern of the at least two insulator patterns occupies at least the one or more semiconductor channel regions to provide the dielectric; and a second insulator pattern of the at least two insulator patterns defines one or more windows in at least the one or more semiconductor channel regions through which the gate conductor pattern contacts the first insulator pattern other than via the insulator pattern; wherein the second insulator pattern overlaps the first insulator pattern outside the one or more semiconductor channel regions; wherein the gate conductor pattern is formed over the at least two insulator patterns; and the coupling conductor of the gate conductor pattern is formed at least over the whole area of the first insulator pattern.
2. The device according to claim 1 , wherein the one or more windows extends over at least the whole area of the respective semiconductor channel region.
3. The device according to claim 1 , wherein the first insulator pattern comprises a stack of insulator layers.
4. The device according to claim 1 , wherein the gate conductor pattern defines an array of gate conductors, providing the gate electrode for a respective column of the array of transistors, and extending also over the second insulator pattern.
5. The device according to claim 4 , wherein the gate conductors adhere better to the surface of the second insulator pattern than to the surface of the first insulator pattern.
6. The device according to claim 4 , wherein a semiconductor pattern provides the semiconductor channels, and the semiconductor pattern matches the first insulator pattern.
7. A device comprising a stack of layers defining one or more electronic elements, wherein the stack comprises at least:
one or more semiconductor channels;
a dielectric;
a first conductor pattern defining one or more coupling conductors, wherein the one or more coupling conductors are capacitively coupled to the one or one or more semiconductor channels via the dielectric;
a planarisation layer;
a second conductor pattern defining one or more routing conductors, wherein the second conductor pattern is in contact with the first conductor pattern via windows in at least the planarisation layer.
8. The device according to claim 7 , wherein the second conductor pattern comprises an etched routing conductor layer.
9. The device according to claim 7 , wherein the first conductor pattern comprises a conductive oxide.
10. The device according to claim 7 , wherein the first conductor pattern comprises indium tin oxide.
11. The device according to claim 7 , wherein the second conductor pattern is a gate conductor pattern.
12. The device according to claim 7 , wherein the routing conductors comprise gate conductor lines.
13. The device according to claim 7 , wherein the routing conductors provide gate electrodes for a respective row of transistors of an array of transistors, and extend beyond the array of transistors.
14. A device comprising a stack of layers defining one or more electronic elements, wherein the stack comprises at least:
one or more semiconductor channels;
a dielectric;
a conductive oxide pattern defining one or more coupling conductors, wherein the one or more coupling conductors are capacitively coupled to the one or one or more semiconductor channels via the dielectric;
a planarisation layer;
a gate conductor pattern defining one or more gate conductor lines, wherein the gate conductor pattern is in contact with the conductive oxide pattern via windows in at least the planarisation layer.
15. The device according to claim 14 , wherein the one or more gate conductor lines provide gate electrodes for a respective row of transistors of an array of transistors, and extend beyond the array of transistors.
16. The device according to claim 1 , wherein the coupling conductor is a gate conductor line.
17. The device according to claim 16 , wherein the gate conductor line provides gate electrodes for a row of transistors of an array of transistors, and extends beyond the array of transistors.