IP Library Granted Patent US 11,621,365
Granted Patent B2
US 11,621,365 · App. 16/904,267 · Granted Apr 4, 2023

Water soluble oxide liftoff layers for GaAs photovoltaics

Inventor: Andrew Gordon Norman (Evergreen, CO)
Assignee: Alliance for Sustainable Energy, LLC
H01L31/1852H01L21/7813H01L31/1804H01L31/1892Y02E10/544
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Quick Facts
Patent No.
US 11,621,365
App. No.
16/904,267
Granted
Apr 4, 2023
Kind
B2
Abstract

Disclosed herein are compositions, methods and devices that allow for water-soluble epitaxial lift-off of III-V. Epitaxial growth of STO/SAO templates on STO (001) and Ge (001) substrates were demonstrated. Partially epitaxial GaAs growth was achieved on STO/SAO/STO substrate templates.

Claims (3)

1. A method of making photovoltaics comprising providing a water-soluble lift off layer selected from the group consisting of Sr 3 Al 2 O 6 , Sr 3 Ga 2 O 6 , Eu 3 Al 2 O 6 , and Ca 3 Al 2 O 6 on a substrate; epitaxially growing a GaAs layer upon the water-soluble lift off layer; and removing the GaAs layer by applying water to the water-soluble lift off layer to separate the GaAs layer from the substrate.

2. A method for epitaxially growing GaAs comprising providing a SrTiO 3 substrate layer and a water-soluble Sr 3 Al 2 O 6 lift off layer; epitaxially growing GaAs on the water-soluble lift off layer by metalorganic vapor phase epitaxy (MOVPE) and separating the grown GaAs from the SrTiO 3 substrate layer by applying water to the water-soluble lift off layer.

3. A method for epitaxially growing a compound selected from the group consisting of Si or InP comprising providing a SrTiO 3 substrate layer and a water-soluble lift off layer selected from the group consisting of Sr 3 Al 2 O 6 , Sr 3 Ga 2 O 6 , Eu 3 Al 2 O 6 , and Ca 3 Al 2 O 6 ; epitaxially growing Si or InP on the water-soluble lift off layer by metalorganic vapor phase epitaxy (MOVPE); and separating the grown Si or InP from the SrTiO 3 substrate layer by applying water to the water-soluble lift off layer.

Assignments (3)
CHANGE OF NAME Recorded Dec 16, 2025
From: ALLIANCE FOR SUSTAINABLE ENERGY, LLC
To: ALLIANCE FOR ENERGY INNOVATION, LLC
Reel/Frame 073993/0276 →
CONFIRMATORY LICENSE Recorded Jan 12, 2021
From: NATIONAL RENEWABLE ENERGY LABORATORY
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 054890/0507 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2020
From: NORMAN, ANDREW GORDON
To: ALLIANCE FOR SUSTAINABLE ENERGY, LLC
Reel/Frame 052967/0735 →