Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
A front end module (FEM) for a 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit. The device can include a power amplifier (PA), a 6.5 GHz resonator, and a diversity switch. The device can further include a low noise amplifier (LNA). The PA is electrically coupled to an input node and can be configured to a DC power detector or an RF power detector. The resonator can be configured between the PA and the diversity switch, or between the diversity switch and an antenna. The LNA may be configured to the diversity switch or be electrically isolated from the switch. Another 6.5 GHZ resonator may be configured between the diversity switch and the LNA. In a specific example, this device integrates a 6.5 GHz PA, a 6.5 GHZ bulk acoustic wave (BAW) RF filter, a single pole two throw (SP2T) switch, and a bypassable LNA into a single device.
1. A 6.5 GHz front end module (FEM) device, the device comprising:
a power amplifier (PA) electrically coupled to an input node;
a 6.5 GHz bulk acoustic wave (BAW) resonator electrically coupled to the PA, wherein the 6.5 GHz BAW resonator comprises
a substrate;
a support layer overlying the substrate, the support layer having an air cavity;
a first electrode overlying the air cavity and a portion of the support layer;
a first passivation layer overlying the support layer and being physically coupled to the first electrode;
a piezoelectric film overlying the support layer, the first electrode, and the air cavity, the piezoelectric film having an electrode contact via;
a second electrode formed overlying the piezoelectric film; and
a top metal formed overlying the piezoelectric film, the top metal being physically coupled to the first electrode through the electrode contact via; and
a diversity switch electrically coupled the 6.5 GHz BAW resonator, an output node, and an antenna.
2. The device of claim 1 wherein the PA comprises a 6.5 GHz power amplifier.
3. The device of claim 1 wherein the 6.5 GHz BAW resonator comprises a 6.5 GHz bulk acoustic wave (BAW) RF filter.
4. The device of claim 1 wherein the diversity switch comprises a single pole two throw (SP2T) switch.
5. The device of claim 1 further comprising a low noise amplifier (LNA) electrically coupled to an LNA input node and an LNA output node.
6. The device of claim 5 wherein the LNA comprises a bypassable LNA.
7. The device of claim 1 further comprising a DC power detector having a voltage output, the DC power detector being electrically coupled to the PA.
8. The device of claim 1 further comprising an RF power detector having an RF output from a directional coupler, the RF power detector being electrically coupled to the PA.
9. The device of claim 1 wherein the 6.5 GHz BAW resonator further comprises a bonding support layer overlying the substrate, and wherein the support layer is configured overlying the bonding support layer.
10. The device of claim 1 wherein the 6.5 GHz BAW resonator further comprises
a first contact metal formed overlying a portion of the second electrode and the piezoelectric film;
a second contact metal formed overlying a portion of the top metal and the piezoelectric film; and
a second passivation layer formed overlying the piezoelectric film, the second electrode, and the top metal.
11. A 6.5 GHz front end module (FEM) device, the device comprising:
a power amplifier (PA) electrically coupled to an input node;
a diversity switch electrically coupled to the PA and an output node; and
a 6.5 GHz BAW resonator electrically coupled to the diversity switch and an antenna;
wherein the 6.5 GHz BAW resonator comprises
a substrate;
a support layer overlying the substrate, the support layer having an air cavity;
a first electrode overlying the air cavity and a portion of the support layer;
a first passivation layer overlying the support layer and being physically coupled to the first electrode;
a piezoelectric film overlying the support layer, the first electrode, and the air cavity, the piezoelectric film having an electrode contact via;
a second electrode formed overlying the piezoelectric film; and
a top metal formed overlying the piezoelectric film, the top metal being physically coupled to the first electrode through the electrode contact via.
12. The device of claim 11 wherein the PA comprises a 6.5 GHz power amplifier.
13. The device of claim 11 wherein the 6.5 GHz resonator comprises a 6.5 GHz bulk acoustic wave (BAW) RF filter.
14. The device of claim 11 wherein the diversity switch comprises a single pole two throw (SP2T) switch.
15. The device of claim 11 further comprising a low noise amplifier (LNA) electrically coupled to an LNA input node and an LNA output node.
16. The device of claim 15 wherein the LNA comprises a bypassable LNA.
17. The device of claim 11 further comprising a DC power detector having a voltage output, the DC power detector being electrically coupled to the PA.
18. The device of claim 11 further comprising an RF power detector having an RF output from a directional coupler, the RF power detector being electrically coupled to the PA.
19. The device of claim 11 wherein the 6.5 GHz BAW resonator further comprises a bonding support layer overlying the substrate, and wherein the support layer is configured overlying the bonding support layer.
20. The device of claim 11 wherein the 6.5 GHz BAW resonator further comprises
a first contact metal formed overlying a portion of the second electrode and the piezoelectric film;
a second contact metal formed overlying a portion of the top metal and the piezoelectric film; and
a second passivation layer formed overlying the piezoelectric film, the second electrode, and the top metal.