IP Library Granted Patent US 11,688,694
Granted Patent B2
US 11,688,694 · App. 16/927,805 · Granted Jun 27, 2023

Secure chips with serial numbers

Inventors: Johannes Cornelis Jacobus De Langen (Delft, NL); Marcel Nicolaas Jacobus van Kervinck (The Hague, NL); Vincent Sylvester Kuiper (Monster, NL)
Assignee: ASML Netherlands B.V.
H01L23/544G06F21/44G06F21/73G06K7/1417G06K19/06037G06K19/06178G09C5/00H01L25/0652H04L9/14H04L9/3271H04L63/08G06F2221/2103H01L2223/5444H01L2223/54413H01L2223/54433
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Quick Facts
Patent No.
US 11,688,694
App. No.
16/927,805
Granted
Jun 27, 2023
Kind
B2
Abstract

An electronic device comprising a semiconductor chip which comprises a plurality of structures formed in the semiconductor chip, wherein the semiconductor chip is a member of a set of semiconductor chips, the set of semiconductor chips comprises a plurality of subsets of semiconductor chips, and the semiconductor chip is a member of only one of the subsets. The plurality of structures of the semiconductor chip includes a set of common structures which is the same for all of the semiconductor chips of the set, and a set of non-common structures, wherein the non-common structures of the semiconductor chip of the subset is different from a non-common circuit of the semiconductor chips in every other subset. At least a first portion of the non-common structures and a first portion of the common structures form a first non-common circuit, wherein the first non-common circuit of the semiconductor chips of each subset is different from a non-common circuit of the semiconductor chips in every other subset. At least a second portion of the non-common structures is adapted to store or generate a first predetermined value which uniquely identifies the first non-common circuit, wherein the first predetermined value is readable from outside the semiconductor chip by automated reading means.

Claims (25)

1. An electronic device comprising a semiconductor chip that comprises a plurality of structures formed in the semiconductor chip:

wherein the semiconductor chip is a member of a set of semiconductor chips, wherein the set of semiconductor chips comprises a plurality of subsets of semiconductor chips, and the semiconductor chip is a member of only one of the subsets; and

wherein the plurality of structures of the semiconductor chip includes a set of common structures which is the same for all of the semiconductor chips of the set, and a set of non-common structures, wherein the non-common structures of the semiconductor chip of the subset are different from the non-common structures of the semiconductor chips in every other subset.

2. The electronic device of claim 1 , wherein at least a first portion of the non-common structures is adapted to store or generate a first predetermined value.

3. The electronic device of claim 2 , wherein the first predetermined value is readable from outside the semiconductor chip by automated electromagnetic, optical, or electronic reading means.

4. The electronic device of claim 2 , wherein the first predetermined value is readable from outside the semiconductor chip by automated reading means.

5. The electronic device of claim 2 , wherein the first predetermined value is readable from the structure of the first portion of the non-common structures and/or wherein the shape of the first portion of the non-common structures stores the first predetermined value.

6. The electronic device of claim 2 , wherein a first non-common circuit is formed from the first portion of the non-common structures of the semiconductor chip and a first portion of the common structures of the semiconductor chip, and wherein the circuit configuration of the first non-common circuit of the semiconductor chips of each subset is different from a circuit configuration of any of the semiconductor chips in every other subset.

7. The electronic device of claim 6 , wherein the first non-common circuit comprises at least one of:

a read-only memory circuit which is fabricated with the first predetermined value pre-stored in the read-only memory circuit;

a logic circuit, wherein the logic circuit is adapted to generate the first predetermined value.

8. The electronic device of claim 1 wherein the set of non-common structures of the semiconductor chip is different from the set of non-common structures of every other semiconductor chip of the set of the semiconductor chips.

9. The electronic device of claim 6 , wherein the electronic device comprises at least one input terminal and at least one output terminal, and the first non-common circuit is connected to the input and output terminals, and wherein the first predetermined value is electronically readable from the output terminal.

10. The electronic device of claim 6 , wherein the electronic device comprises at least one input terminal for receiving a challenge and at least one output terminal for outputting a response, and the first non-common circuit forms a challenge-response circuit connected to the at least one input terminal and the at least one output terminal,

wherein the challenge-response circuit is adapted for generating a response at the at least one output terminal based on a challenge applied to the at least one input terminal, the challenge and the response having a predetermined relationship.

11. The electronic device of claim 10 , wherein the response generated by the challenge-response circuit depends on both the challenge applied to the at least one input terminal and the first predetermined value.

12. The electronic device of claim 1 , wherein the plurality of structures are formed on three or more layers of the semiconductor chip, including one or more non-common layers containing the non-common structures, and at least one common layer above the one or more non-common layers, the at least one common layer containing common structures but no non-common structures.

13. The electronic device of claim 12 , wherein all of the non-common structures are formed in only one layer of the semiconductor chip.

14. The electronic device of claim 12 , wherein the semiconductor chip comprises at least a second common layer below the one or more common layers, the second common layer containing common structures but no non-common structures.

15. The electronic device of claim 1 , wherein the plurality of structures are formed in a plurality of layers of the semiconductor chip, and the non-common structures include at least one of: connections between metal layers of the plurality of layers; connections between a metal layer and a gate in a contact layer of the plurality of layers; connections in a local interconnect layer of the plurality of layers; and a P- or N-doped diffusion region of a transistor or diode of one of the plurality of layers.

16. The electronic device of claim 12 , wherein the non-common structures of the one or more common layers are formed using a charged particle multi-beamlet lithography system, and the common layers are formed using a mask-based lithography process.

17. The electronic device of claim 1 , wherein the set of semiconductor chips are all formed from a single wafer.

18. The electronic device of claim 2 , wherein the first predetermined value of the semiconductor chip is different from a predetermined value of every other semiconductor chip of the set of the semiconductor chips.

19. The electronic device of claim 1 , wherein the set of common structures and the set of non-common structures of the semiconductor chip are interconnected to form one or more electronic circuits.

20. The electronic device of claim 6 , wherein a second non-common circuit is formed from a second portion of the non-common structures of the semiconductor chip and a second portion of the common structures of the semiconductor chip, and wherein the first predetermined value of the semiconductor chip has a value that uniquely identifies the second non-common circuit.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 13, 2020
From: DE LANGEN, JOHANNES CORNELIS JACOBUS; VAN KERVINCK, MARCEL NICOLAAS JACOBUS; KUIPER, VINCENT SYLVESTER
To: MAPPER LITHOGRAPHY IP B.V.
Reel/Frame 053195/0558 →
COURT APPOINTMENT Recorded Jul 13, 2020
From: MAPPER LITHOGRAPHY HOLDING B.V.; MAPPER LITHOGRAPHY IP B.V.; MAPPER LITHOGRAPHY B.V.
To: WITTEKAMP, J.J.
Reel/Frame 053195/0577 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 13, 2020
From: WITTEKAMP, J.J.
To: ASML NETHERLANDS B.V.
Reel/Frame 053197/0001 →
Continuity (10)
Continuation 15444396 · Feb 28, 2017
Provisional Application 62385049 · Sep 8, 2016
Provisional Application 62413470 · Oct 27, 2016
Provisional Application 62438548 · Dec 23, 2016
Provisional Application 62456144 · Feb 8, 2017
Provisional Application 62458040 · Feb 13, 2017
Provisional Application 62458071 · Feb 13, 2017
Provisional Application 62458062 · Feb 13, 2017
Provisional Application 62458082 · Feb 13, 2017
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