Semiconductor device and manufacturing method of semiconductor device
A semiconductor device includes a source region, a drain region, and a gate insulating film formed on a substrate, a gate electrode formed on the gate insulating film, a first insulating film pattern formed to extend from the source region to a part of a top surface of the gate electrode, and a spacer formed on a side surface of the gate electrode in a direction of the drain region.
1. A manufacturing method of a semiconductor device, the manufacturing method comprising:
forming a gate insulating film and a gate electrode on a substrate;
forming a first insulating film on an entire region of the substrate;
forming a first mask pattern on the first insulating film;
forming a first insulating film pattern on one end of the gate electrode using the first mask pattern, and forming a spacer on an other end of the gate electrode;
removing the first mask pattern;
forming a source region adjacent to the one end of the gate electrode; and
forming a drain region adjacent to the other end of the gate electrode.
2. The method of claim 1 , further comprising:
depositing a second insulating film on an entire surface of the substrate;
forming a second mask pattern on the second insulating film;
removing the second insulating film formed on the one end of the gate electrode by using the second mask pattern, and forming a second insulating film pattern on the other end of the gate electrode and the spacer; and
removing the second mask pattern.
3. The method of claim 2 , further comprising:
forming a drain silicide layer on the drain region;
forming a source silicide layer on the source region;
forming a gate silicide layer on the gate electrode; and
forming a drain contact plug, a source contact plug, and a gate contact plug on the drain silicide layer, the source silicide layer, and the gate silicide layer, respectively.
4. The method of claim 3 , further comprising:
forming a deep well region and a device isolation region on the substrate;
forming a first conductivity type well region in the deep well region;
forming a first conductivity type body region and a second conductivity type extended drain junction region on the first conductivity type well region; and
forming a deep well pickup region and a body pickup region in the deep well region and the first conductivity type body region, respectively.
5. The method of claim 2 , wherein the first insulating film pattern and the second insulating film pattern are in contact with each other.
6. The method of claim 2 , wherein the first insulating film pattern and the second insulating film pattern are formed to be spaced apart from each other.
7. The method of claim 2 , wherein the second insulating film pattern is formed so as to overlap with the first insulating film pattern, and the second insulating film pattern is formed on the first insulating film pattern.
8. The method of claim 2 , wherein a thickness of the first insulating film pattern is thinner than a thickness of the second insulating film pattern.
9. The method of claim 3 , wherein the first insulating film pattern partially overlaps the source region and contacts the source silicide layer, and is disposed spaced apart from the source contact plug by a predetermined distance.
10. The method of claim 3 , wherein the second insulating film pattern partially overlaps the drain region, contacts the drain silicide layer, and is disposed spaced apart from the drain contact plug by a predetermined distance.
11. The method of claim 3 , wherein the first and second insulating film patterns are formed spaced apart by a predetermined distance from the gate contact plug.
12. The method of claim 4 , wherein the first insulating film pattern is formed to directly contact the first conductivity type body region, the source region, and the source silicide layer.
13. The method of claim 4 , wherein the second insulating film pattern is formed to be in direct contact with the second conductivity type extended drain junction region, the drain region, and the drain silicide layer.
14. The method of claim 3 , further comprising:
forming a borderless contact insulating film and an interlayer insulating film on the drain silicide layer and the source silicide layer; and
forming the drain contact plug and the source contact plug, after the forming the borderless contact insulating film and the interlayer insulating film on the drain silicide layer and the source silicide layer.
15. The method of claim 3 , wherein the gate contact plug is completely surrounded by the first insulating film pattern and the second insulating film pattern, when viewed from a top view of the semiconductor device.
16. The method of claim 1 , wherein a top surface of the gate electrode is formed to be in direct contact with the first insulating film pattern and the second insulating film pattern.