IP Library Granted Patent US 11,237,479
Granted Patent B2
US 11,237,479 · App. 16/920,042 · Granted Feb 1, 2022

Configuring optical layers in imprint lithography processes

Inventors: Vikramjit Singh (Pflugerville, TX); Michael N. Miller (Austin, TX); Frank Y. Xu (Austin, TX); Christopher Fleckenstein (Round Rock, TX)
Assignee: Molecular Imprints, Inc.
G03F7/0002G02B5/1857G02F1/13394G03F7/0005G03F7/168G02B2207/101G02F1/13398
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Quick Facts
Patent No.
US 11,237,479
App. No.
16/920,042
Granted
Feb 1, 2022
Kind
B2
Abstract

An imprint lithography method of configuring an optical layer includes depositing a set of droplets atop a side of a substrate in a manner such that the set of droplets do not contact a functional pattern formed on the substrate. The imprint lithography method further includes curing the set of droplets to form a spacer layer associated with the side of the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the set of droplets at a position spaced apart from the functional pattern.

Claims (31)

1. An imprint lithography method of configuring an optical layer, the imprint lithography method comprising:

depositing a first set of droplets onto a substrate that comprises a functional pattern;

curing the first set of droplets to form a spacer layer associated with the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the first set of droplets depositing a second set of droplets atop the substrate such that each droplet of the second set of droplets is respectively dispensed atop a droplet of the first set of droplets; and

curing the second set of droplets to increase a height of the spacer layer, wherein a first number of droplets in the first set of droplets is not equal to a second number of droplets in the second set of droplets such that the spacer layer has a variable height.

2. The imprint lithography method of claim 1 , wherein each droplet of the first set of droplets has a volume of about 1 pL to about 100 pL.

3. The imprint lithography method of claim 1 , further comprising generating a drop-on demand programming scheme.

4. The imprint lithography method of claim 1 , further comprising providing a printing screen.

5. The imprint lithography method of claim 1 , further comprising imprinting the functional pattern on the substrate.

6. The imprint lithography method of claim 1 , wherein depositing the first set of droplets onto the substrate comprises dispensing droplet volumes of a polymerizable substance onto the substrate.

7. The imprint lithography method of claim 1 , further comprising:

depositing each droplet of the first set of droplets directly on the substrate; and

curing the first set of droplets directly on the substrate.

8. The imprint lithography method of claim 1 , wherein each droplet of the first set of droplets has a cured height of about 0.5 μm to about 20.0 μm.

9. The imprint lithography method of claim 8 , further comprising, after the first set of droplets is cured:

depositing each droplet of the second set of droplets directly atop a droplet of the first set of droplets; and

curing the second set of droplets directly atop the first set of droplets to increase a height of the spacer layer.

10. The imprint lithography method of claim 9 , wherein the spacer layer has a wedge shape.

11. The imprint lithography method of claim 1 , wherein the functional pattern is imprinted onto the substrate.

12. The imprint lithography method of claim 11 , wherein the functional pattern is imprinted along an interior region of the substrate, the imprint lithography method further comprising depositing the first set of droplets along a peripheral edge of the substrate.

13. The imprint lithography method of claim 1 , wherein the functional pattern is imprinted on a side of the substrate that is opposite the first set of droplets.

14. The imprint lithography method of claim 13 , further comprising depositing the first set of droplets across an entirety of a portion of the substrate.

15. The imprint lithography method of claim 1 , further comprising attaching the substrate to the surface adjacent the substrate at the first set of droplets such that the spacer layer forms a gap between the substrate and the surface.

16. The imprint lithography method of claim 1 , wherein the gap provides a low index region having an index of refraction in a range of about 1.0 to about 1.2.

17. The imprint lithography method of claim 16 , wherein the low index region comprises air.

18. The imprint lithography method of claim 17 , wherein the low index region has an index of refraction of 1.

19. An optical layer, comprising:

a substrate;

a functional pattern formed on the substrate;

a first cured set of droplets disposed on the substrate, the first cured set of droplets forming a spacer layer associated with the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the first cured set of droplets; and

a second cured set of droplets, each droplet of the second cured set of droplets atop a cured droplet of the first cured set of droplets, thereby increasing a height of the spacer layer relative to the first cured set of droplets,

wherein a number of droplets in the first set of cured droplets is not equal to a number of droplets in the second cured set of droplets, such that the spacer layer has a variable height.

Assignments (3)
SECURITY INTEREST Recorded Oct 20, 2025
From: MAGIC LEAP, INC.; MENTOR ACQUISITION ONE, LLC; MOLECULAR IMPRINTS, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073008/0696 →
SECURITY INTEREST Recorded May 24, 2022
From: MOLECULAR IMPRINTS, INC.; MENTOR ACQUISITION ONE, LLC; MAGIC LEAP, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 060338/0665 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2020
From: SINGH, VIKRAMJIT; MILLER, MICHAEL N.; XU, FRANK Y.; FLECKENSTEIN, CHRISTOPHER
To: MOLECULAR IMPRINTS, INC.
Reel/Frame 053112/0486 →