IP Library Granted Patent US 11,307,155
Granted Patent B2
US 11,307,155 · App. 16/905,099 · Granted Apr 19, 2022

Device for adjusting and exchanging beamstops

Inventor: Wolfgang Gehrlein (Ruelzheim, DE)
G01N23/201G01N23/207G01N23/20008G21K1/10G01N2223/321
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,307,155
App. No.
16/905,099
Granted
Apr 19, 2022
Kind
B2
Abstract

A beamstop arrangement for an x-ray-optical system is adjustable in an xy plane perpendicular to a z-direction for optimizing a ratio of useful radiation reaching a surface to interfering radiation of an x-ray beam in the z-direction. The beamstop arrangement comprises a plurality of beamstops of differing size and/or geometry arranged on an exchanging mount, which is installed on a carriage displaceable in the xy plane by means of a drive unit having at least one positioning motor. The multiple beamstops can be located in a vacuum, while the drive motors and all electronic components can be positioned outside the vacuum, so that no heat development takes place in the measurement region. Corruption of the measurement result due to a changed measurement background is thus avoided.

Claims (22)

1. A beamstop arrangement for an x-ray optical system that is adjustable in an xy plane perpendicular to a z-direction for optimum setting of the ratio of useful radiation reaching a surface to interfering radiation of an x-ray beam in the z-direction, comprising:

a plurality of beamstops of differing size and/or geometry, which are arranged on an exchanging mount having a rotatable carrier wheel on the circumference of which multiple beamstops each of differing size and/or geometry are arranged; and

a carriage on which the exchanging mount is installed that is displaceable in the xy plane by means of a drive unit having at least two positioning motors.

2. The beamstop arrangement as claimed in claim 1 , wherein the drive unit moves the carriage to position a selected beamstop in the beam path of the x-ray-optical system, the carriage being linearly displaceable with the exchanging mount both in the x-direction and the y-direction.

3. The beamstop arrangement as claimed in claim 2 , wherein the drive unit comprises a stepping motor.

4. The beamstop arrangement as claimed in claim 1 , wherein a lock mechanism is provided for fixing a selected position of the exchanging mount.

5. The beamstop arrangement as claimed in claim 1 , wherein a DC electric motor for driving the carrier wheel is provided.

6. The beamstop arrangement as claimed in claim 1 , wherein a Maltese cross gearing is provided.

7. The beamstop arrangement as claimed in claim 6 , wherein the Maltese cross gearing is driven via a coupling having a radial offset.

8. The beamstop arrangement as claimed in claim 7 , wherein the radial offset of the coupling is realized by a compound slide coupling or a universal joint.

9. The beamstop arrangement as claimed in claim 1 , wherein a gear drive having lock positions is provided.

10. The beamstop arrangement as claimed in claim 1 , wherein the exchanging mount comprises a belt or chain device, which can be pretensioned, and on which the beamstops are installed.

11. The beamstop arrangement as claimed in claim 1 , wherein the carriage is arranged in a vacuum and the positioning motors of the drive unit are arranged in a region at ambient pressure, and wherein the positioning motors transmit drive movement of the carriage via positioning elements from the ambient pressure region into the vacuum, the positioning elements extending through vacuum seals between the ambient pressure region and the vacuum.

12. An x-ray-optical system comprising:

an x-ray source from which x-ray radiation is guided as a primary beam onto a sample to be studied;

an x-ray detector for receiving x-ray radiation diffracted or scattered at the sample; and

a beamstop arrangement as claimed in claim 1 wherein the x-ray source, the sample, and the x-ray detector are arranged along the z-direction, and wherein the beamstop arrangement positions a selected one of said beamstops along the z-direction between the sample and the x-ray detector.

13. The x-ray-optical system as claimed in claim 12 , wherein the x-ray-optical system is configured for measuring small angle scattering between 0.05° and 14°.

14. The x-ray-optical system as claimed in claim 12 , wherein the beamstop arrangement is arranged on the z-axis directly in front of the x-ray detector.

15. The x-ray-optical system as claimed in claim 12 , further comprising an alignment device used by the positioning motors of the beamstop arrangement to position the selected beamstop in the x-ray beam.

16. The x-ray-optical system as claimed in claim 12 , further comprising an analysis unit that determines an intensity of the x-ray radiation incident on a selected detector surface of the x-ray detector relative to a defined position of the selected beamstop of the beamstop arrangement.

17. The x-ray-optical system as claimed in claim 12 , further comprising multiple adjustable apertures having different openings that are arranged in a path of the primary beam in front of the sample.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2025
From: BRUKER AXS GMBH
To: BRUKER AXS SE
Reel/Frame 071437/0901 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 6, 2020
From: GEHRLEIN, WOLFGANG
To: BRUKER AXS GMBH
Reel/Frame 053416/0348 →
Priority Claims (1)
DE 102019208834.1 · Jun 18, 2019 · national
Continuity (1)
Related Publication 20200400592A1 · Dec 24, 2020
Cited By (1)
US 12,716,855